Abstract: The rotary vacuum pump includes a pump housing, a rotary shaft, a thrust movement restriction mechanism and a first elastic member. The pump housing has therein a pump chamber. The rotary shaft has thereon a rotor rotatably disposed in the pump chamber. When the rotor is rotated with the rotary shaft, gas in the pump chamber is pumped thereby to draw gas into the pump chamber. The thrust movement restriction mechanism is provided for allowing the rotor to displace in the pump chamber in one thrust direction due to thermal expansion thereof during the operation of the rotary vacuum pump. The first elastic member is provided for urging the rotary shaft in the other thrust direction opposite to the one thrust direction.

Abstract: A diaphragm pump for pumping a fluid includes a diaphragm and a driver. The diaphragm has a first surface and a second surface. The driver includes a support portion and is connected to the diaphragm via the support portion. The driver is reciprocated to deform the diaphragm thereby performing a pumping action. The support portion includes a first supporting surface for supporting the first surface and a second supporting surface for supporting the second surface. The support portion allows the diaphragm to slidingly move along an interval between the first and second supporting surfaces when the diaphragm is deformed.

Abstract: A diaphragm unit includes a plurality of diaphragms which are layered on top of each other. A case and the diaphragm unit define a pump chamber. The diaphragm unit has a first surface and a second surface on the side opposite to the first surface. A support member for supporting the diaphragm unit has a first support surface for supporting the first surface and a second support surface for supporting the second surface. The support member allows the diaphragms to slide between the first support surface and the second support in case here the diaphragm unit changes its form. Thus, the durability of the diaphragm is improved.

Abstract: A diaphragm pump for pumping a fluid includes a housing, a pump chamber defined in the housing, a first diaphragm for sealing the pump chamber, a pressure control chamber defined in the housing adjacent to the pump chamber via the first diaphragm, a second diaphragm for sealing the pressure control chamber, a drive mechanism operable to deform the first and second diaphragms, an introduction passage for introducing into the pressure control chamber a part of the fluid that is discharged from the pump chamber, and a pressure regulating valve disposed in the introduction passage for adjusting a pressure in the pressure control chamber to a medium pressure between a suction pressure and a discharge pressure.

Abstract: A diaphragm unit includes a plurality of diaphragms which are layered on top of each other. A case and the diaphragm unit define a pump chamber. The diaphragm unit has a first surface and a second surface on the side opposite to the first surface. A support member for supporting the diaphragm unit has a first support surface for supporting the first surface and a second support surface for supporting the second surface. The support member allows the diaphragms to slide between the first support surface and the second support in case here the diaphragm unit changes its form. Thus, the durability of the diaphragm is improved.

Abstract: A diaphragm pump for pumping a fluid includes a housing, a pump chamber defined in the housing, a first diaphragm for sealing the pump chamber, a pressure control chamber defined in the housing adjacent to the pump chamber via the first diaphragm, a second diaphragm for sealing the pressure control chamber, a drive mechanism operable to deform the first and second diaphragms, an introduction passage for introducing into the pressure control chamber a part of the fluid that is discharged from the pump chamber, and a pressure regulating valve disposed in the introduction passage for adjusting a pressure in the pressure control chamber to a medium pressure between a suction pressure and a discharge pressure.

Abstract: A pump includes a unit case, a volume-changing body, a support portion, a driver and a seal member. The volume-changing body is accommodated in the unit case for defining a pump chamber. The support portion is provided in the unit case. The driver is connected to the volume-changing body and slidably supported by the support portion. The driver is reciprocated to deform the volume-changing body thereby changing a volume of the pump chamber to perform a pumping action. The seal member is provided between the unit case and the driver for preventing lubricant from leaking from a sliding region between the driver and the support portion to the volume-changing body.

Abstract: A diaphragm pump for pumping a fluid includes a diaphragm and a driver. The diaphragm has a first surface and a second surface. The driver includes a support portion and is connected to the diaphragm via the support portion. The driver is reciprocated to deform the diaphragm thereby performing a pumping action. The support portion includes a first supporting surface for supporting the first surface and a second supporting surface for supporting the second surface. The support portion allows the diaphragm to slidingly move along an interval between the first and second supporting surfaces when the diaphragm is deformed.