Patents by Inventor Takao Kokublin

Takao Kokublin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical element and exposure apparatus
    Publication number: 20060291060
    Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
    Type: Application
    Filed: August 26, 2004
    Publication date: December 28, 2006
    Inventors: Takeshi Shirai, Takao Kokublin, Hitoshi Ishizawa, Atsunobi Murakami