Patents by Inventor Takashi Aitani

Takashi Aitani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electric heater for a semiconductor processing apparatus
    Patent number: 7027722
    Abstract: An electric heater has multiple zones, wherein the multiple zones include at least one zone which is subject to high loading (e.g. bottom zone) and, at least one zone is a non-metal heating element, and the rest of the zones (e.g. middle zone and top zone) are metal resistance heating elements of light gauge overbent.
    Type: Grant
    Filed: November 25, 2002
    Date of Patent: April 11, 2006
    Assignee: Koyo Thermo Systems Co., Ltd.
    Inventors: Susumu Uemori, Takashi Aitani
  • Electric heater for thermal treatment furnace
    Patent number: 7003014
    Abstract: A heating element (12) made of metal wire is installed at an internal circumferential surface of a cylindrical main thermal insulation body (11) of an electric heater according to the present invention. The heating element (12) comprises a plurality of resistance heat emitting portions (61)–(64) (71)–(74) (81)–(84) as segments along its length direction. The resistance heat emitting portions (61)–(64) (71)–(74) (81)–(84) are connected in parallel.
    Type: Grant
    Filed: March 19, 2002
    Date of Patent: February 21, 2006
    Assignee: Koyo Thermo Systems Co., LTD
    Inventors: Susumu Uemori, Takashi Aitani
  • Electric heater for a semiconductor processing apparatus
    Publication number: 20050082281
    Abstract: An electric heater for a semiconductor processing equipment according to the present invention consists of multiple zones wherein, the multiple zones include at least one zone which is subject to high loading (e.g. bottom zone), the said at least one zone comprises a non-metal heating element, and the rest of the zones (e.g. middle zone and top zone) comprise metal resistance heating elements of light gauge overbent.
    Type: Application
    Filed: November 25, 2002
    Publication date: April 21, 2005
    Inventors: Susumu Uemori, Takashi Aitani
  • Electric heater for thermal treatment furnace
    Publication number: 20050069014
    Abstract: A heating element (12) made of metal wire is installed at an internal circumferential surface of a cylindrical main thermal insulation body (11) of an electric heater according to the present invention. The heating element (12) comprises a plurality of resistance heat emitting portions (61)-(64)(71)-(74)(81)-(84) as segments along its length direction. The resistance heat emitting portions (61)-(64)(71)-(74)(81)-(84) are connected in parallel.
    Type: Application
    Filed: March 19, 2002
    Publication date: March 31, 2005
    Inventors: Susumu Uemori, Takashi Aitani