Abstract: A high-density recording scanning microscope in which a beam of charged particles finely focused scans the surface of a sample at a high density of, at least, 8,000 scannings, a signal thus detected is converted into a digital signal, and the digital signal is used for directly printing an image of high definition, high gradation and wide view. The signal of a scanning image at a very high density of, at least, 8,000 pixels×8,000 pixels in a scanning electron microscope, is converted into a digital signal, for example, a color image, and the image is directly printed, thereby to realize the observation of a very clear image of high definition, high gradation and wide view having hitherto been nonexistent.

Abstract: A scanning electron microscope or other type of scanning electron device incorporating a light pen for automatically changing the field of view of a specimen on a CRT. The output of said light pen controls the center and/or width of the scanning area of the incident electron beam irradiating the specimen when said light pen is directed towards a certain point in the initial specimen field of view on the CRT, thereby displaying said point at the center of the changed field of view on the CRT.