Abstract: A resin pipe 30 and a resin member 31 are fixed to a setting portion 5 provided on the front side of a base 6, and a timing pulley 13 which is provided on the back side of the base 6 and to which a light emission unit 3 is attached is rotated. As a result, the light emission unit 3 applies laser light 20 to a junction 32 between the resin pipe 30 and the resin member 31 while revolving around the junction 32. This makes it easy to fuse and join the entire outer circumferential surface of the resin pipe 30 with the entire inner circumferential surface of the resin member 31, which are variously shaped and sized.

Abstract: A resin pipe 30 and a resin member 31 are fixed to a setting portion 5 provided on the front side of a base 6, and a timing pulley 13 which is provided on the back side of the base 6 and to which a light emission unit 3 is attached is rotated. As a result, the light emission unit 3 applies laser light 20 to a junction 32 between the resin pipe 30 and the resin member 31 while revolving around the junction 32. This makes it easy to fuse and join the entire outer circumferential surface of the resin pipe 30 with the entire inner circumferential surface of the resin member 31, which are variously shaped and sized.

Abstract: An outer member and an inner member constituting a wheel bearing device are assembled and the brake rotor is fixed to the hub ring of the inner member. In this state, the pad slide surfaces of the brake rotor are lathed with the reference provided by a wheel pilot end surface. Alternatively, the wheel pilot end surface of the hub ring by chucking the knuckle pilot of the outer member with the wheel bearing device put in its assembled state, and the pad slide surfaces of the brake rotor are lathed with the reference provided by the wheel pilot end surface.

Abstract: A powder comprising rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 ?m, a bulk density of 0.8-1.5 g/cm3, and a carbon content of 0.1-0.5 wt % is amenable to atmospheric plasma spraying. An article obtained by spraying the rare earth fluoride spray powder to a substrate undergoes few partial color changes and performs well even when used in a halogen gas plasma.

Abstract: A powder comprising rare earth element fluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 ?m, a bulk density of 0.8-1.5 g/cm3, and a carbon content of 0.1-0.5 wt % is amenable to atmospheric plasma spraying. An article obtained by spraying the rare earth fluoride spray powder to a substrate undergoes few partial color changes and performs well even when used in a halogen gas plasma.

Abstract: An outer member and an inner member constituting a wheel bearing device are assembled and the brake rotor is fixed to the hub ring of the inner member. In this state, the pad slide surfaces of the brake rotor are lathed with the reference provided by a wheel pilot end surface. Alternatively, the wheel pilot end surface of the hub ring by chucking the knuckle pilot of the outer member with the wheel bearing device put in its assembled state, and the pad slide surfaces of the brake rotor are lathed with the reference provided by the wheel pilot end surface.

Abstract: An outer member and an inner member constituting a wheel bearing device are assembled and the brake rotor is fixed to the hub ring of the inner member. In this state, the pad slide surfaces of the brake rotor are lathed with the reference provided by a wheel pilot end surface. Alternatively, the wheel pilot end surface of the hub ring by chucking the knuckle pilot of the outer member with the wheel bearing device put in its assembled state, and the pad slide surfaces of the brake rotor are lathed with the reference provided by the wheel pilot end surface.

Abstract: A wafer has a rare earth oxide layer disposed, typically sprayed, on a substrate. It is useful as a dummy wafer in a plasma etching or deposition system.

Abstract: A brake disk braking surface processing device 1 includes a rotation driving device 11 that rotates a brake disk 2, a processing section 12 that processes braking surfaces 4 and 5 of the brake disk 2, and pressing rollers 13 and 14 that press the braking surfaces 4 and 5 of the brake disk 2. The brake disk braking surface processing device 1 includes the pressing rollers 13 and 14 that press the braking surfaces 4 and 5 of the brake disk 2. Therefore, even when tools are pressed against the braking surfaces 4 and 5 in a direction perpendicular to the braking surfaces 4 and 5, deformation of the braking surfaces 4 and 5 of the brake disk 2 can be suppressed with certainty. As a result, processing accuracy of the braking surfaces 4 and 5 of the brake disk 2 can be enhanced.

Abstract: A wafer has a rare earth oxide layer disposed, typically sprayed, on a substrate. It is useful as a dummy wafer in a plasma etching or deposition system.

Abstract: A wafer has a rare earth oxide layer disposed, typically sprayed, on a substrate. It is useful as a dummy wafer in a plasma etching or deposition system.

Abstract: A corrosion resistant member to be exposed to a halogen-containing gas atmosphere or a halogen-containing gas plasma atmosphere, comprising a substrate and a plurality of layers deposited thereon including a layer of rare earth fluoride providing the outermost surface and a layer of rare earth oxide having a porosity of less than 5% underlying the rare earth fluoride layer.

Abstract: An outer member and an inner member constituting a wheel bearing device are assembled and the brake rotor is fixed to the hub ring of the inner member. In this state, the pad slide surfaces of the brake rotor are lathed with the reference provided by a wheel pilot end surface. Alternatively, the wheel pilot end surface of the hub ring by chucking the knuckle pilot of the outer member with the wheel bearing device put in its assembled state, and the pad slide surfaces of the brake rotor are lathed with the reference provided by the wheel pilot end surface.

Abstract: An outer member and an inner member constituting a wheel bearing device are assembled and the brake rotor is fixed to the hub ring of the inner member. In this state, the pad slide surfaces of the brake rotor are lathed with the reference provided by a wheel pilot end surface. Alternatively, the wheel pilot end surface of the hub ring by chucking the knuckle pilot of the outer member with the wheel bearing device put in its assembled state, and the pad slide surfaces of the brake rotor are lathed with the reference provided by the wheel pilot end surface.

Abstract: A wafer has a rare earth fluoride coating disposed, typically sprayed on a substrate as an outermost layer, the rare earth fluoride being selected from lanthanoid fluorides, yttrium fluoride, and scandium fluoride. It is useful as a dummy wafer in a plasma etching or deposition system.

Abstract: A graphite-silicon carbide composite comprises a graphite substrate and a silicon carbide layer formed thereon and comprising silicon carbide particles in fused and contact bonded state. The composite has excellent oxidation resistance and finds a wide range of application as heat resistant material. The method of forming a silicon carbide layer on graphite surface is simple and consistent.

Abstract: By using a rare earth metal having a minimal content of impurity metal element, machining it into a member and cleaning with an organic acid-base capping agent, there is obtained a rare earth metal member composed entirely of a rare earth metal and containing not more than 100 ppm of impurity metal element in a sub-surface zone, which member is characterized by a high surface purity, a large grain size, minimized grain boundaries, and improved halogen resistance or corrosion resistance.

Abstract: An electrically conductive, plasma-resistant member adapted for exposure to a halogen-based gas plasma atmosphere includes a substrate having formed on at least part of a region thereof to be exposed to the plasma a thermal spray coating composed of yttrium metal or yttrium metal in admixture with yttrium oxide and/or yttrium fluoride so as to confer electrical conductivity. Because the member is conductive and has an improved erosion resistance to halogen-based corrosive gases or plasmas thereof, particle contamination due to plasma etching when used in semiconductor manufacturing equipment or flat panel display manufacturing equipment can be suppressed.

Abstract: The present invention provides enhancement of processing accuracy of a braking surface of a brake disk. A brake disk braking surface processing device 1 includes a rotation driving device 11 that rotates a brake disk 2, a processing section 12 that processes braking surfaces 4 and 5 of the brake disk 2, and pressing rollers 13 and 14 that press the braking surfaces 4 and 5 of the brake disk 2. The brake disk braking surface processing device 1 includes the pressing rollers 13 and 14 that press the braking surfaces 4 and 5 of the brake disk 2. Therefore, even when tools are pressed against the braking surfaces 4 and 5 in a direction perpendicular to the braking surfaces 4 and 5, deformation of the braking surfaces 4 and 5 of the brake disk 2 can be suppressed with certainty. As a result, processing accuracy of the braking surfaces 4 and 5 of the brake disk 2 can be enhanced.

Abstract: A ceramic sprayed member comprises a substrate and a ceramic sprayed coating thereon. Splats have been removed from the surface of the sprayed coating, typically by blasting. The ceramic sprayed member with improved plasma resistance mitigates particle contamination of wafers and enables stable manufacture when used in a halogen plasma process for semiconductor fabrication or the like.