Abstract: Provided is a highly reliable semiconductor device and a method for manufacturing same. The method for manufacturing the semiconductor device includes forming an interlayer insulating film on a semiconductor substrate, forming a conductive plug in the interlayer insulating film, the conductive plug having a top surface for forming the same plane as the top surface of the interlayer insulating film, forming a first titanium film on the interlayer insulating film and the conductive plug, forming an aluminum diffusion-preventing film on the first titanium film, forming a second titanium film on the aluminum diffusion-preventing film, forming an aluminum film on the second titanium film, and shaping the area from the aluminum film to the first titanium film by etching to form wiring.

Abstract: Provided is a highly reliable semiconductor device and a method for manufacturing same. The method for manufacturing the semiconductor device includes forming an interlayer insulating film on a semiconductor substrate, forming a conductive plug in the interlayer insulating film, the conductive plug having a top surface for forming the same plane as the top surface of the interlayer insulating film, forming a first titanium film on the interlayer insulating film and the conductive plug, forming an aluminum diffusion-preventing film on the first titanium film, forming a second titanium film on the aluminum diffusion-preventing film, forming an aluminum film on the second titanium film, and shaping the area from the aluminum film to the first titanium film by etching to form wiring.

Abstract: In a method for manufacturing a semiconductor device, a first Ti film, a titanium nitride (TiN) film, a second Ti film, a first aluminum (Al) film and a second Al film are formed sequentially in a contact hole formed in a second interlayer insulating film and on a Cu wire. The first titanium (Ti) film is formed so that a ratio of a thickness of a first portion of the first Ti film on a bottom face of the contact hole to a thickness of a second portion of the first Ti film on the second interlayer insulating film becomes equal to or smaller than 5/100. Moreover, the second Al film is formed using an aluminum reflow method, in which the second Ti film and the first Al film are alloyed with each other to form an Al—Ti alloy film.

Abstract: A device may includes a first conductive film, a first insulating film, a second conductive film, a third conductive film, and a fourth conductive film. The first conductive film includes copper. The first insulating film is disposed over the first conductive film. The first insulating film has a first contact hole. The contact hole reaches a first surface of the first conductive film. The second conductive film includes aluminum. The second conductive film is disposed in the first contact hole. The third conductive film includes titanium nitride. The third conductive film is disposed in the contact hole. The third conductive film covers a part of the first surface of the first conductive film. The fourth conductive film is free of titanium nitride. The fourth conductive film is disposed between the second and third conductive films.

Abstract: In a method for manufacturing a semiconductor device, a first Ti film, a titanium nitride (TiN) film, a second Ti film, a first aluminum (Al) film and a second Al film are formed sequentially in a contact hole formed in a second interlayer insulating film and on a Cu wire. The first titanium (Ti) film is formed so that a ratio of a thickness of a first portion of the first Ti film on a bottom face of the contact hole to a thickness of a second portion of the first Ti film on the second interlayer insulating film becomes equal to or smaller than 5/100. Moreover, the second Al film is formed using an aluminum reflow method, in which the second Ti film and the first Al film are alloyed with each other to form an Al—Ti alloy film.

Abstract: A method for manufacturing a semiconductor device comprises forming a metal wiring on a semiconductor substrate, forming an insulating film over the semiconductor substrate with the metal wiring, forming a through hole in the insulating film, performing sputter-etching to enlarge an cross section of the through hole, and forming a stacked film. In forming the stacked film, there are formed a first titanium film, a titanium nitride film, and a second titanium film in this order over the insulating film including an inner surface of the through hole at a temperature within a range from 20 to 40° C., and a first Al layer, a second Al layer, and a third Al layer in this order over the second titanium film.