Patents by Inventor Takashi Imafu

Takashi Imafu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and carrier adjusting system
    Patent number: 8060244
    Abstract: An object of the present invention is to perform replacement of parts of a substrate processing apparatus more rapidly than that by the prior art. The present invention is a substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, identification marks being attached to the respective component parts, the apparatus including: a storage unit for storing part information on each of the component parts necessary when placing an order for a component part, in correspondence with the identification mark; an input unit for inputting an identification mark of a component part to be ordered; and a display unit for displaying the part information in the storage unit corresponding to the inputted identification mark.
    Type: Grant
    Filed: August 17, 2007
    Date of Patent: November 15, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Takashi Aiuchi, Akihito Suzuki, Hirotsugu Kamamoto, Shuichi Yonemura, Takashi Imafu, Kazuhisa Sakamoto
  • Substrate processing apparatus and carrier adjusting system
    Publication number: 20070293970
    Abstract: An object of the present invention is to perform replacement of parts of a substrate processing apparatus more rapidly than that by the prior art. The present invention is a substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, identification marks being attached to the respective component parts, the apparatus including: a storage unit for storing part information on each of the component parts necessary when placing an order for a component part, in correspondence with the identification mark; an input unit for inputting an identification mark of a component part to be ordered; and a display unit for displaying the part information in the storage unit corresponding to the inputted identification mark.
    Type: Application
    Filed: August 17, 2007
    Publication date: December 20, 2007
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Takashi Aiuchi, Akihito Suzuki, Hirotsugu Kamamoto, Shuichi Yonemura, Takashi Imafu, Kazuhisa Sakamoto
  • Wafer processing apparatus and transfer device adjustment system
    Publication number: 20040186622
    Abstract: An object of the present invention is to perform replacement of parts of a substrate processing apparatus more rapidly than that by the prior art. The present invention is a substrate processing apparatus constituted of, a plurality of component parts for performing predetermined processing for a substrate, identification marks being attached to the respective component parts, the apparatus including: a storage unit for storing part information on each of the component parts necessary when placing an order for a component part, in correspondence with the identification mark; an input unit for inputting an identification mark of a component part to be ordered; and a display unit for displaying the part information in the storage unit corresponding to the inputted identification mark.
    Type: Application
    Filed: January 8, 2004
    Publication date: September 23, 2004
    Inventors: Takashi Aiuchi, Akihito Suzuki, Hirotsugu Kamamoto, Shuichi Yonemura, Takashi Imafu, Kazuhisa Sakamoto