Abstract: A transducer includes: a film support portion; a vibration film that is connected to the film support portion and capable of displacing in a thickness direction; a base material having an opposed surface that is opposed to the vibration film; and a first piezoelectric element that is provided with a pair of electrodes and a piezoelectric film sandwiched between the pair of electrodes, and is arranged on the vibration film, in which the transducer maintains a pressure in a space between the base material and the vibration film so as to keep displacement of the vibration film within a certain range.

Abstract: A MEMS module includes: a substrate; a semiconductor chip in which a MEMS including a mechanical movable portion is formed; and a soft member that is interposed between the substrate and the semiconductor chip and has a lower hardness than the substrate, wherein the soft member is disposed in a partial region of a first main surface of the semiconductor chip facing the substrate.

Abstract: A liquid leakage detection system that detects a liquid includes: a liquid leakage sensor including a first detector that detects adhesion of the liquid based on a change in impedance between a first electrode and a second electrode; and a control device that acquires information including the impedance between the first electrode and the second electrode, wherein the liquid leakage sensor includes a heater that heats the first electrode and the second electrode, and wherein the control device determines whether or not liquid leakage or dew condensation has occurred based on the impedance between the first electrode and the second electrode that are in a state of being heated by the heater, and notifies the determination result.

Abstract: A transducer includes: a substrate including a main surface and a back surface facing the main surface; a plurality of vibrating films formed in the substrate at a predetermined thickness between the main surface and a plurality of recesses formed in the back surface of the substrate such that the main surface can vibrate in the thickness direction of the substrate; and a plurality of driving layers laminated on the plurality of vibrating films, each being constituted by a pair of electrode layers of a lower electrode layer and an upper electrode layer with a piezoelectric layer therebetween and being disposed on the main surface, in which the plurality of vibrating films include vibrating films arranged at predetermined intervals in each of at least two directions in a plane of the main surface, and the transducer generate sufficient sound volume because the transducer is used as a speaker.

Abstract: A self-diagnosis apparatus has: a self-diagnosis control unit that outputs a predetermined self-diagnosis information to an information output unit; an information detection unit that detects output information outputted from the information output unit in accordance with the self-diagnosis information, and outputs a result of the detection as detection information; and abnormality judgment unit that compares the self-diagnosis information and the detection information during a predetermined synchronization window period, and in a case where difference information of a result of the comparison exceeds a predetermined range information, judges that there is abnormality in the information output unit and outputs abnormality information.

Abstract: A micro pump includes: a vibrating membrane on which a piezoelectric element is stacked; an upper space provided in contact with an upper surface of the vibrating membrane; and a lower space provided in contact with a lower surface of the vibrating membrane, wherein by displacing the vibrating membrane toward the upper space, a fluid flows out from the upper space to an outside and flows in from the outside to the lower space, and wherein by displacing the vibrating membrane toward the lower space, the fluid flows out from the lower space to the outside and flows in from the outside to the upper space.

Abstract: A method of evaluating a natural frequency of a piezoelectric vibrator including a vibrating membrane and a piezoelectric element, includes: transmitting a drive signal to the piezoelectric element for a certain period of time so as to allow the vibrating membrane to vibrate; acquiring information about a power-generating wave of the piezoelectric vibrator after stopping the transmission of the drive signal to the piezoelectric element; and determining a frequency of the drive wave at which a value of a voltage of the power-generating wave is maximum as the natural frequency of the piezoelectric vibrator, based on the information about the power-generating wave.

Abstract: A tactile sense presentation device includes: an object information acquisition part configured to acquire, as a state of an object, object information related to at least one selected from the group of a position, a direction, a distance, a speed, an acceleration, and urgency; and a tactile stimulus presentation part configured to present the state of the object as a tactile stimulus in a pseudo manner based on the object information.

Abstract: A method of evaluating a natural frequency of a piezoelectric vibrator including a vibrating membrane and a piezoelectric element, includes: acquiring power-generating wave information of the piezoelectric vibrator from vibration of the vibrating membrane, which is caused by generating an electric field in a piezoelectric film of the piezoelectric element to displace the vibrating membrane and then extinguishing the electric field in a state where the vibrating membrane is displaced; and measuring a period of a power-generating wave based on the power-generating wave information and determining a reciprocal of the period as the natural frequency of the piezoelectric vibrator.

Abstract: The present disclosure is related to a transducer. The transducer includes a substrate. A plurality of vibrating membranes, in a configuration of cantilevers, are disposed on a main surface of the substrate. A plurality of piezoelectric elements are stacked on the plurality of vibrating membranes for generating a voltage to excite each vibrating membrane. The cantilevers of the plurality of vibrating membranes extend in a direction from a reference point on the main surface toward the cantilevers, or in a direction from the cantilevers toward the reference point.

Abstract: Disclosed is a MEMS mirror including a flat plate that is displaceable in a film thickness direction, a frame part that is separated from the flat plate and surrounds the flat plate, a support part that connects the flat plate and the frame part and is smaller in film thickness than the frame part, and a piezoelectric body for control that is arranged on the support part. A control voltage is applied to the piezoelectric body for control to deform the piezoelectric body for control and deform the support part together with the deformation of the piezoelectric body for control, to thereby adjust a spring constant of the support part.

Abstract: Disclosed is an ultrasonic sensor control device including a transmission control section configured to control a transmitting device configured to transmit a transmission ultrasonic wave, a receiving section configured to receive a reception ultrasonic wave, a frequency determining section configured to determine a result of comparing a reception frequency that is a frequency of the reception ultrasonic wave received by the receiving section and that is a frequency capable of being received by the receiving section, with a transmission frequency of the transmission ultrasonic wave that is transmitted under the control of the transmission control section, and a frequency switching section configured to change the transmission frequency and the reception frequency on the basis of a result of the determination by the frequency determining section.

Abstract: Provided is a mounting component held so as to be capable of attachment and detachment by a mounting machine. The mounting component includes a membrane support, a vibrating membrane connected to the membrane support and displaceable in a membrane thickness direction, and a contact member that is located on the membrane support and is subjected to an upward attractive force by the mounting machine without generating stress leading to shape deformation or breakage of the vibrating membrane during the attachment and detachment.

Abstract: Disclosed herein is an ultrasonic sensor control device that controls an ultrasonic sensor device configured to transmit and receive ultrasonic waves. The ultrasonic sensor control device includes a transmission control section configured to control transmission of a transmission ultrasonic wave at a first frequency through the ultrasonic sensor device, a reception section configured to receive a reception ultrasonic wave through the ultrasonic sensor device, and a device control section configured to control the ultrasonic sensor device to set given frequencies as a transmission frequency of the transmission ultrasonic wave and a reception frequency of the reception ultrasonic wave. The device control section changes the reception frequency in such a manner that the reception frequency is a frequency different from the first frequency during a first period including at least a transmission period during which the transmission ultrasonic wave is transmitted.

Abstract: Provided is an acoustic device to be worn on an ear for use, the acoustic device including a nozzle having a transducer installed therein, the transducer serving as a sound source, and a housing attached to a base portion of the nozzle and having an electronic circuit and a battery housed therein, the electronic circuit being configured to drive the transducer. When the acoustic device is worn on the ear with a distal end of the nozzle inserted into an earhole and the base portion of the nozzle positioned outside of the earhole, a passage continuously extending between the base portion and the distal end of the nozzle is secured to allow an external sound to be taken in through the passage.

Abstract: A transducer includes: a piezoelectric element; and a film body including a film support portion having a hollow portion, and a vibration film connected to the film support portion and displaceable in a film thickness direction, the film body having the piezoelectric element stacked over the vibration film. The piezoelectric element includes: a first stacked body having a first pair of electrodes and a first piezoelectric film sandwiched between the first pair of electrodes; and a second stacked body having a second pair of electrodes and a second piezoelectric film sandwiched between the second pair of electrodes, the second stacked body being separated from the first stacked body.

Abstract: A transducer includes: a film support portion having a hollow portion; a vibration film displaceable in a film thickness direction; a piezoelectric element, the piezoelectric element including a pair of electrodes and a piezoelectric film; and in regions overlapping the hollow portion, a plurality of first regions having a first total film thickness which is a sum of a film thickness of the vibration film and a film thickness of the piezoelectric element, and a plurality of second regions having a second total film thickness which is a sum of a film thickness of the vibration film and a film thickness of the piezoelectric element, the second total film thickness being different from the first total film thickness. The first regions and the second regions are alternately arranged, and one of the first regions is adjacent to a connection portion between the film support portion and the vibration film.

Abstract: A control system includes: a piezoelectric element having a deformation amount that varies according to a magnitude of a drive voltage applied to the piezoelectric element; a base on which the piezoelectric element is arranged; a deformation sensor configured to detect a displacement of the base caused by deformation of the piezoelectric element and output the displacement as a displacement signal; and a drive device configured to apply the drive voltage to the piezoelectric element while adjusting the magnitude of the drive voltage so as to reduce a difference between a value of the displacement signal and a value of a setting signal.

Abstract: A transducer includes a piezoelectric element that includes a piezoelectric membrane which is interposed between a pair of electrodes, a membrane body that includes a vibration membrane displaceable in a membrane thickness direction, the piezoelectric element being laminated on the vibration membrane, a package that includes an internal space which houses the piezoelectric element and the membrane body, and an abutment pad that is disposed in the internal space and limits displacement of the vibration membrane by abutting the piezoelectric element or the vibration membrane when the vibration membrane is displaced in the membrane thickness direction.

Abstract: A self-diagnosis method for a vibration sensor attached to vibrating equipment includes measuring vibration data of the vibrating equipment by the vibration sensor, integrating the vibration data, and diagnosing whether or not the vibration sensor is abnormal by comparing an integrated value of the vibration data with a reference value.