Abstract: A deterioration prediction system for a semiconductor manufacturing equipment or a semiconductor inspection equipment, including: an input device receiving, as an input, time series data indicating a state of the equipment; a deterioration prediction device having an estimation unit discriminating fluctuation in the time series data into fluctuation caused by changing setting of the equipment and fluctuation caused by deterioration of the equipment and estimating a time point when the setting is changed, a division unit dividing the time series data into the plurality of periods bounded by the time points, a discrimination unit discriminating at least a trend component from the fluctuation in the time series data in the period, and a prediction unit predicting the deterioration of the equipment based on at least the trend component; and an output device outputting a result of the prediction.

Abstract: An embodiment of this invention provides a swivel joint for a working machine that makes it easy to install a device for detecting rotation angle and is able to suppress the increase of the size due to the installation of the device.

Abstract: An embodiment of this invention provides a swivel joint for a working machine that makes it easy to install a device for detecting rotation angle and is able to suppress the increase of the size due to the installation of the device.

Abstract: An exhaust pipe through which an exhaust port of an internal combustion engine and a catalyst for purifying an exhaust gas of the internal combustion engine are connected to each other includes a porous portion that is provided on at least a part of an inner peripheral face of the exhaust pipe. A thermal conductivity that the porous portion exhibits in a high temperature state where a temperature of the exhaust gas is as high as it is required to radiate a heat of the exhaust gas through the exhaust pipe is at least ten times higher than a thermal conductivity that the porous portion exhibits in a low temperature state where the temperature of the exhaust gas is as low as it is required to warm the catalyst up.

Abstract: A silica structure includes mesoporous silica spheres; and connection portions each of which includes metal oxide, and each of which connects the mesoporous silica spheres to each other.

Abstract: An exhaust pipe through which an exhaust port of an internal combustion engine and a catalyst for purifying an exhaust gas of the internal combustion engine are connected to each other includes a porous portion that is provided on at least a part of an inner peripheral face of the exhaust pipe. A thermal conductivity that the porous portion exhibits in a high temperature state where a temperature of the exhaust gas is as high as it is required to radiate a heat of the exhaust gas through the exhaust pipe is at least ten times higher than a thermal conductivity that the porous portion exhibits in a low temperature state where the temperature of the exhaust gas is as low as it is required to warm the catalyst up.

Abstract: A silica structure includes mesoporous silica spheres; and connection portions each of which includes metal oxide, and each of which connects the mesoporous silica spheres to each other.

Abstract: In an engine 10, oxygen, hydrogen serving as fuel, and argon gas serving as a working gas are supplied to a combustion chamber 21. An upstream condenser section 70 condenses water vapor contained in an exhaust gas to yield primary condensed water, through heat exchange of the exhaust gas from the combustion chamber with the ambient air, and discharges, as a primary-condensed-water-separated gas, a gas obtained by separating the primary condensed water from the exhaust gas. The primary condensed water is stored in a water storage tank 100. A downstream condenser section 80 further condenses water vapor contained in the primary-condensed-water-separated gas to yield secondary condensed water, through utilization of latent heat of vaporization of condensed water stored in the storage tank 100, and discharges a gas obtained by separating the secondary condensed water from the primary-condensed-water-separated gas. This avoids a significant drop in ratio of specific heats of the working gas.

Abstract: In an engine 10, oxygen, hydrogen serving as fuel, and argon gas serving as a working gas are supplied to a combustion chamber 21. An upstream condenser section 70 condenses water vapor contained in an exhaust gas to yield primary condensed water, through heat exchange of the exhaust gas from the combustion chamber with the ambient air, and discharges, as a primary-condensed-water-separated gas, a gas obtained by separating the primary condensed water from the exhaust gas. The primary condensed water is stored in a water storage tank 100. A downstream condenser section 80 further condenses water vapor contained in the primary-condensed-water-separated gas to yield secondary condensed water, through utilization of latent heat of vaporization of condensed water stored in the storage tank 100, and discharges a gas obtained by separating the secondary condensed water from the primary-condensed-water-separated gas. This avoids a significant drop in ratio of specific heats of the working gas.