Abstract: In a circular accelerator, a magnetic pole edge portion of a bending electromagnet into and from which a charged particle beam enters and exits is provided with endpacks. A first protrusion is provided at that part of each end pack which is radially outside the equilibrium orbit of a center energy beam, while a second protrusion is provided at that part of each end pack which is radially inside the equilibrium orbit of the center energy beam. The shapes of the first and second protrusions are set so that the betatron oscillation numbers of beams of different acceleration energies may be held constant or become linear to the energies. In case of emitting the charged particle beam out of the circular accelerator, the change of a tune attributed to the change of the beam orbit can be statically corrected, the tune is linearly changed, and an adjustment of the emission of the beam becomes easy.

Abstract: In a circular accelerator, a magnetic pole edge portion of a bending electromagnet into and from which a charged particle beam enters and exits is provided with endpacks. A first protrusion is provided at that part of each end pack which is radially outside the equilibrium orbit of a center energy beam, while a second protrusion is provided at that part of each end pack which is radially inside the equilibrium orbit of the center energy beam. The shapes of the first and second protrusions are set so that the betatron oscillation numbers of beams of different acceleration energies may be held constant or become linear to the energies. In case of emitting the charged particle beam out of the circular accelerator, the change of a tune attributed to the change of the beam orbit can be statically corrected, the tune is linearly changed, and an adjustment of the emission of the beam becomes easy.

Abstract: The X-ray mask manufactured according to the present invention can solve a problem that the thin film stress of the X-ray absorber cannot be made to be zero although the mean thin film stress throughout the X-ray absorber can be made to be zero. The thin film stress distribution over the X-ray absorber 4 after the X-ray absorber 4 has been formed on a silicon substrate 1 is measured, and then inputs of electric power to heaters 9a, 9b and 9c of a hot plate 8 are changed so as to heat the X-ray absorber 4 to temperatures according to a specified temperature distribution with which the thin film stress throughout the X-ray absorber can be made to be zero.

Abstract: The X-ray mask manufactured according to the present invention can solve a problem that the thin film stress of the X-ray absorber cannot be made to be zero although the mean thin film stress throughout the X-ray absorber can be made to be zero. The thin film stress distribution over the X-ray absorber 4 after the X-ray absorber 4 has been formed on a silicon substrate 1 is measured, and then inputs of electric power to heaters 9a, 9b and 9c of a hot plate 8 are changed so as to heat the X-ray absorber 4 to temperatures according to a specified temperature distribution with which the thin film stress throughout the X-ray absorber can be made to be zero.

Abstract: An apparatus for detecting the position of a charged particle in a duct pipe has a plurality of electrodes arranged in the duct pipe. Detection signals obtained in the electrodes are phase-delayed by predetermined amounts and then added to form an integral detection signal. The integral detection signal is input to a circuit which determines waveforms representative of the passage of the charged particle: namely, the D.C. component of the detection signal, fundamental wave component and a phase-shifted fundamental wave component. The position of the charged particle are determined from these components. A part of each electrode is formed of a dielectric member. Each electrode and an associated connector are covered by a double-shield structure with inner and outer shields, the electrode, the connector and the inner shield being electrically insulated from the duct pipe.