Abstract: A mass flow rate-controlling apparatus including a mass flow rate-detecting mechanism 8 a flow rate-controlling valve mechanism 10 and a mechanism 44 for controlling the flow rate-controlling valve mechanism based on a flow rate-setting signal S0 input from outside and a flow rate signal S1, the flow path being provided with a pressure-detecting mechanism 42 for detecting the pressure of the fluid to output the detected pressure signal, so that the controlling mechanism selectively switches a first control mode for controlling the mass flow rate based on the flow rate signal and the flow rate-setting signal without using the detected pressure signal, and a second control mode for controlling the mass flow rate based on the detected pressure signal, the flow rate signal and the flow rate-setting signal, based on a pressure variation obtained from the detected pressure signal.

Abstract: A flow controller and a test method therefor are provided which enable testing of the flow control of a process gas passing through a fluid path during operation of semiconductor manufacturing apparatuses. While the flow control is being performed to adjust the flow rate through the fluid path to a flow rate set value, a predetermined number of pieces of test sampling information is collected and associated with the flow rate set value for storage. The test sampling information is made up of a detected flow rate value of the process gas, a detected pressure value, and valve drive control information delivered to a flow control valve mechanism. Then, coefficients of association are sequentially determined which indicate the associations of the predetermined number of detected flow rate values and pieces of valve drive control information, which are stored as the test sampling information.

Abstract: A method for calibrating a mass flow controller comprising a calibrating valve disposed on the most upstream side of a path, a mass flow rate control valve mechanism, a tank provided at the path on the upstream side of the mass flow rate control valve mechanism, a mass-flow-rate-sensing means, a pressure-sensing means, a means for controlling the mass flow rate control valve mechanism, and a mass flow rate calibration control means, the method comprising the steps of (1) permitting a fluid at a set mass flow rate to flow through the path, (2) setting the mass flow rate control valve mechanism at a degree of opening that the mass flow rate of the fluid is equal to the set mass flow rate, (3) closing the calibrating valve, (4) measuring the pressure and mass flow rate of the fluid after a fluid flow from the tank is stabilized, (5) determining a variation ratio of the pressure and mass flow rate to reference pressure and mass flow rate measured by the same procedures in an initial state, and (6) performing cali

Abstract: A flow controller and a test method therefor are provided which enable testing of the flow control of a process gas passing through a fluid path during operation of semiconductor manufacturing apparatuses. While the flow control is being performed to adjust the flow rate through the fluid path to a flow rate set value, a predetermined number of pieces of test sampling information is collected and associated with the flow rate set value for storage. The test sampling information is made up of a detected flow rate value of the process gas, a detected pressure value, and valve drive control information delivered to a flow control valve mechanism. Then, coefficients of association are sequentially determined which indicate the associations of the predetermined number of detected flow rate values and pieces of valve drive control information, which are stored as the test sampling information.

Abstract: A peg for a stringed instrument having a head and a hole formed in the head includes: a main body which is mounted to the head; a worm gear rotatably provided to the main body and having a knob on an end portion thereof; a worm wheel rotatably supported by the main body and engaging with the worm gear; a winding shaft having an axis, the winding shaft connected to the worm wheel and inserted into the hole of the head in the condition that the main body is mounted to the head; and a ring-shaped guide member penetrated by the winding shaft and fitted into the hole of the head. The guide member is inserted to the main body along the axis of the winding shaft so as to be secured to the main body.

Abstract: A method for calibrating a mass flow controller comprising a calibrating valve disposed on the most upstream side of a path, a mass flow rate control valve mechanism, a tank provided at the path on the upstream side of the mass flow rate control valve mechanism, a mass-flow-rate-sensing means, a pressure-sensing means, a means for controlling the mass flow rate control valve mechanism, and a mass flow rate calibration control means, the method comprising the steps of (1) permitting a fluid at a set mass flow rate to flow through the path, (2) setting the mass flow rate control valve mechanism at a degree of opening that the mass flow rate of the fluid is equal to the set mass flow rate, (3) closing the calibrating valve, (4) measuring the pressure and mass flow rate of the fluid after a fluid flow from the tank is stabilized, (5) determining a variation ratio of the pressure and mass flow rate to reference pressure and mass flow rate measured by the same procedures in an initial state, is and (6) performing c

Abstract: A mass flow rate-controlling apparatus comprising a mass flow rate-detecting means 8 for detecting a mass flow rate to output a flow rate signal, and a flow rate-controlling valve mechanism 10 for changing a valve-opening degree in response to a valve-operating signal to control the mass flow rate in a flow path 6 for a fluid, and further comprising a means 44 for controlling the flow rate-controlling valve mechanism based on a flow rate-setting signal S0 input from outside and a flow rate signal S1, the flow path being provided with a pressure-detecting means 42 for detecting the pressure of the fluid to output the detected pressure signal, so that the controlling means selectively switches a first control mode for controlling the mass flow rate based on the flow rate signal and the flow rate-setting signal without using the detected pressure signal, and a second control mode for controlling the mass flow rate based on the detected pressure signal, the flow rate signal and the flow rate-setting signal, based

Abstract: The present invention provides a peg for stringed instruments, which can reduce rotational errors of a worm gear due to a backlash caused during tuning of a string as low as possible. The peg is also possible to reduce the friction at each rotational portion, to prevent it from seizing up, to greatly reduce a work time required for wiping off a fluid lubricant, and to retain a stable performance for a long time. In the present invention, the peg for stringed instruments comprises a worm rotatable in accordance with rotation of a knob; and a worm wheel mated with the worm and communicated with a string attachment. A solid lubricating material layer is formed on a surface of at least one of the worm and the worm wheel as well as on a worm rod of the worm.

Abstract: A peg for a stringed instrument having a head and a hole formed in the head includes: a main body which is mounted to the head; a worm gear rotatably provided to the main body and having a knob on an end portion thereof; a worm wheel rotatably supported by the main body and engaging with the worm gear; a winding shaft having an axis, the winding shaft connected to the worm wheel and inserted into the hole of the head in the condition that the main body is mounted to the head; and a ring-shaped guide member penetrated by the winding shaft and fitted into the hole of the head. The guide member is inserted to the main body along the axis of the winding shaft so as to be secured to the main body.

Abstract: The present invention provides a peg for stringed instruments, which can reduce rotational errors of a worm gear due to a backlash caused during tuning of a string as low as possible. The peg is also possible to reduce the friction at each rotational portion, to prevent it from seizing up, to greatly reduce a work time required for wiping off a fluid lubricant, and to retain a stable performance for a long time.

Abstract: A ukulele tuning machine to be mounted on a head stock (A) of a ukulele and inserted into an aperture (1) provided therein, comprising: a hollow, cylindrical housing (2) having a top plate which has a shaft hole (4) at an off-centered position; a pinion shaft (3) having a pinion (3b) inside said housing (2) and connecting a tuning knob (10) outside said housing (2), said pinion and said tuning knob being placed interposing said shaft hole (4) of said housing (2) therebetween; a string post (7) having one and the other ends and including an internal gear (5) provided at said one end, which can rotatably engage with said pinion (3b) within said housing (2), and a string-fastening portion (6) formed at the other end; a collar (14) having a flange (3c) contacting the back of said internal gear (5) within said housing (2) and a threaded portion (14b) formed on a cylindrical body receiving said winding shaft (7) therethrough; a stopper means (15) for preventing said collar from slipping out, which is located and se