Abstract: Decane (C10H22) is sprayed as a mist from spray nozzles toward a rotor blade via a supply pipe and communication passages. Since decane has a boiling point of 174° C. at atmospheric pressure, the decane is a liquid at normal temperature and normal pressure. On the other hand, the pressure inside a turbomolecular pump is in a substantially vacuum state of about 100 Pa, and the boiling point of decane at this pressure is 14° C. Thus, although the pressure is high and the decane is in a liquid state until the decane is sprayed, when the decane adheres to surfaces of the rotor blades and the temperature of the decane rises, the decane vaporizes. At this moment, since the amount of heat of the rotor blades is consumed as heat of vaporization, the rotor blades can be cooled.

Abstract: A pressure difference of liquid is generated between an upper end and a lower end of a thread groove by the action of a thread groove pump formed between the thread groove and a lower end wall portion of a rotating rotor shaft. As a result, liquid of a bottom space is sucked up and passes through a hollow hole and is discharged to the outside of the rotor shaft through communication holes. The discharged liquid passes through the inside of a hub of a rotating body and reaches an extension member where it is sprayed radially in the form of droplets from a protrusion. The droplets are received by a partition wall. Due to the presence of a protrusion in an upper portion of the partition wall, the droplets cannot cross over the partition wall. The accumulated liquid drops through a communication hole to the bottom space.

Abstract: A battery indicator estimates a remaining battery capacity when a controller instructs a driving power source to start the power supply based on a battery voltage detected at a timing when the controller instructs the driving power source to start the power supply. The controller instructs the driving power source to stop the power supply after the discharge of a secondary battery by a charge-discharge circuit is ended and at a timing when a battery voltage being measured by a voltage measurer is stabilized.

Abstract: The present invention provides a vacuum pump that measures the temperature of a rotating portion accurately and at low cost, a stator column of the vacuum pump, a base, and an exhaust system of the vacuum pump at low cost. The vacuum pump according to the present embodiment, the thread groove-type seal for causing some of the purge gas to flow back toward the temperature sensor unit is provided on the downstream side of the purge gas flow path in which the temperature sensor unit is disposed, thereby increasing the pressure of the purge gas in the vicinity of the temperature sensor unit. Thus, with the small amount of purge gas, the gas pressure around the temperature sensor unit can create an intermediate flow or a viscous flow. Consequently, the total amount of purge gas to be supplied can be saved, resulting in cost reduction.

Abstract: To provide a vacuum pump capable of heating only a flow channel extending from the vicinity of an exit of a thread groove exhaust flow channel toward an outlet port and prevents the accumulation of a product that is caused by a decrease in the temperature of process gas near the exit of the thread groove exhaust flow channel and the flow channel. A vacuum pump has a thread groove exhaust portion that has thread groove exhaust flow channels at least in respective parts of portions on inner and outer circumferential sides of a rotor (rotating body), a casing enclosing the thread groove exhaust portion, an outlet port for exhausting gas compressed by the thread groove exhaust portion to the outside of the casing, and a partition wall that covers a flow channel extending from the exits of the thread groove exhaust flow channels toward the outlet port.

Abstract: A reflection mechanism is disposed above a rotor blade. A chamfered surface of the rotor blade is formed to gradually open wide by 0 to 10 degrees toward the downstream side in the rotational direction, from an imaginary line passing through a rotational direction-side tip end point of a horizontal surface and drawn parallel to a rotating shaft. In the reflection mechanism, inclined plates, inclined at a predetermined angle, are arranged radially in the radial direction from a central disc portion. A particle reflected on the chamfered surface of the rotor blade collides with each inclined plate of the reflection mechanism and is then re-reflected and falls in the downstream direction. Since the particle can securely be reflected toward the reflection mechanism, the particle can be prevented from exiting through an inlet port to flow back toward a chamber.

Abstract: In a vacuum pump, the proportion of hole portions at a distal end (outer peripheral side/outer peripheral portion) of a stator disc is locally increased. More specifically, hole portions of substantially the same size are provided in parallel from the inner peripheral side to the outer peripheral side of the stator disc, and the number of hole portions provided in the outermost row is set to be larger than the number of hole portions provided in an inner row. Hole portions of substantially the same size are provided in parallel from the inner peripheral side to the outer peripheral side of the stator disc, and some of hole portions provided in the outermost row are integrated to be a single hole portion. T shaped hole portions are provided in the stator disc. L shaped hole portions are provided in the stator disc.

Abstract: A vacuum pump exhaust system and an exhausting method of the vacuum pump supply a purge gas to the vacuum pump such that an amount of the purge gas satisfies one of following conditions: an amount of the purge gas flowing at a higher velocity than a backflow velocity of gas exhausted by the vacuum pump on at least a part of a downstream side of the temperature sensor unit, and an amount of the purge gas having a pressure of one of an intermediate flow and a viscous flow around the temperature sensor unit. The exhaust system further includes a purge gas supply unit capable of controlling a flow rate of purge gas introduced into the vacuum pump. This configuration can prevent process gas from flowing backward so as to change the composition around the temperature sensor unit, thereby accurately measuring the temperature of the rotating portion.

Abstract: To provide a vacuum pump suited for removal of a product deposited in a flow path of the vacuum pump, and a stator component, discharge port, and control means that are used in the vacuum pump. A vacuum pump includes a flow path through which a gas is transferred from an inlet port toward an outlet port and removing means that removes a product deposited on an inner wall surface of the flow path. The removing means has injection holes with one ends opened at the inner wall surface of the flow path and injects the removing gas into the flow path through the injection holes.

Abstract: In a vacuum pump, a spiral plate on a downstream side of a slit is not disposed on an extended line of a spiral plate on an upstream side of the slit but is disposed after in a direction in which a gap formed by the slit is reduced. The distance by which the downstream spiral plate is moved corresponds to the distance in which the gap disappears and the upstream spiral plate and the downstream spiral plate overlap. When scraping the spiral plates, the radius of a machining end mill is set smaller than the width of the slit of the spiral plate, and the radius of the machining end mill is set smaller than the phase difference between the upstream spiral plate and the downstream spiral plate. In addition, end portions of the spiral plates between which the slit is formed are subjected to chamfering.

Abstract: A vacuum pump has, in at least either a stator disc to be disposed or a rotating disc to be disposed, a Siegbahn type molecular pump portion in which a spiral-shaped groove with a ridge portion and a root portion is engraved (disposed), and is structured to ensure high conductance at a returning flow channel formed at the outer periphery (outside) of the Siegbahn type molecular pump portion. This structure is created by a communicating portion (a groove portion, a slit) formed on each rotating disc, or an oblique plate disposed on the stator disc and the communicating portion formed on the rotating disc. The “communicating portion,” “groove portion,” and “slit” are configured to have “concave” shapes, a concave portion is provided by engraving a groove radially inward from an outer diameter portion (toward a side of a shaft of the vacuum pump) in the rotating disc (or stator disc).

Abstract: A vacuum pump includes: a rotating portion and a stator portion between which an internal flow path is formed; an exhaust mechanism which sends gas from a suction port toward an outlet port through the internal flow path; and a main sensor for detecting that a deposited material has reached a prescribed thickness at a detection object position of the internal flow path, wherein the main sensor includes at least a pair of electrodes disposed in the internal flow path at an interval corresponding to the prescribed thickness, and a capacitance detection circuit which is connected to the pair of electrodes and which detects a capacitance between the pair of electrodes, and the capacitance detection circuit detects that a deposited material in the internal flow path has reached the prescribed thickness on the basis of a drop in an increase rate of the capacitance.

Abstract: To Provide a vacuum pump having a high exhausting ability and low power consumption. In the a vacuum pump according to the present invention, an outer diameter of a spiral plate disposed on a downstream side is set smaller than an outer diameter of a spiral plate disposed on an upstream side. Specifically, a stepped portion is provided by setting a blade length of the spiral plate disposed on the downstream side shorter than a blade length of the spiral plate disposed on the upstream side. In addition, in a spacer provided in the stepped portion, a relief formation portion is provided to allow a contact surface in contact with an upstream spacer (i.e., spacer opposed to the spiral plate having the unreduced outer diameter) and a contact surface in contact with a downstream spacer (i.e., spacer opposed to the spiral plate having the reduced outer diameter) in the stepped portion to have an equal inner diameter.

Abstract: In a vacuum pump, a spiral plate on a downstream side of a slit is not disposed on an extended line of a spiral plate on an upstream side of the slit but is disposed after in a direction in which a gap formed by the slit is reduced. The distance by which the downstream spiral plate is moved corresponds to the distance in which the gap disappears and the upstream spiral plate and the downstream spiral plate overlap. When scraping the spiral plates, the radius of a machining end mill is set smaller than the width of the slit of the spiral plate, and the radius of the machining end mill is set smaller than the phase difference between the upstream spiral plate and the downstream spiral plate. In addition, end portions of the spiral plates between which the slit is formed are subjected to chamfering.

Abstract: An uninterruptible power supply unit is configured such that, during charging of a first battery pack, and until, after the first battery pack is charged to a fully charged state, the voltage of the first battery pack is lowered below an upper limit voltage of a load device, discharging of the first battery pack is prohibited, and discharging of the second battery pack is allowed, and such that, during charging of a second battery pack, and until, after the second battery pack is charged to a fully charged state, the voltage of the second battery pack is lowered below the upper limit voltage of the load device, discharging of the second battery pack is prohibited, and discharging of the first battery pack is allowed.

Abstract: In a vacuum pump, the proportion of hole portions at a distal end (outer peripheral side/outer peripheral portion) of a stator disc is locally increased. More specifically, hole portions of substantially the same size are provided in parallel from the inner peripheral side to the outer peripheral side of the stator disc, and the number of hole portions provided in the outermost row is set to be larger than the number of hole portions provided in an inner row. Hole portions of substantially the same size are provided in parallel from the inner peripheral side to the outer peripheral side of the stator disc, and some of hole portions provided in the outermost row are integrated to be a single hole portion. T-shaped hole portions are provided in the stator disc. L-shaped hole portions are provided in the stator disc.

Abstract: A vacuum pump component includes a stationary disk that is formed with a spiral groove (helical groove) having a ridge portion and a valley part and has a projecting (protruding) portion on both or either one of an inner-diameter portion of the disk which faces a rotary cylinder (rotator cylinder-shaped portion) and an inner-diameter side of a stationary cylinder disposed on an outer peripheral side of the stationary disk. A second vacuum pump component includes rotary disk formed with a spiral groove having a ridge portion and a valley part and having a projecting (protruding) portion on both or either one of an outer-diameter portion of a rotary cylinder disposed on an inner peripheral side of the rotary disk and an outer-diameter portion of the rotary disk which faces a spacer.

Abstract: An exhausting system capable of preventing gas condensation and early overheat in a vacuum pump without causing an increase in the costs of the entire exhausting system and suitable for relaxing the operable conditions of the entire exhausting system including a flow rate at which gas is successively exhausted. An exhausting system is predicated on a constitution including: at least a first vacuum pump and a second vacuum pump connected in series; and a connecting portion disposed therebetween, the exhausting system exhausting gas containing a condensable gas via the vacuum pumps and the connecting portion. In the exhausting system, an environment inside the connecting portion is set to an environment having a vapor phase region below a vapor pressure curve of the condensable gas flowing through an inside of the connecting portion by providing the second vacuum pump near the first vacuum pump.

Abstract: A stator disk includes a connection hole for improving exhaust efficiency in a vacuum pump including a Seigbahn type molecular pump portion, and a vacuum pump including the stator disk. The vacuum pump according to an embodiment includes a Seigbahn type molecular pump portion and includes, in a stator disk disposed therein, a connection hole that connects an upper space (an inlet port side region, an upstream side region) with a lower space (an outlet port side region, a downstream side region) in the axial direction of the stator disk.

Abstract: The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.