Abstract: To provide a miniaturized Fabry-Perot type tunable filter that can be applied to e.g. a light of wide wavelength range from infrared rays to ultraviolet rays and actuated at a low voltage. A movable portion moving in a direction parallel to the surface of the SOI substrate (hereafter called ‘plane direction’), a suspension supporting member supporting the movable portion elastically and movably, and a fixed portion secured to the SOI substrate are provided. By the comb-teeth electrode of the comb-teeth type electrostatic actuator that moves the movable portion, the first mirror structure body formed bonding to the surface of the movable portion is controlled and moved in the plane direction.

Abstract: The reversible heat-sensitive recording medium having a heat-sensitive recording layer capable of reversibly changing the transparency thereof with organic low molecular substances dispersed in an organic macromolecular resin provided on a support is characterized by using at least one long chain alkyl-containing compound having a melting point of 50.degree.-100.degree. C. and at least one saturated aliphatic bisamide having a melting point of not less than 110.degree. C. as the organic low molecular substance in a ratio of 98:2 to 80:20. A plasticizer may be contained in the organic macromolecular resin in a ratio of 1 to 10% by weight, based on the total solid of the heat-sensitive recording layer.

Abstract: Expert knowledge regarding investigation of the causes of various failures, and knowledge for extracting DI/DO information (IOD), which is exchanged by an NC unit (11) and a machine tool (13), as well as information (ITD) internally of the NC unit, is stored in a knowledge base (IB). When the contents of a failure are entered from an alarm detector (11g) upon occurrence of the failure, a reasoning mechanism (ADPR) uses the expert knowledge conforming to the failure to automatically extract the DI/DO information and information internally of the NC unit (IOD, ITB), ascertains actually occurring phenomena based on this information, recognizes the cause of the failure from these pheonomena, and displays the cause of the failure and a method of dealing with it.