Abstract: An objective includes a first lens group that has a positive refractive power and a second lens group that has a negative refractive power. The objective includes a first negative lens and satisfies 0.005?do1/ho1?0.1??(1) 0.005?hmin/hl?0.72??(2) 10 mm?L?100 mm??(3) 0.1?L/f?31??(4) when do1 is a thickness of the first negative lens, ho1 is an axial marginal ray height on a lens surface on the object side of the first negative lens, hmin is a minimum value of an axial marginal ray height in the second lens group, hl is a height of an axial marginal ray on a lens surface of the objective that is situated closest to the image side, L is a length of the objective, and f is a focal length of the objective.

Abstract: A Fabry-Perot interference filter includes a fixed mirror and a movable mirror disposed opposite to the fixed mirror via a gap, distance between the fixed mirror and the movable in a light transmission region being adjusted by electrostatic force. A plurality of first annular grooves surrounding the light transmission region and a plurality of first through-holes opening to the gap side and the opposite side are formed at a surrounding portion surrounding the light transmission region in the movable mirror.

Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.

Abstract: A polymer film has an average film thickness T0 along a straight line D passing through the center of gravity of a two-dimensional projection such that the area of the polymer film is maximized, satisfies equation (a), the average value L of distances 1 from the center of gravity to edges satisfies equation (b), the Young's modulus E satisfies equation (c), and the thickness deviation ? defined by equation (d) satisfies equation (e); and a dispersion liquid and an agglomerate using the same. (a) 10 nm?T0?1000 nm, (b) 0.1 ?m?L?500 ?m, (c) 0.01 GPa?E?4.3 GPa, (d) ?=1?T1/T2, (e) 0.346E×10?9?1.499<?<?0.073E×10?9+0.316.

Abstract: A immersion microscope objective includes: a first positive lens group that includes at least one positive single lens and a first cemented lens; a second positive lens group that includes a plurality of cemented lenses including a second cemented lens that is the closest to an object; a third negative lens group that includes a first lens component having a concave surface; and a fourth lens group that includes a second lens component that is the closest to the object, the second lens component having a concave surface, wherein the objective satisfies the following conditional expressions: 0.986?NAob/N0?0.995??(1) 0.0095?1/(N1×?1)?0.015??(2) where NAob indicates a numerical aperture of the objective; N0, a refractive index that an immersion liquid has for an e line; N1, a refractive index that the meniscus lens has for the e line; ?1, an Abbe number that the meniscus lens has for a d line.

Abstract: A dry objective includes: first lens group that includes a plurality of meniscus lens components and has a positive power; a second lens group that includes a cemented lens, turns a pencil of diverging light from the first lens group into a pencil of converging light, and has a positive power; and a third lens group that includes a front group and a rear group and has a negative power, the front and rear groups having concave surfaces adjacent to and facing each other. The dry objective satisfies the following conditional expression: 0.43?(hg2?hg1)/gt1?0.9??(1) where gt1 indicates a thickness that a lens component of the rear group that is the closest to the object has on an optical axis; hg1 and hg2, the heights of an axial marginal light ray at the lens surface of the lens component that is the closest to the object and an image.

Abstract: A power supply apparatus capable of switching an output voltage Vout based on an external control signal includes a control unit configured to perform control to stop an output from the power supply apparatus in a case where a voltage applied to a Vcc terminal is higher than a predetermined voltage Vovp. The Vcc terminal is connected to a primary-side auxiliary winding of a transformer via a regulator and the control unit operates based on power supplied to the Vcc terminal in normal operation. A base of an NPN transistor included in the regulator is connected to a ground via a first resistance R1 and a first zener diode ZD1. A second resistance R2 is provided between the base and a collector of the NPN transistor.

Abstract: A piezoelectric device includes in a piezoelectric layer, a recessed portion which is provided outside an active portion and opens on the side opposite to a substrate is provided, in a lamination direction of the substrate and a piezoelectric element, a first barrier layer formed of a material other than the zirconium oxide is formed in a region of a vibration plate opposite to the substrate and overlapping a bottom surface of the recessed portion, and the first barrier layer is not formed in a portion of a region overlapping the active portion in the lamination direction.

Abstract: The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.

Abstract: A piezoelectric device includes a pressure chamber forming substrate in which a pressure chamber empty portion is formed, a vibrating plate that is formed on the pressure chamber forming substrate, corresponding to the pressure chamber empty portion, and a piezoelectric element that is formed on the vibrating plate, corresponding to the pressure chamber empty portion, in which the vibrating plate is provided with a concave portion having a bottom portion which is overlapped with the pressure chamber empty portion, and is larger than the pressure chamber empty portion in a planar view, and a wall portion which surrounds the bottom portion, on the pressure chamber empty portion side, the wall portion has a curved surface that is inclined to widen in a direction toward the pressure chamber empty portion from the bottom portion, and a curvature radius of the curved surface is 60 nm to 1000 nm.

Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion disposed on the first surface, a second laminate that has a second mirror portion facing the first mirror portion via a gap on a side opposite to the substrate with respect to the first mirror portion, and an intermediate layer that defines the gap between the first laminate and the second laminate. An outer surface of the intermediate layer is curved such that an edge portion of the intermediate layer on the substrate side is positioned on an outer side of an edge portion of the intermediate layer on the side opposite to the substrate in a direction parallel to the first surface. The second laminate covers the outer surface of the intermediate layer.

Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion, a second laminate that has a second mirror portion facing the first mirror portion via a gap, an intermediate layer that defines the gap between the first laminate and the second laminate, and a first terminal. The intermediate layer has a first inner surface surrounding the first terminal. The first inner surface is curved such that an edge portion of the intermediate layer on the substrate side is positioned on the first terminal side relative to an edge portion of the intermediate layer on a side opposite to the substrate.

Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.

Abstract: A power supply apparatus capable of switching an output voltage Vout based on an external control signal includes a control unit configured to perform control to stop an output from the power supply apparatus in a case where a voltage applied to a Vcc terminal is higher than a predetermined voltage Vovp. The Vcc terminal is connected to a primary-side auxiliary winding of a transformer via a regulator and the control unit operates based on power supplied to the Vcc terminal in normal operation. A base of an NPN transistor included in the regulator is connected to a ground via a first resistance R1 and a first zener diode ZD1. A second resistance R2 is provided between the base and a collector of the NPN transistor.

Abstract: A Fabry-Perot interference filter 10A includes a first mirror 31; a second mirror 41 being opposite to the first mirror 31 with a gap S therebetween; a first electrode 17 formed in the first mirror 31 to surround a light transmission region 11; a second electrode 18 formed in the first mirror 31 to include the light transmission region 11; and a third electrode 19 formed in the second mirror 41 to be opposite to the first electrode 17 and the second electrode 18 and connected to the same potential as the second electrode 18. The second electrode 18 is positioned at the side of the third electrode 19 or the opposite side thereof with respect to the first electrode 17 in an opposite direction D where the first mirror 31 and the second mirror 41 are opposite each other.

Abstract: A spectral sensor includes a Fabry-Perot interference filter which is provided with an opening to pass light transmitted according to a distance between a first mirror and a second mirror along a facing direction; a light detector which has a light reception unit to receive the light having passed through the opening; a wiring substrate on which the light detector is mounted; and a plurality of spacers which support the filter on the wiring substrate, such that a second space continuous with a first space in the opening and including the first space when viewed from the facing direction is formed between the filter and the wiring substrate. The light detector is disposed in the second space. The light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the facing direction.

Abstract: A spectral sensor 1A includes a Fabry-Perot interference filter 10 which has a light transmission region 11; a light detector 3 which detects light having transmitted the light transmission region 11; spacers 4A and 4B which support the Fabry-Perot interference filter 10 in a surrounding region of the light transmission region 11; and a die bond resin 5 which adheres the Fabry-Perot interference filter 10 and the spacers 4A and 4B to each other. The die bond resin 5 has one opening A2 communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region 11.

Abstract: A spectroscopic sensor 1 comprises an interference filter unit 20, having a cavity layer 21 and first and second mirror layers 22, 23 opposing each other through the cavity layer 21, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3, arranged on the first mirror layer 22 side, for transmitting therethrough light incident on the interference filter unit 20, a light-detecting substrate 4, arranged on the second mirror layer 23 side, for detecting the light transmitted through the interference filter unit 20, and a first coupling layer 11 arranged between the interference filter unit 20 and the light-transmitting substrate 3. The cavity layer 21 and the first coupling layer 11 are silicon oxide films.