Patents by Inventor Takao Kokubun
Takao Kokubun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10175584Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: GrantFiled: October 17, 2013Date of Patent: January 8, 2019Assignee: NIKON CORPORATIONInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami
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Patent number: 9046796Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: GrantFiled: February 28, 2012Date of Patent: June 2, 2015Assignee: NIKON CORPORATIONInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami
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Patent number: 8724075Abstract: An optical element includes a base material, a liquid-repellent member provided on at least a part of a surface of the base material, and a light-reducing member provided between the base material and the liquid-repellent member to protect the liquid-repellent member from radiation of light by reducing the light. The optical element is usable for a liquid immersion exposure apparatus for exposing a substrate through a liquid. It is possible to avoid any inflow of the liquid in a liquid immersion area into an unexpected place via the optical element.Type: GrantFiled: September 13, 2010Date of Patent: May 13, 2014Assignee: Nikon CorporationInventors: Takao Kokubun, Ryuichi Hoshika
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Publication number: 20140043592Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: ApplicationFiled: October 17, 2013Publication date: February 13, 2014Applicant: NIKON CORPORATIONInventors: Takeshi SHIRAI, Takao KOKUBUN, Hitoshi ISHIZAWA, Atsunobu MURAKAMI
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Publication number: 20120212716Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: ApplicationFiled: February 28, 2012Publication date: August 23, 2012Applicant: NIKON CORPORATIONInventors: Takeshi SHIRAI, Takao KOKUBUN, Hitoshi ISHIZAWA, Atsunobu MURAKAMI
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Publication number: 20120206705Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: ApplicationFiled: April 18, 2012Publication date: August 16, 2012Applicant: NIKON CORPORATIONInventors: Takeshi SHIRAI, Takao KOKUBUN, Hitoshi ISHIZAWA, Atsunobu MURAKAMI
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Patent number: 8189170Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: GrantFiled: February 25, 2010Date of Patent: May 29, 2012Assignee: Nikon CorporationInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami
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Patent number: 8149381Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: GrantFiled: May 2, 2006Date of Patent: April 3, 2012Assignee: Nikon CorporationInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami
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Patent number: 7993008Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: GrantFiled: November 14, 2008Date of Patent: August 9, 2011Assignee: Nikon CorporationInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami
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Publication number: 20110013160Abstract: An optical element includes a base material, a liquid-repellent member provided on at least a part of a surface of the base material, and a light-reducing member provided between the base material and the liquid-repellent member to protect the liquid-repellent member from radiation of light by reducing the light. The optical element is usable for a liquid immersion exposure apparatus for exposing a substrate through a liquid. It is possible to avoid any inflow of the liquid in a liquid immersion area into an unexpected place via the optical element.Type: ApplicationFiled: September 13, 2010Publication date: January 20, 2011Applicant: NIKON CORPORATIONInventors: Takao Kokubun, Ryuichi Hoshika
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Patent number: 7812926Abstract: An optical element includes a base material, a liquid-repellent member provided on at least a part of a surface of the base material, and a light-reducing member provided between the base material and the liquid-repellent member to protect the liquid-repellent member from radiation of light by reducing the light. The optical element is usable for a liquid immersion exposure apparatus for exposing a substrate through a liquid. It is possible to avoid any inflow of the liquid in a liquid immersion area into an unexpected place via the optical element.Type: GrantFiled: August 30, 2006Date of Patent: October 12, 2010Assignee: Nikon CorporationInventors: Takao Kokubun, Ryuichi Hoshika
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Publication number: 20100220305Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: ApplicationFiled: February 25, 2010Publication date: September 2, 2010Applicant: NIKON CORPORATIONInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami
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Patent number: 7697111Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: GrantFiled: August 26, 2004Date of Patent: April 13, 2010Assignee: Nikon CorporationInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami
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Publication number: 20090103070Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: ApplicationFiled: November 14, 2008Publication date: April 23, 2009Applicant: Nikon CorporationInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami
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Publication number: 20070201011Abstract: An optical element includes a base material, a liquid-repellent member provided on at least a part of a surface of the base material, and a light-reducing member provided between the base material and the liquid-repellent member to protect the liquid-repellent member from radiation of light by reducing the light. The optical element is usable for a liquid immersion exposure apparatus for exposing a substrate through a liquid. It is possible to avoid any inflow of the liquid in a liquid immersion area into an unexpected place via the optical element.Type: ApplicationFiled: August 30, 2006Publication date: August 30, 2007Applicant: NIKON CORPORATIONInventors: Takao Kokubun, Ryuichi Hoshika
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Publication number: 20060203218Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: ApplicationFiled: May 2, 2006Publication date: September 14, 2006Applicant: NIKON CORPORATIONInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami