Abstract: Provided is a method for cooling an object to be processed. The cooling method is provided with a step of placing the object in a heated state on a stage, and a step of cooling the object by blowing a cooling gas to a region the near-center region of the object placed on the stage, including the center thereof.

Abstract: A method of manufacturing a load beam directly improves the finishing accuracy of the surface of the load beam having a tab and/or a dimple, and the method includes a modifying process of preparing a flat plate work serving as the load beam and irradiating a part of a surface of the work where the tab and/or the dimple is formed with a laser beam, to form a modified layer in the irradiated part and a forming process of carrying out plastic working on the part where the modifies layer is present, to form the tab and/or the dimple in the part where the modified layer is present.

Abstract: A method of pattern forming includes forming a resist film on a substrate, transferring a pattern onto the resist film by an immersion lithography method using a liquid immersion fluid to form a latent image on the resist film, conducting a first inspection to inspect whether or not the liquid immersion fluid remains on the resist film after said forming the latent image, developing the resist film after the first inspection, and performing predetermined processing when residual of the liquid immersion fluid is found in the first inspection.

Abstract: A load beam is capable of securing a required level of positioning accuracy for a slider, a load beam has a body and a dimple, the body is made of a plate having a first surface and a second surface, the dimple has a convex curved surface protruding from the first surface of the body and supports a slider so that the slider is movable in predetermined directions to write and read information to and from a disk in a disk drive, and the load beam includes a mark formed on the second surface of the body, configured to provide positional information about a vertex of the dimple.

Abstract: A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system arranged to project a patterned beam of radiation onto the substrate, a liquid supply system configured to supply liquid to a space between the projection system and the substrate, and a residual liquid detector configured to detect liquid remaining on the substrate and/or the substrate table after an exposure is completed. A device manufacturing method includes projecting, using a projection system of a lithographic apparatus, a patterned beam of radiation through a liquid onto a substrate, the substrate being held by a substrate table, and, after the projecting is complete, detecting residual liquid on the substrate and/or the substrate table.

Abstract: A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system arranged to project a patterned beam of radiation onto the substrate, a liquid supply system configured to supply liquid to a space between the projection system and the substrate, and a residual liquid detector configured to detect liquid remaining on the substrate and/or the substrate table after an exposure is completed.

Abstract: A lithographic apparatus includes a substrate table which holds a substrate, a projection optical system which projects a patterned beam of radiation onto the substrate, a liquid supply member which supplies a liquid to a space between the projection optical system and the substrate, and a liquid detector which detects a liquid remaining on a surface of an exposed substrate before the exposed substrate is unloaded from the substrate table.

Abstract: In a sheet package, the degree of stiffness of a side end portion on a side wall portion side making contact with a contact member in a storage portion of a printing unit is greater than the degree of stiffness of a side end portion on the side wall portion side that is pressed by a pressing guide member. Accordingly, when the sheet package is stored in the storage portion, even if the lid body is closed in a condition in which the sheet package is not loaded properly, that is, even if the side end portion of the sheet package is sandwiched between the lid body and the contact member, or a top face on the side on which the contact member is provided, the sheet package is never crushed and the sheet package can be correctly pushed into the storage portion by a pressing force of the lid body.

Abstract: A tape cassette includes a first guide member provided between a feed portion and a discharge slot, and positioned on or immediately before the discharge slot, on an upstream side in a travel direction of a ink ribbon, wherein the first guide member bends and guides travel of the ink ribbon in the predetermined direction while making contact with a reverse side of a inked surface of the ink ribbon and a second guide member provided between the feed portion and the discharge slot, and positioned on an upstream side in the travel direction of the ink ribbon with respect to the first guide member, wherein the second guide member bends and guides the travel of the ink ribbon in the predetermined direction while making contact with the reverse side of the inked surface of the ink ribbon.

Abstract: A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system arranged to project a patterned beam of radiation onto the substrate, a liquid supply system configured to supply liquid to a space between the projection system and the substrate, and a residual liquid detector configured to detect liquid remaining on the substrate and/or the substrate table after an exposure is completed. A device manufacturing method includes projecting, using a projection system of a lithographic apparatus, a patterned beam of radiation through a liquid onto a substrate, the substrate being held by a substrate table, and, after the projecting is complete, detecting residual liquid on the substrate and/or the substrate table.

Abstract: A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system arranged to project a patterned beam of radiation onto the substrate, a liquid supply system configured to supply liquid to a space between the projection system and the substrate, and a residual liquid detector configured to detect liquid remaining on the substrate and/or the substrate table after an exposure is completed. A device manufacturing method includes projecting, using a projection system of a lithographic apparatus, a patterned beam of radiation through a liquid onto a substrate, the substrate being held by a substrate table, and, after the projecting is complete, detecting residual liquid on the substrate and/or the substrate table.

Abstract: An exposure apparatus for exposing a substrate by emitting exposure light thereto through a projection optical system and liquid, has a detection apparatus that detects whether the liquid is present on an object disposed lower than a front end of the projection optical system. Another detection apparatus has an emitting portion that emits detection light to an immersion area between the projection optical system and an object disposed on an image plane side thereof, and a light-receiving portion disposed at a predetermined position for the detection light; therein, at least one of size and shape of the immersion area is obtained based on light receiving results. The detection apparatus is used to detect the presence of liquid on such lower-disposed object, the state of the immersion area, or shape or contact angle of the liquid. Optimal measures are taken, based on detection results, for maintaining high exposure and measurement accuracies.

Abstract: A support structure for supporting a processing target object includes a support main body that supports a weight of the processing target object and recess-shaped supporting body accommodating portions formed on a top surface of the support main body. The support structure further includes supporting bodies accommodated in the respective supporting body accommodating portions to be protruded above the top surface of the support main body. The supporting bodies are rollable in the respective supporting body accommodating portions while supporting the processing target object of which bottom surface is in contact with upper peak portions of the supporting bodies.

Abstract: A system renting out file servers to many companies in a data center has a security problem so that the user cannot perform operation needing manager authorization in the file servers. An OS provides execution administrative area information of an application program designated by process information which can specify the range of an accessible device to operate the server system of the customer in the administrative area information.

Abstract: A method for exposing a substrate includes holding the substrate on a substrate holding member, irradiating, via a liquid, a light beam to the substrate on the substrate holding member, and removing, after the exposure of the substrate via the liquid, a liquid remained on the substrate before supporting the substrate by a transferring member. The transferring member transfers the exposed substrate from the substrate holding member to outside of the substrate holding member.

Abstract: A package member (8) of a sheet package has a cut-in portion (54) which is formed by cutting it to a predetermined length from a cutout portion (53), between a side wall portion (41) and a first wrapping portion (50). Accordingly, distortion (movement) of the first wrapping portion (50) can be facilitated and pressing of sheets stored in the sheet package against a pickup roller can be achieved with an adequate degree of force.

Abstract: A substrate transport apparatus, which transports a substrate that has been exposed with an image of a pattern through a projection optical system and a liquid, comprises a substrate support member that supports the substrate, and a liquid removal mechanism that removes the liquid that has adhered to at least one of the substrate support member and at least a portion of the area of the rear surface of the substrate.

Abstract: A tape cassette includes a tape ejecting port for ejecting outside the tape with a separator being adhered to one of surfaces thereof, a tape conveying roller arranged at an upstream side of a tape conveying direction at the tape ejecting port, the tape conveying roller conveying roller pulling out and conveying the tape while getting in contact with the separator being adhered to one surface of the tape, a separator guiding portion for guiding the separator peeled off from the tape inwardly at the tape ejecting port along a peripheral surface of the tape conveying roller and a separator-take-up spool arranged so as to fix thereto a front end of the separator that has been guided inwardly along the peripheral surface of the tape conveying roller from the separator guiding portion and to take up the separator.

Abstract: A tape cassette that includes a housing, at least one tape, and a color indicator portion disposed between the tape housing area and the periphery, and in a specified area adjacent to the tape housing area on a rear edge side of the bottom wall, the color indicator portion indicating color information relating to the at least one tape and including a plurality of lateral information sections that are a plurality of strip-shaped sections extending along the left-and-right direction of the housing and aligned in a front-rear direction of the housing, wherein, of the plurality of lateral information sections, whether a protrusion is formed in a first lateral information section indicates a base material color of the at least one tape, and whether a protrusion is formed in a second lateral information section indicates a print color of the at least one tape.

Abstract: A tape cassette that includes a housing having a top case and a bottom case, a tape, a printer head insertion portion, an arm portion including a first wall portion and a second wall portion extending perpendicularly upwards from a bottom wall of the bottom case, a first width direction regulating portion and a first print surface side regulating portion provided respectively provided on the second wall portion to restrict a movement of the tape in a tape width direction and toward a print surface side of the tape, a first lower joining portion provided on an upper end of the first width direction regulating portion, and a first upper joining portion provided on the top case to join with the first lower joining portion at a position that corresponds to a position of the first lower joining portion when the top case and the bottom case are joined.