Abstract: A chip peeling apparatus has a plurality of protrusions which include first protrusions and second protrusions lower than the first protrusions. A vacuum pump communicates through holes with grooves defined between adjacent ones of the protrusions. A UV sheet is attached to chips, and the chips are supported in the vicinity of their corners by the tops of the first protrusions. When the vacuum pump is actuated, the chips and streets disposed between the chips are lowered, and the chips are curved and supported in abutment against the tops of the second protrusions. Each of the chips is gradually peeled off the UV sheet under a force tending to recover the original shape of the curved sheet. The chip peeling apparatus is effective in preventing the chips from being damaged and positionally deviated when the chips are attracted and carried.

Abstract: A piezoelectric/electrostrictive device including a substrate and a connection plate having a first end joined to the substrate and an opposed second end extending along a first direction, and first and second opposed sides along a second direction perpendicular to the first direction. A fixing plate is joined to the second end of the connection plate. A first side of a first diaphragm is joined to the first side of the connection plate and an opposed second side of the first diaphragm is joined to the substrate. A first side of a second diaphragm is joined to the substrate and an opposed second side of the second diaphragm is joined to the second side of the connection plate. A piezoelectric/electrostrictive element is provided on at least a portion of at least one planar surface of at least one of the diaphragms.

Abstract: A mass sensor including: a connecting plate having one or more slit(s) and/or opening portion(s) formed therein and/or having a thin-walled portion and a thick-walled portion formed therein; a diaphragm joined with the connecting plate at respective side surfaces; a piezoelectric element; a sensing plate with the piezoelectric element being provided at least at one part on at least one surface of the sensing plate, which has its side surface joined with a side surface of the connecting plate in the direction perpendicular to the joining direction of the diaphragm and the connecting plate; and a sensor substrate with which at least a part of side surfaces of the connecting plate as well as the sensing plate are joined, and the diaphragm, the connecting plate, the sensing plate, and the piezoelectric element form a resonating portion.

Abstract: There is provided a double-headed mass sensor (25) in which between a first connecting plate (22A) joined to a first diaphragm (21A) at respective sides and a second connecting plate (22B) joined to a second diaphragm (21B) at respective sides, a first sensing plate (41A), on which a main element (44) is provided on at least one plane surface, is bridged, and a resonating portion comprising the diaphragms (21A), (21B), the connecting plates (22A), (22B), the first sensing plate (41A) and the main element (44) is joined to a sensor substrate (27). Change in the mass of each of the diaphragms (21A), (21B) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragms (21A), (21B). The mass sensor of the present invention enables the easy and highly accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, chemical substances, and the thickness of vapor-deposited films.

Abstract: When a large number of detection spots are to be formed on analyte detection chips such as DNA chips or DNA microarrays, spot-forming liquid containing a component for formation of detection spots is spotted simultaneously to the surfaces of a plurality of slide glasses or to a plurality of regions on a single slide glass to thereby improve the fabrication efficiency of detection chips and provide the detection chips inexpensively.

Abstract: A micropipette usable for producing a biochip inclusive of DNA micro arrays capable of arraying and fixing droplets of a micro-volume on a substrate in a high density: A micropipette comprising a main body, at least one cavity for storing a sample, at least one ejection port, a piezoelectric/electrostrictive element mounted on the outer surface of the main body, at least one sample inlet port for supplying sample from the outside, wherein a temporarily stored sample is discharged from the at least one ejection port by virtue of the movement of the element to the outside via a through hole in a nozzle portion being disposed in the pipette main body, wherein the through hole in the nozzle portion has three or more projections radially protruded from the center of the through hole and having a specific shape.

Abstract: A liquid-drop discharge device is provided including a float cell provided with a valve and communicating to a liquid storage tank, a liquid discharge mechanism for discharging liquid within the float cell, and a reaction cell provided with a space into which fluid is discharged from the liquid discharge mechanism for collecting the discharged fluid. Air is supplied to the reaction cell for collecting liquid or minute particles, and an internal pressure P1 of the liquid storage tank or the float cell and an internal pressure P3 of the reaction cell are set such that a relationship of P1=P3, in which the pressures are identical to atmospheric pressure, or P1>P3, to supply stronger air, is satisfied.

Abstract: Disclosed is a method comprising a pretreatment step of forming a poly-L-lysine layer on a surface of a base plate, a sample preparation step of preparing a sample containing a DNA fragment, a dilution step of diluting the concentration of the obtained sample, and a supply step of supplying a diluted sample solution onto the base plate to produce a DNA chip. The sample preparation step includes an amplification step of PCR-amplifying the DNA fragment to prepare a PCR product, a powder formation step of drying the obtained PCR product to form DNA powder, and a mixing step of dissolving the obtained DNA powder in a buffer solution.

Abstract: A mass sensor (30) in which a connection plate (33) and a diaphragm (31) are joined together at their respective sides; a sensing plate (32) is joined to the connection plate (33) at their respective sides in the direction perpendicular to the direction where the diaphragm (31) is joined to the connection plate (33); a piezoelectric element (35) consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate (32); and a resonating portion consisting of the diaphragm (31), the sensing plate (32), the connection plate (33), and the piezoelectric element (35) is joined to a sensor substrate (34). Change in the mass of the diaphragm (31) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm (31).

Abstract: There is provided a double-headed mass sensor (25) in which between a first connecting plate (22A) joined to a first diaphragm (21A) at respective sides and a second connecting plate (22B) joined to a second diaphragm (21B) at respective sides, a first sensing plate (41A), on which a main element (44) is provided on at least one plane surface, is bridged, and a resonating portion comprising the diaphragms (21A), (21B), the connecting plates (22A), (22B), the first sensing plate (41A) and the main element (44) is joined to a sensor substrate (27). Change in the mass of each of the diaphragms (21A), (21B) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragms (21A), (21B). The mass sensor of the present invention enables the easy and highly accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, chemical substances, and the thickness of vapor-deposited films.

Abstract: A mass sensor (30) in which a connection plate (33) and a diaphragm (31) are joined together at their respective sides; a sensing plate (32) is joined to the connection plate (33) at their respective sides in the direction perpendicular to the direction where the diaphragm (31) is joined to the connection plate (33); a piezoelectric element (35) consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate (32); and a resonating portion consisting of the diaphragm (31), the sensing plate (32), the connection plate (33), and the piezoelectric element (35) is joined to a sensor substrate (34). Change in the mass of the diaphragm (31) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm (31).

Abstract: The liquid droplet ejection apparatus includes a liquid supply path, a plurality of mutually independent pressurizing chambers, a plurality of liquid introduction bores for establishing communication between the corresponding pressurizing chambers and the liquid supply path, and a plurality of ejection nozzles for establishing communication between the corresponding pressurizing chambers and the exterior of the liquid droplet ejection apparatus. An ejection bore formed at the end portion of the ejection nozzle assumes a hollow cylindrical form and is formed such that the inside diameter thereof increases toward an ejection opening. When a potential difference is applied between two electrodes of the piezoelectric/electrostrictive element, a ceramic sheet forming the upper wall of the pressurizing chamber deforms to thereby cause a change of the volume of the pressurizing chamber.

Abstract: A piezoelectric sensor device has a piezoelectric body vibrator consisting of the piezoelectric body which is sandwiched by a pair of electrodes, a power source which applies a voltage to the piezoelectric body vibrator so as to get excited for vibration, means for monitoring electric constants to detect changes in electric constants accompanied by vibration of the piezoelectric body. The change in electric constants in the piezoelectric body is detected as a change in frequency for vibration of the piezoelectric body corresponding to an electric constant under the determined conditions. The piezoelectric sensor device has a means to obtain the frequency value from frequencies at not less than two points giving a determined electric constant. According to the piezoelectric sensor device the dispersion in measured values due to change in vibration aptness of vibration system and the polarization state of piezoelectric body vibrator can be made smaller.

Abstract: An apparatus for feeding semiconductor chips has a structural body having grooves which serve respectively as parallel feed paths for semiconductor chips, the feed paths corresponding to respective quality levels of the semiconductor chips, the structural body being made of partially stabilized zirconia. A stopper mechanism for temporarily stopping semiconductor chips fed along the feed paths comprises piezoelectric bodies disposed in the feed paths in front of terminal walls of the feed paths. A counter mechanism for counting semiconductor chips fed along the feed paths have electrodes disposed in the feed paths near the terminal walls. The apparatus serves as a feed system for floating articles with ejected air and feeding the floated articles, and lends itself to being automatized.

Abstract: A piezoelectric sensor device has a piezoelectric body vibrator consisting of the piezoelectric body which is sandwiched by a pair of electrodes, a power source which applies a voltage to the piezoelectric body vibrator so as to get excited for vibration, means for monitoring electric constants to detect changes in electric constants accompanied by vibration of the piezoelectric body. The change in electric constants in the piezoelectric body is detected as a change in frequency for vibration of the piezoelectric body corresponding to an electric constant under the determined conditions. The piezoelectric sensor device has a means to obtain the frequency value from frequencies at not less than two points giving a determined electric constant. According to the piezoelectric sensor device the dispersion in measured values due to change in vibration aptness of vibration system and the polarization state of piezoelectric body vibrator can be made smaller.

Abstract: A mass sensor includes a diaphragm, a sensing plate having a piezoelectric element arranged on at least a part of at least one surface joining respective sides, a connecting plate sandwiched by the diaphragm and the sensing plate, wherein the diaphragm, the sensing plate, the piezoelectric element, and the connecting plate form a resonating portion. The connecting plate is bridged across the side surfaces of a concave portion formed in a sensor substrate, and the sensing plate is joined to at least the bottom portion of the concave portion. Change in the mass of the diaphragm is measured by measuring change in the resonant frequencies of the resonating portion accompanying the change in the mass of the diaphragm. The mass sensor enables the easy and accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, or chemical substances, or the thickness of vapor-deposited films.

Abstract: A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method.

Abstract: A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method.

Abstract: An apparatus for feeding semiconductor chips has a structural body having grooves which serve respectively as parallel feed paths for semiconductor chips, the feed paths corresponding to respective quality levels of the semiconductor chips, the structural body being made of partially stabilized zirconia. A stopper mechanism for temporarily stopping semiconductor chips fed along the feed paths comprises piezoelectric bodies disposed in the feed paths in front of terminal walls of the feed paths. A counter mechanism for counting semiconductor chips fed along the feed paths have electrodes disposed in the feed paths near the terminal walls. The apparatus serves as a feed system for floating articles with ejected air and feeding the floated articles, and lends itself to being automatized.

Abstract: A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method.