Abstract: A bearing device includes: at least one bearing that has a rolling element and a raceway surface to support a main shaft; a member disposed on a path through which pressing force generating a preload between the rolling element and the raceway surface is transmitted; and at least one load sensor element fixed to the member to measure the pressing force. At least one load sensor element is a chip component including a thin film pattern of which resistance changes according to the pressing force and a protective layer that insulates and protects thin film pattern.

Abstract: A bearing device includes: a magnetic ring fixed to an inner ring; and a stator fixed to an outer ring so as to face magnetic ring. Magnetic ring and stator constitute a claw pole type generator. Stator includes a coil and a magnetic yoke surrounding coil. The magnetic yoke is configured by combining a first member and a second member that are magnetic bodies. First member and second member have an identical shape. Each of first member and second member has a plurality of second claws arranged in a comb shape. A plurality of first claws of first member and the plurality of second claws of second member are alternately arranged on a surface facing magnetic ring.

Abstract: A semiconductor wafer according to an embodiment includes a support region facing a support member, an outer circumferential region positioned on an outer side of the support region, and an inner circumferential region positioned on an inner side of the support region. The outer circumferential region has a convex portion with a thickness protruded upward with respect to the inner circumferential region or a concave portion with a thickness recessed downward with respect to the inner circumferential region.

Abstract: A bearing device includes: at least one bearing that has a rolling element and a raceway surface to support a main shaft; a member disposed on a path through which pressing force generating a preload between the rolling element and the raceway surface is transmitted; and at least one load sensor element fixed to the member to measure the pressing force. At least one load sensor element is a chip component including a thin film pattern of which resistance changes according to the pressing force and a protective layer that insulates and protects thin film pattern.

Abstract: A bearing equipped with a sensor and incorporating a power generation function in a simple configuration is provided. A bearing includes an outer ring, a plurality of rolling elements, an inner ring, a cage, a seal member, a sensor, a transmission unit, and a power generation unit. The sensor is disposed in the seal member, and detects state information of the bearing. The transmission unit transmits the state information detected by the sensor to outside. The power generation unit is disposed so as to face a bearing space sandwiched between the outer ring and the inner ring, and generates electric power that is to be supplied to the sensor and the transmission unit. The power generation unit includes an element that converts stress into electromotive force.

Abstract: The magnetic encoder includes: a core member of annular shape having a press-fitting portion which bends and extends from an edge of a track formation surface, and to which a rotary shaft is press-fitted and fixed; and two or more rows of magnetic tracks arranged adjacent to each other on a magnetic member provided on the track formation surface, each track having N poles and S poles alternately magnetized thereon. The two or more rows of magnetic tracks include a main track that has a largest number of magnetic poles and is used for calculating an angle of rotation, and a sub track used for calculating a phase difference from the main track. The main track is located on a side more distant from the press-fitting portion than the sub track.

Abstract: A mask manufacturing method includes stacking a first antireflection layer on a first stacked body at a first film thickness so as to create a first transmissive type mask. In the first stacked body, a first semitransmissive layer, a first reflective layer, and a first transmissive substrate are stacked. The mask manufacturing method includes stacking a second antireflection layer on a second stacked body at a second film thickness so as to create a second transmissive type mask. In the second stacked body, a second semitransmissive layer, a second reflective layer, and a second transmissive substrate are stacked. The second film thickness is determined in accordance with a thermal expansion amount of the first mask.

Abstract: A torque detection device includes an inner ring, a middle ring, an outer ring, a first beam, a second beam, a magnetic target, and a magnetic sensor. The first beam is composed of an elastic member extending in a radial direction so as to couple the inner ring and the middle ring together. The second beam is composed of an elastic member extending in a radial direction so as to couple the middle ring to the outer ring together. The magnetic target is fixed to the inner ring and the magnetic sensor is fixed to the middle ring such that the magnetic target and the magnetic sensor face each other. Torque acting on the inner ring or the outer ring is calculated according to how an amount of magnetism sensed by the magnetic sensor changes.

Abstract: A magnetic encoder having a plurality of rows of magnetic tracks and capable of detecting an absolute angle is easily producible with higher accuracy. The magnetic encoder includes: a core member of annular shape having a bending plate portion that bends and extends from an edge of a track formation surface; and two or more rows of magnetic tracks arranged adjacent to each other on a magnetic member provided on the track formation surface, each track having N poles and S poles alternately magnetized thereon. The magnetic tracks include a main track that has a largest number of magnetic poles and is used for calculating an angle, and a sub track used for calculating a phase difference from the main track. The main track is located on a side closer to the bending plate portion than the sub track.

Abstract: The present invention provides a chemical conversion liquid for zinc or zinc alloy bases, which contains 2-200 mmol/L of trivalent chromium ions, 1-300 mmol/L of zirconium ions and at least one component selected from among fluorine ions, a water-soluble carboxylic acid and a salt thereof, and which does not contain Co ions and hexavalent chromium ions.

Abstract: There is provided a fastener including a band, a band fastening portion and a mounting portion. The band fastening portion includes a passage hole, a locking claw, a supporting wall portion, and a pair of side wall portions. The supporting wall portion extends in a direction from an inlet opening towards an outlet opening and has end faces. The band has a proximal end portion extending from the end face of the supporting wall portion. The pair of side wall portions are disposed so as to define a gap in a widthwise direction between the proximal end portion and themselves. End faces of the pair of side wall portions project further in a passing direction of the band through the passage hole than the end face of the supporting wall portion.

Abstract: It is an object of the present invention to provide a rear wheel steering device of which the weight is not added to unsprung weight, and which can steer right and left rear wheels independently of each other. The rear wheel steering device includes a first rod connected to the left rear wheel, a first driving portion configured to axially move the first rod, a second rod connected to the right rear wheel, and a second driving portion configured to axially move the second rod. A single housing supports the first rod, the first driving portion, the second rod, and the second driving portion.

Abstract: The purpose of the present invention is to provide a water-soluble finishing agent for a trivalent chromium chemical conversion coating film, which has low insulation, no problems with tightening properties, outstanding gloss and high corrosion resistance, and can obtain a trivalent chromium chemical conversion coating film, especially a black trivalent chromium chemical conversion coating film, having few scratches and flaws. The finishing agent for a trivalent chromium chemical conversion coating film is characterized by containing a trivalent chromium source, a phosphate ion source, a zinc ion source, a chelating agent which can form a complex with trivalent chromium, and a non-ionic water-soluble polymer compound selected from a group comprising poly(vinyl alcohol) and derivatives thereof, poly(vinyl pyrrolidone) and derivatives thereof, poly(alkylene glycol)s and derivatives thereof, and cellulose ethers and derivatives thereof.

Abstract: A biological growth inhibition factor assay method includes: a first step of mixing a photosynthetic sample, with an aqueous solution sample to prepare a test measurement solution, letting the test measurement solution stand, and then after illuminating light onto the test measurement solution for a predetermined illumination time, measuring the light amount of the delayed fluorescence that is emitted; a second step of mixing the photosynthetic sample with a standard sample, in which biological growth inhibition factors are not present, to prepare a standard measurement solution, letting the standard measurement solution stand, and then after illuminating light onto the standard measurement solution for a predetermined illumination time, measuring the light amount of the delayed fluorescence that is emitted; and a third step of computing assay values based on the light amounts of delayed fluorescence, respectively measured in the first step and the second step, and determining a comparison value of the assay

Abstract: According to one embodiment, provided is a reflective mask having a substrate, a reflection layer that reflects EUV light formed above the substrate, and an absorption layer that absorbs the EUV light formed above the reflection layer. The reflective mask further includes a monitor pattern monitoring an attachment amount of contamination attached during exposure.

Abstract: According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge, and calculating dose data of the measurement region and a non-measurement region based on data in the measurement region and the virtual data are included.

Abstract: Provided is a stack-type lens array capable of preventing a lens from peeling off due to stress during dicing or vibration and impact when used. The stack-type lens array is formed by stacking and bonding two lens sheets in which micro lenses are arranged on a flat portion at predetermined intervals. Antireflection films are vapor-deposited on a convex surface and a concave surface of the lens and a light shielding film is vapor-deposited such that a circular opening is formed at the center of the concave surface. The opening serves as a diaphragm aperture of the lens. An exposed surface in which neither the antireflection film nor the light shielding film is vapor-deposited is provided outside the light shielding film between adjacent lenses. A dicing line is set at the center of the exposed surface. An adhesive layer is formed in a predetermined pattern on the exposed surface.

Abstract: According to one embodiment, a method for making a correction map of a dose amount of EUV light used when exposing with the EUV light, includes estimating an exposure result based on an initial correction map of the dose amount and flare of the EUV light, determining a goodness of the exposure result, and correcting the initial correction map in the case where the exposure result is unacceptable. And, the correcting of the initial correction map, the estimating of the exposure result, and the determining of the goodness are repeated until the exposure result is good.

Abstract: To provide a method for manufacturing a perpendicular magnetic recording medium, which is capable of coping with the much higher recording density.

Abstract: A lens module capable of preventing a deterioration of optical properties and a method for manufacturing thereof are provided. Optical axes of lens portions of superimposed lens arrays are aligned. Substrate portions of the other lens arrays of the superimposed lens arrays except the lowermost lens array are cut by a first cutting portion. Subsequently, thermosetting resins are supplied from a gap between cut surfaces of the cut substrate portion so as to fill a gap between the substrate portions of the superimposed lens arrays with the thermosetting resins and to cause the thermosetting resins to integrally cover the cut surfaces of the substrate portion and a surface of the substrate portion of the uppermost lens array. Thereafter, the thermosetting resins are cured, and an individual lens module is separated by cutting the substrate portion of the lowermost lens array using a second cutting portion.