Patents by Inventor Takashi Inugima

Takashi Inugima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processing apparatus with a lisitano coil
    Patent number: 4973883
    Abstract: A plasma processing apparatus and method is equipped with a vacuum chamber, helmholtz coils, a microwave generator and gas feeding systems. The microwave generator consists of a lisitano coil which is capable of emitting a microwave in the TE.sub.011 mode. In the light of such a microwave, a high quality film can be deposited.
    Type: Grant
    Filed: April 29, 1988
    Date of Patent: November 27, 1990
    Assignee: Semiconductor Energy Laborator Co., Ltd.
    Inventors: Naoki Hirose, Takashi Inugima, Toru Takayama