Abstract: A separating apparatus includes a notch device configured to form a notch by inserting a sharp member into a side surface located most adjacent to a separation start point; a first holder including a start point side attraction member and a start point side elevating mechanism; a second holder configured to attract and hold a second substrate; a detection device; and a controller configured to form the notch in the side surface, and lower the start point side attraction member to attract it to a first substrate. The controller moves the start point side attraction member from a standby position to a speed-change position at a first speed; moves the start point side attraction member from the speed-change position to be close to the first substrate at a second speed; and stops the start point side attraction member when it is determined that the first substrate is attracted.

Abstract: A delamination method for delaminating a laminated substrate which includes a first and a second substrates bonded to each other, includes: adjusting a position of the laminated substrate at a holding unit by a position adjusting unit and disposing the holding unit at a predetermined height position; disposing a sharp member of a delamination inducing unit at a predetermined height position; detecting a contact of the sharp member by bringing the sharp member into contact with a side surface of one end portion of the laminated substrate; inserting the sharp member into the side surface of the one end portion of the laminated substrate; and delaminating the second substrate from the first substrate by a plurality of suction movement units which sucks the second substrate of the laminated substrate to move the second substrate away from the first substrate.

Abstract: A cleaning method that peels off an overlapped substrate and cleans a bonding surface of a peeled substrate to be processed, the overlapped substrate including the substrate to be processed and a support substrate bonded together with a protectant, a peeling agent and an adhesive stacked in order therebetween from the substrate to be processed, the cleaning method comprising: removing the protectant by supplying a solvent of the protectant from a solvent supply part to the bonding surface of the substrate to be processed; and removing the peeling agent by absorbing the peeling agent, which has been peeled from the bonding surface of the substrate to be processed, using a peeling agent absorption part.

Abstract: An electronic learning aid includes a circuit for automatically developing problems, a display for displaying the problems, an input for introducing a calculated answer, and a determination circuit for detecting whether the introduced answer is correct. The display includes a first display unit of plural digits for displaying the problems, and a second display unit of plural digits for displaying the problem number, the score, the correct answer number, and the exercise number.

Abstract: An electronic learning aid is disclosed, which automatically develops and displays problems, and functions to compare an answer introduced by a student with a correct answer stored in the electronic learning aid. A mode selection switch is provided for selectively placing the electronic learning aid in an exercise mode and in an examination (test) mode. In the exercise mode, a symbol display is energized for displaying information as to whether the introduced answer is correct or not upon every introduction of the answer by the student. In the examination (test) mode, the symbol display is not conducted, and a percentage score is displayed after completion of a series of problems.