Patents by Inventor Takashi Ohtskuki

Takashi Ohtskuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturing method for semiconductor device
    Publication number: 20050026320
    Abstract: The present invention is provided in order to remove contamination due to contaminant impurities of the interfaces of each film which forms a TFT, which is the major factor that reduces the reliability of TFTs. By connecting a washing chamber and a film formation chamber, film formation can be carried out without exposing TFTs to the air during the time from washing step to the film formation step and it becomes possible to maintain the cleanliness of the interfaces of each film which form the TFT.
    Type: Application
    Filed: August 30, 2004
    Publication date: February 3, 2005
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Taketomi Asami, Mitsuhiro Ichijo, Satoshi Toriumi, Takashi Ohtskuki, Shunpei Yamazaki