Patents by Inventor Takashi ONOSE
Takashi ONOSE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20160344158Abstract: There is provided a laser system that may include a Raman cell, a pumping light generator, and a Raman cell laser unit. The pumping light generator may include one or more optical parametric amplifiers (OPAs), and may be configured to output first Raman-cell pumping light and second Raman-cell pumping light to the Raman cell. The Raman cell laser unit may be configured to output probing light as a target of wavelength conversion to the Raman cell.Type: ApplicationFiled: August 3, 2016Publication date: November 24, 2016Applicant: GIGAPHOTON INC.Inventors: Takashi ONOSE, Kouji KAKIZAKI, Osamu WAKABAYASHI
-
Publication number: 20160187788Abstract: An exposure apparatus may include a laser light source capable of varying a wavelength of a laser beam that is emitted from the laser light source, a mask on which a pattern is formed, the pattern being configured to generate diffracted light by being irradiated with the laser beam, and a controller configured to control, in accordance with a distance between the mask and a substrate, the wavelength of the laser beam that is emitted from the laser light source, wherein the mask is irradiated with the laser beam emitted from the laser light source to perform proximity exposure on a surface of the substrate.Type: ApplicationFiled: December 30, 2015Publication date: June 30, 2016Applicant: Gigaphoton Inc.Inventors: Takashi ONOSE, Kouji KAKIZAKI, Osamu WAKABAYASHI, Akiyoshi SUZUKI
-
Patent number: 9184555Abstract: A laser system may include: a master oscillator configured to output pulsed laser light; an amplification device for amplifying the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the master oscillator outputs the pulsed laser light; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device.Type: GrantFiled: June 6, 2014Date of Patent: November 10, 2015Assignee: Gigaphoton Inc.Inventors: Masaya Yoshino, Takashi Onose, Osamu Wakabayashi
-
Patent number: 9071036Abstract: A laser apparatus may include an optical resonator, a laser chamber, an optical loss adjustment mechanism, and a spectral line width adjustment mechanism. The optical resonator includes a mirror configured to reflect a part of light and a grating. The laser chamber is provided in the optical resonator and contains a laser gain medium, configured to emit a laser beam. The optical loss adjustment mechanism is provided in the optical resonator and configured to adjust an optical loss of the laser beam. The spectral line width adjustment mechanism is provided in the optical resonator and configured to adjust a spectral line width of the laser beam.Type: GrantFiled: May 16, 2013Date of Patent: June 30, 2015Assignee: GIGAPHOTON, INC.Inventors: Takahito Kumazaki, Takashi Onose, Osamu Wakabayashi
-
Patent number: 8989225Abstract: A laser apparatus includes a master oscillator capable of outputting a laser beam having a spectrum that includes at least three wavelength peaks, a multi-wavelength oscillation control mechanism capable of controlling energy of each of the wavelength peaks, a spectrum detecting unit that detects the spectrum of the above-mentioned laser beam, and a controller that controls the multi-wavelength oscillation control mechanism based on a detection result detected by the spectrum detecting unit.Type: GrantFiled: August 21, 2012Date of Patent: March 24, 2015Assignee: Gigaphoton Inc.Inventors: Kouji Kakizaki, Shinji Okazaki, Osamu Wakabayashi, Takashi Onose, Shinichi Matsumoto
-
Patent number: 8934510Abstract: A wavelength converter may include a non-linear optical crystal, and an optical member bonded to a region of a contact surface of the non-linear optical crystal, located a predetermined distance or more on an inner side from an outer periphery of the contact surface. The wavelength converter may receive laser light and stably output light having a wavelength different from that of the laser light.Type: GrantFiled: December 11, 2012Date of Patent: January 13, 2015Assignee: Gigaphoton Inc.Inventors: Kouji Kakizaki, Takashi Onose, Hideo Hoshino
-
Publication number: 20140341239Abstract: A laser system may include: a master oscillator configured to output pulsed laser light; an amplification device for amplifying the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the master oscillator outputs the pulsed laser light; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device.Type: ApplicationFiled: June 6, 2014Publication date: November 20, 2014Applicant: GIGAPHOTON INC.Inventors: Masaya Yoshino, Takashi Onose, Osamu Wakabayashi
-
Patent number: 8861558Abstract: A laser system may include: a master oscillator configured to output pulsed laser light; an amplification device for amplifying the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the master oscillator outputs the pulsed laser light; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device.Type: GrantFiled: March 22, 2012Date of Patent: October 14, 2014Assignee: Gigaphoton, Inc.Inventors: Masaya Yoshino, Takashi Onose, Osamu Wakabayashi
-
Patent number: 8675700Abstract: A laser system in this disclosure may include: a master oscillator configured to output pulsed laser light, a coherence reduction optical system configured to reduce coherence of the pulsed laser light from the master oscillator, and a controller configured to control the coherence reduction optical system so that a speckle of the pulsed laser light varies.Type: GrantFiled: March 22, 2012Date of Patent: March 18, 2014Assignee: Gigaphoton, Inc.Inventors: Shuntaro Watanabe, Takashi Onose, Osamu Wakabayashi
-
Patent number: 8634441Abstract: A master oscillator may include: a pumping laser that outputs pumping light; a seed laser that is oscillated by the pumping light; an amplifier that amplifies the pulsed laser light outputted by the seed laser using the pumping light; at least one optical shutter disposed in the optical path between the seed laser and the amplifier; and a controller that causes the pumping laser to oscillate continuously at a predetermined repetition rate and that controls the optical shutter to open and close.Type: GrantFiled: March 15, 2012Date of Patent: January 21, 2014Assignee: Gigaphoton Inc.Inventors: Takashi Onose, Shinji Ito
-
Patent number: 8625645Abstract: A solid-state laser apparatus may include: a master oscillator configured to output laser light having at least one longitudinal mode, the master oscillator being capable of changing the spectral linewidth of the laser light output therefrom; at least one amplifier located downstream of the master oscillator on an optical path; a wavelength converter located downstream of the amplifier on the optical path; a detector configured to detect the spectrum of the laser light; and a controller configured to control the spectral linewidth of the laser light output from the master oscillator based on a detection result of the detector.Type: GrantFiled: November 8, 2012Date of Patent: January 7, 2014Assignee: Gigaphoton Inc.Inventors: Osamu Wakabayashi, Takashi Onose, Shinji Ito
-
Publication number: 20130315270Abstract: A laser apparatus may include an optical resonator, a laser chamber, an optical loss adjustment mechanism, and a spectral line width adjustment mechanism. The optical resonator includes a mirror configured to reflect a part of light and a grating. The laser chamber is provided in the optical resonator and contains a laser gain medium, configured to emit a laser beam. The optical loss adjustment mechanism is provided in the optical resonator and configured to adjust an optical loss of the laser beam. The spectral line width adjustment mechanism is provided in the optical resonator and configured to adjust a spectral line width of the laser beam.Type: ApplicationFiled: May 16, 2013Publication date: November 28, 2013Applicant: Gigaphoton Inc.Inventors: Takahito KUMAZAKI, Takashi Onose, Osamu Wakabayashi
-
Patent number: 8587863Abstract: A wavelength conversion device may include a wavelength conversion element that converts an entering first laser beam into a second laser beam by wavelength conversion, and a cooling mechanism that cools the wavelength conversion element from at least one surface of the wavelength conversion element.Type: GrantFiled: August 7, 2012Date of Patent: November 19, 2013Assignee: Gigaphoton Inc.Inventors: Osamu Wakabayashi, Takashi Onose
-
Publication number: 20130279526Abstract: A laser apparatus may include a first laser light source configured to emit light with a first wavelength, a second laser light source including a titanium-sapphire laser device and a plurality of wavelength conversion elements and being configured to emit light with a second wavelength being one-fourth of a wavelength of light emitted from the titanium-sapphire laser device, and a wavelength conversion element configured in such a manner that the light with the first wavelength and the light with the second wavelength are incident thereon to emit light with a wavelength of about 193 nm corresponding to a sub frequency of the light with the first wavelength and the light with the second wavelength.Type: ApplicationFiled: April 16, 2013Publication date: October 24, 2013Applicant: Gigaphoton Inc.Inventors: Kouji KAKIZAKI, Takashi Onose, Shinji Ito
-
Publication number: 20130215916Abstract: A laser apparatus includes a master oscillator capable of outputting a laser beam having a spectrum that includes at least three wavelength peaks, a multi-wavelength oscillation control mechanism capable of controlling energy of each of the wavelength peaks, a spectrum detecting unit that detects the spectrum of the above-mentioned laser beam, and a controller that controls the multi-wavelength oscillation control mechanism based on a detection result detected by the spectrum detecting unit.Type: ApplicationFiled: August 21, 2012Publication date: August 22, 2013Applicant: Gigaphoton Inc.Inventors: Kouji KAKIZAKI, Shinji OKAZAKI, Osamu WAKABAYASHI, Takashi ONOSE, Shinichi MATSUMOTO
-
Patent number: 8514899Abstract: A laser system may include a master oscillator that outputs pulsed laser light, an amplification device that amplifies the pulsed laser light outputted from the master oscillator, and a controller that controls the master oscillator and the amplification device. The master oscillator may have a pumping laser that outputs pumping light, a seed laser that is oscillated by the pumping light, an amplifier that amplifies the pulsed laser light outputted by the seed laser using the pumping light, and at least one optical shutter disposed in the optical path between the seed laser and the amplifier. The controller may control the opening and closing of the optical shutter and discharging of the amplification device so that the amplification device discharges when the pulsed laser light that has passed through the optical shutter passes through the amplification device.Type: GrantFiled: March 14, 2012Date of Patent: August 20, 2013Assignee: Gigaphoton Inc.Inventor: Takashi Onose
-
Publication number: 20130039372Abstract: A wavelength conversion device may include a wavelength conversion element that converts an entering first laser beam into a second laser beam by wavelength conversion, and a cooling mechanism that cools the wavelength conversion element from at least one surface of the wavelength conversion element.Type: ApplicationFiled: August 7, 2012Publication date: February 14, 2013Applicant: Gigaphoton Inc.Inventors: Osamu Wakabayashi, Takashi Onose
-
Publication number: 20120250710Abstract: A laser system may include: a master oscillator configured to output pulsed laser light; an amplification device for amplifying the pulsed laser light from the master oscillator; a first timing detector configured to detect a first timing at which the master oscillator outputs the pulsed laser light; a second timing detector configured to detect a second timing at which the amplification device discharges; and a controller configured to, based on results of detection by the first timing detector and the second timing detector, control at least one of the first timing and the second timing so that the amplification device discharges when the pulsed laser light passes through a discharge space of the amplification device.Type: ApplicationFiled: March 22, 2012Publication date: October 4, 2012Applicant: GIGAPHOTON INC.Inventors: Masaya YOSHINO, Takashi ONOSE, Osamu WAKABAYASHI
-
Publication number: 20120250708Abstract: A laser system may include a master oscillator that outputs pulsed laser light, an amplification device that amplifies the pulsed laser light outputted from the master oscillator, and a controller that controls the master oscillator and the amplification device. The master oscillator may have a pumping laser that outputs pumping light, a seed laser that is oscillated by the pumping light, an amplifier that amplifies the pulsed laser light outputted by the seed laser using the pumping light, and at least one optical shutter disposed in the optical path between the seed laser and the amplifier. The controller may control the opening and closing of the optical shutter and discharging of the amplification device so that the amplification device discharges when the pulsed laser light that has passed through the optical shutter passes through the amplification device.Type: ApplicationFiled: March 14, 2012Publication date: October 4, 2012Applicant: GIGAPHOTON INC.Inventor: Takashi ONOSE
-
Publication number: 20120250709Abstract: A laser system in this disclosure may include: a master oscillator configured to output pulsed laser light, a coherence reduction optical system configured to reduce coherence of the pulsed laser light from the master oscillator, and a controller configured to control the coherence reduction optical system so that a speckle of the pulsed laser light varies.Type: ApplicationFiled: March 22, 2012Publication date: October 4, 2012Applicant: Gigaphoton Inc.Inventors: Shuntaro WATANABE, Takashi ONOSE, Osamu WAKABAYASHI