Abstract: A substrate processing method includes providing a substrate formed with a stacked film including at least an etching target film, an underlying layer disposed below the etching target film, and a mask disposed above the etching target film; etching the etching target film through the mask using plasma; and performing heat treatment on the substrate at a predetermined temperature after the etching. At least one of the mask and the underlying layer contains a transition metal.

Abstract: An alkali-free glass substrate contains, as represented by mass % based on oxides: 54% to 68% of SiO2; 10% to 25% of Al2O3; 0.1% to 5.5% of B2O3; and 8% to 26% of MgO+CaO+SrO+BaO. The alkali-free glass substrate has ?-OH of 0.15 mm?1 to 0.35 mm?1, and a Cl content of 0.15 to 0.3 mass %. A bubble growth index I of the alkali-free glass substrate given by the following formula is 320 or more: I=590.5×[?-OH]+874.1×[Cl]?5.7×[B2O3]?33.3. In the formula, [?-OH] is ?-OH of the alkali-free glass substrate in mm?1, [Cl] is the Cl content of the alkali-free glass substrate in mass %, and [B2O3] is a B2O3 content of the alkali-free glass substrate in mass %.

Abstract: An alkali-free glass substrate contains, as represented by mass % based on oxides: 54% to 66% of SiO2; 10% to 23% of Al2O3; 6% to 12% of B2O3; and 8% to 26% of MgO+CaO+SrO+BaO. The alkali-free glass substrate has ?-OH of 0.15 mm?1 to 0.5 mm?1, and a Cl content of 0.1 to 0.35 mass %. A bubble growth index I of the alkali-free glass substrate given by the following formula is 280 or more: I=590.5×[?-OH]+874.1×[Cl]?5.7×[B2O3]?33.3. In the formula, [?-OH] is ?-OH of the alkali-free glass substrate in mm?1, [Cl] is the Cl content of the alkali-free glass substrate in mass %, and [B2O3] is a B2O3 content of the alkali-free glass substrate in mass %.

Abstract: A heater for melting glass includes: a heating member containing carbon (C) configured to emit heat rays upon power feeding; and a tubular member made of metal configured to have one end closed, and to house the heating member. The heating member includes a first heat generating part and a second heat generating part along an extending axis direction of the heater, and the first heat generating part is arranged at a position closer to the one end of the tubular member than is the second heat generating part. Denoting a unit-length resistance of the first heat generating part along the extending axis direction by X (?/m), and denoting a unit-length resistance of the second heat generating part by Y (?/m), ( 1/30)X<Y<(½)X??Formula (1) is satisfied.

Abstract: A heater includes a heat generating member being conductive and configured to radiate heat rays by being fed with electric power, and a tubular member constituting of a metal and accommodating the heat generating member, wherein the heat generating member is composed of a material containing carbon at 80% or more by mass, the tubular member is composed of a material including one or more selected from platinum, rhodium, tungsten, iridium, and molybdenum, and an insulating material is not provided between the heat generating member and the tubular member.

Abstract: An apparatus for transferring molten glass includes a wall including a refractory material and a metal layer provided on an inside of the refractory material, the metal layer coming into contact with the molten glass, and the metal layer being configured to guide the molten glass, the apparatus including a heater including a metal cover protruding to an inside of the wall, the metal cover coming into contact with the molten glass, the heater including a heat generating element electrically insulated from the metal cover, and the heat generating element receiving electric power to radiate heat rays to heat the metal cover from an inside.

Abstract: A molded pulp product including: a pulp, a water- and oil-resistant agent, and a water soluble polymer that does not dissolve in an aqueous medium at 40° C. or lower, wherein a content of the water soluble polymer is 1 to 50% by mass, based on the pulp.

Abstract: A control device for a vehicle includes a drive shaft, an engine coupled to the drive shaft, an electric motor coupled to the drive shaft, and a control unit. The control unit increases a torque of the electric motor when an accelerator pedal opening increases to equal to or more than a predetermined degree of opening during switching of driving sources, and decreases the torque of the electric motor while increasing the torque of the engine after a change of the torque of the engine turns to increase.

Abstract: A control device for a vehicle having: an engine; a torque converter having a lock-up clutch; an engagement element disposed downstream of the torque converter; a drive shaft disposed downstream of the engagement element; and an electric motor disposed downstream of the engagement element, and connected to the drive shaft includes a control portion adapted to: in a case where an electric travel mode in which the lock-up clutch and the engagement element are disengaged is switched to an engine travel mode in which the lock-up clutch is disengaged and the engagement element is engaged, decrease driving torque of the electric motor after engagement of the engagement element; and gradually decrease the driving torque of the electric motor while gradually increasing driving torque of the engine after the driving torque of the electric motor is decreased.

Abstract: A method of producing a melt includes contacting a first heating element directly with an inside of a solid-liquid mixture layer including a batch raw material of glass and a mixture of solid and liquid phases denatured from the batch raw material to apply thermal energy to the solid-liquid mixture layer by heat transfer from the first heating element, supplying the batch raw material from the above of the solid-liquid mixture layer, and continuously producing a liquid phase melt with a bulk density greater than that of the solid-liquid mixture layer in a lower layer in contact with the solid-liquid mixture layer.

Abstract: A control device for a vehicle includes a drive shaft, an engagement element, an engine coupled via the engagement element, an electric motor coupled without via the engagement element, and a control unit that instructs a reengagement of the engagement element when an accelerator pedal opening increases to equal to or more than a predetermined degree of opening during switching of driving sources in which an engagement capacity of the engagement element is decreased while a torque of the electric motor is increased, and increases the torque of the electric motor to more than the torque of the electric motor before the accelerator pedal opening increases to equal to or more than the predetermined degree of opening until the engagement capacity of the engagement element starts increasing.

Abstract: A sensor recess portion is provided on a sensor back surface. A membrane portion provided with a detection element forms a bottom surface of the sensor recess portion. A sensor support portion includes a back support portion, a support recess portion, a support hole, and a support recess inner wall surface. The back support portion covers an opening of the sensor recess portion. The support recess portion is provided on a side opposite from a physical quantity sensor. The support hole penetrates the back support portion and communicates with the opening. The support recess inner wall surface extends from the support recess bottom portion and is inclined with respect to a center line of the support hole.

Abstract: A fluorine-containing polymer having repeating units derived from (a) a fluorine-containing monomer, (b) a fluorine-free non-crosslinkable monomer, and (c) a fluorine-free crosslinkable monomer. The fluorine-containing monomer (a) is a compound represented by formula: CH2?C(-X)—C(?O)—Y—Z—Rf . . . (a-I), wherein X is a hydrogen atom, a monovalent organic group or a halogen atom, Y is —O— or —NH—, Z is a direct bond or a divalent organic group, and Rf is a fluoroalkyl group having 1 to 20 carbon atoms. The fluorine-free non-crosslinkable monomer (b) includes (b1) a cyclic hydrocarbon group-containing monomer and (b2) a low Tg monomer, a homopolymer of which has a glass transition temperature (Tg) of lower than 0° C. Also disclosed is a coating composition including the fluorine-containing polymer and a liquid medium, a method for producing a coated article which includes coating an article with the coating composition and a coated article.

Abstract: A softening agent composition including (1) a silicone polymer, (2) a water-repellent polymer, (3) an emulsifier, and (4) a liquid medium that is water or a mixture of water and an organic solvent. Also disclosed is a method for producing the softening agent composition which includes producing a water-repellent polymer by polymerizing, in the presence of the silicone polymer, a monomer that constitutes the water-repellent polymer. The water-repellent polymer may be at least one selected from the group consisting of fluorine-containing polymers and non-fluorine-containing polymers. Also disclosed is a method for treating a substrate with the softening agent composition and a substrate treated with the softening agent composition.

Abstract: Provided is a fluorinated polymer that can impart excellent washing durability and water- and oil-repellency to fibers, said fluorinated polymer having a repeating unit derived from a fluorinated monomer (a) that comprises a first fluorinated monomer (a1) represented by the formula: CH2?C(—X1)—C(?O)—Y1—Z1—Rf1 [wherein X1 represents a halogen atom; Y1 represents —O— or —NH—; Z1 represents a direct bond or a bivalent organic group; and Rf1 represents a fluoroalkyl group having 1 to 20 carbon atoms] and a second fluorinated monomer (a2) represented by the formula: CH2?C(—X2)—C(?O)—Y2—Z2—Rf2 [wherein X2 represents a monovalent organic group or a hydrogen atom; Y2 represents —O— or —NH—; Z2 represents a direct bond or a bivalent organic group; and Rf2 represents a fluoroalkyl group having 1 to 20 carbon atoms].

Abstract: A sensor body contains a sensor element in a body recess opened at a body opening. A sensor substrate has a mounting surface on which a circuit element for processing a detection signal is mounted and holds the sensor body on the mounting surface. A sensor cover has a cover window penetrating between an intake passage and the body opening and covers the sensor body. A sensor filter is interposed between the sensor body and the sensor cover. A potting resin body is cured on the mounting surface so as to seal the circuit element. The sensor cover is embedded in the potting resin body on the outer peripheral side of the sensor body.

Abstract: The present invention relates to an alkali-free glass substrate in which when the alkali-free glass substrate is melted, and while holding a temperature at 1400° C., reduced in pressure from an atmospheric pressure to 33.33 kPa at a constant pressure reduction rate for 20 minutes and held at 33.33 kPa for 5 minutes, a diameter of a grown bubble is at least 3 times a diameter of an initial bubble. A bubble having a diameter of 0.1 to 0.3 mm contained in a molten glass at 1400° C. before starting pressure reduction is defined as the initial bubble. A bubble after held at 33.33 kPa for 5 minutes corresponding to the initial bubble is defined as a grown bubble.

Abstract: A sensor body contains a sensor element in a body recess opened at a body opening. A sensor substrate has a mounting surface on which a circuit element for processing a detection signal is mounted and holds the sensor body on the mounting surface. A sensor cover has a cover window penetrating between an intake passage and the body opening and covers the sensor body. A sensor filter is interposed between the sensor body and the sensor cover. A potting resin body is cured on the mounting surface so as to seal the circuit element. The sensor cover is embedded in the potting resin body on the outer peripheral side of the sensor body.

Abstract: According to the present invention, provided is a heater including a heat generating member being conductive and configured to radiate heat rays by being fed with electric power, a tubular member constituted by a metal and accommodating the heat generating member, and an intermediate member arranged between the heat generating member and the tubular member and constituted by an electrically insulating material, wherein the intermediate member is arranged and/or configured to allow, among the heat rays radiated from the heat generating member, at least light having a wavelength of from 1 ?m to 2 ?m to pass through the intermediate member to reach the tubular member.

Abstract: A time required to return an inside of the chamber after performing maintenance of the inside of the chamber into a state prior to the maintenance can be shortened. A seasoning method includes a first dry cleaning process of cleaning the inside of the chamber by supplying an O2 gas into the chamber and generating plasma of the O2 gas within the chamber; and a second dry cleaning process of seasoning, after the first dry cleaning process, the inside of the chamber by supplying a processing gas containing fluorine into the chamber and generating plasma of the processing gas within the chamber.