Abstract: A semiconductor sensor 1 includes: a frame 21 having an opening; an actuation diaphragm 16 provided inside the frame 21 in a spaced-apart relationship with respect to the frame 21; a plurality of flexible beams 19a, 19b provided to interconnect the frame 21 and the actuation diaphragm 16, each of the flexible beams 19a, 19b having piezo resistance elements 30a, 30b, 30c thereon; metallic wiring lines 33 provided on one major surfaces of the respective flexible beams 19a, 19b for connecting each of the piezo resistance elements 30a, 30b, 30c to each other; and a plurality of thermal stress absorbing portions provided on the other major surfaces of the respective flexible beams 19a, 19b for absorbing thermal stresses developed in the beams 19a, 19b due to the difference of coefficients of thermal expansion between the respective beams 19a, 19b and the corresponding metallic wiring lines 33.

Abstract: Catheter of such a structure that Ti—Ni superelastic allow (SEA) tube has its outside covered with thin-film silicone rubber tube. The SEA tube at part whose flexion is desired is wrought to cut off multiple grooves (crenas) with thin joints left. The covering with the silicone rubber tube is effected without the use of its front end portion in the covering. When a negative pressure is applied to physiological saline placed therein, the front end portion works as a valve, and the silicone rubber tube at the wrought part yields inward so that flexion of the catheter occurs at that part.

Abstract: An active guide wire (1) that can be used in a narrow blood vessel in a complicate vascular system such as intracerebral is disclosed as well as a method of making the same. The active wire comprises a bias coil spring (3); an outer tube (4) having the bias coil spring (3) sheathed therewith and providing an external wall for the active wire guide (1); and a shape memory alloy (SMA) actuator (5) in the form of a flat sheet anchored in and securely connected to the outer tube (4), wherein the flat sheet SMA actuator (5) is shape memorized so as to bend in a direction of the thickness of the flat sheet and has a shape running zigzag longitudinally thereof. The actuator (5) is energized with an electric current and thereby heated to have its leading end bent.

Abstract: An active guide wire (1) that can be used in a narrow blood vessel in a complicate vascular system such as intracerebral is disclosed as well as a method of making the same. The active wire comprises a bias coil spring (3); an outer tube (4) having the bias coil spring (3) sheathed therewith and providing an external wall for the active wire guide (1); and a shape memory alloy (SMA) actuator (5) in the form of a flat sheet anchored in and securely connected to the outer tube (4), wherein the flat sheet SMA actuator (5) is shape memorized so as to bend in a direction of the thickness of the flat sheet and has a shape running zigzag longitudinally thereof. The actuator (5) is energized with an electric current and thereby heated to have its leading end bent.