Abstract: A flow sensor, which includes a diaphragm, is made such that the diaphragm is flat or outwardly deformed to allow fluid flow rate measurements at higher flow rates. The diaphragm is made of an upper set of insulating films, electric devices, and a lower set of insulating films. The component layers of the diaphragm are formed such that the average stress in the upper set of insulating films is more compressive than the average stress in the lower set of insulating films.

Abstract: A flow sensor includes a substrate in which a cavity is formed. A thin film structure is located above the cavity. The thin film structure includes a patterned multilayer film. A dummy film layer is formed or a number of dummy film layers are formed in close proximity to the patterned multilayer film to protect the multilayer film from the effect of reduction gas.

Abstract: An airflow meter has a member that defines a bypass passage. The bypass passage has a sensing passage in which a sensor tip is disposed. The sensing passage is restricted in at least a lateral direction that is a direction perpendicular to both a longitudinal direction of the sensing passage and a perpendicular direction perpendicular to the surface of the sensor tip. This arrangement defines relatively wider distance in the perpendicular direction on the sensor tip.

Abstract: An airflow meter has a membrane type sensor element. The sensor element is supported on a support member so that a sensing surface of the sensor element is in parallel to the airflow direction. The airflow meter has at least one means for protecting the sensor element from dust such as foreign particles. The protecting means is provided with an obstruction member that is disposed upstream or downstream of the sensor element with respect to the airflow direction. The sensor element is hidden behind the obstruction member. The obstruction member has gradually spreading surfaces and gradually converging surfaces along the airflow direction. Alternatively, the protecting means can be provided with a deflector, a cover member, a flow guide member, an inlet or a dust collector.

Abstract: A flow sensor, which includes a diaphragm, is made such that the diaphragm is flat or outwardly deformed to allow fluid flow rate measurements at higher flow rates. The diaphragm is made of an upper set of insulating films, electric devices, and a lower set of insulating films. The component layers of the diaphragm are formed such that the average stress in the upper set of insulating films is more compressive than the average stress in the lower set of insulating films.

Abstract: A thin-film type flow sensor having a thin-film part in which a plurality of patterned resistor films are sandwiched between a pair of insulator films. The resistance ratios among the resistor films are minimized from one sensor to another made from the same wafer. The flow sensor has a lower insulator film, the resistor films, and an upper film laminated in succession on a substrate. The resistor films include a patterned fluid thermometer, a temperature detector, and a heater. The heater has a wiring configuration in which resistor elements are connected in a parallel manner. The wiring widths of the heater and the thermometer can thus be made identical, so that the resistance ratios become invariant over the wafer surface, irrespective of a disparity in etching variations.

Abstract: A flow sensor includes a substrate in which a cavity is formed. A thin film structure is located above the cavity. The thin film structure includes a patterned multilayer film. A dummy film layer is formed or a number of dummy film layers are formed in close proximity to the patterned multilayer film to protect the multilayer film from the effect of reduction gas.

Abstract: A more reliable gas sensor includes a support film formed on a surface of a substrate and a heater electrode. Surrounding the heater electrode is a heater electrical insulation layer 4. Detection electrodes are formed above the electrical insulation layer. A flat insulating layer is formed over the heater insulation layer, and surfaces of the detection electrodes are exposed and flush with the upper surface of the flat insulating layer. A sensitive film is formed above the flat insulating layer in contact with the surfaces of the detection electrodes. A hollow cavity is formed in the substrate.

Abstract: An angular velocity sensor has a weight portion that can be drive-oscillated in a driving direction and be oscillated in a detecting direction when an angular velocity is applied, and unnecessary oscillation suppressing electrodes that can generate an electrostatic force to be applied to the weight portion in the detecting direction. The electrostatic force prevents the weight portion from being drive-oscillated in a direction other than the driving direction. As a result, unnecessary oscillation of the weight portion can be prevented even when the angular velocity sensor has a processing error.

Abstract: An angular velocity sensor device includes drive oscillators oscillated by driving in drive direction a0, and detecting oscillators connected to the drive oscillators and oscillated in detecting directions a1, a2 by a Coriolis force, which is generated by an angular velocity in a direction K. The directions a1, a2 respectively make an angle &thgr; with the direction K. Detection electrodes are provided for the detecting oscillators, and produce output signals. A signal caused by an inertia force and a signal caused by the Coriolis force are obtained from the output signals, and the angular velocity is determined by the two signals.

Abstract: An angular velocity sensor has a weight portion that can be drive-oscillated in a driving direction and be oscillated in a detecting direction when an angular velocity is applied, and unnecessary oscillation suppressing electrodes that can generate an electrostatic force to be applied to the weight portion in the detecting direction. The electrostatic force prevents the weight portion from being drive-oscillated in a direction other than the driving direction. As a result, unnecessary oscillation of the weight portion can be prevented even when the angular velocity sensor has a processing error.