Abstract: The present invention provides processes and equipments for safely and easily preparing an F2-containing gas, as well as processes and equipments for surface modification using the F2-containing gas prepared. According to the present invention, a gas containing a fluoro compound that is easier to handle than F2 is supplied and the fluoro compound is excited and decomposed to convert it into F2 gas before surface modification and then used for surface modification. According to the present invention, there is no necessity of providing, storing and transporting a large amount of F2 gas in advance because a necessary amount of F2 gas is obtained immediately before surface modification.

Abstract: Apparatus for safely and easily preparing an F2-containing gas including equipment for handling a gas containing a fluoro compound that is easier to handle than F2, and in which the fluoro compound is excited and decomposed to convert it into F2 gas before surface modification and then used for surface modification. There is no necessity of providing, storing and transporting a large amount of F2 gas in advance because a necessary amount of F2 gas is obtained immediately before surface modification.

Abstract: Provided is a cleaning method for removing a film adhered inside a processing chamber of a substrate processing apparatus used for forming a desired film on a substrate by supplying a material gas for film formation. The method is provided with a step of supplying a halogen containing gas into the processing chamber, and a step of supplying a fluorine containing gas into the processing chamber while supplying the halogen containing gas, after starting to supply the halogen containing gas. In the step of supplying the fluorine containing gas, a supply flow volume ratio of the halogen containing gas to the entire gas supplied into the processing chamber is within a range of 20-25%.

Abstract: The present invention provides processes and equipments for safely and easily preparing an F2-containing gas, as well as processes and equipments for surface modification using the F2-containing gas prepared. According to the present invention, a gas containing a fluoro compound that is easier to handle than F2 is supplied and the fluoro compound is excited and decomposed to convert it into F2 gas before surface modification and then used for surface modification. According to the present invention, there is no necessity of providing, storing and transporting a large amount of F2 gas in advance because a necessary amount of F2 gas is obtained immediately before surface modification.

Abstract: An ozonized water generating device in which an inside of a casing is defined by a solid electrolyte film into an anode chamber and a cathode chamber. An anode electrode made of noble metal having an ozone generating catalyst function is arranged to be impressed against the solid electrolyte film at the anode chamber, a cathode electrode is arranged to be impressed against the solid electrolyte film at the cathode chamber, respectively. Each of the anode chamber and the cathode chamber is provided with a raw water flow inlet port and an electrolyzed water flow outlet port, and a DC voltage is applied between the anode electrode and the cathode electrode, wherein either one of or both the anode electrode and the cathode electrode are arranged in such a way that they can be impressed against and separated from the solid electrolyte film by a movable driving piece.

Abstract: The invention provides an ozone generator controlling apparatus capable of controlling an ozone generator so that when a discharge breakdown occurs in some discharge element, the operation of generating ozone can be continued without imposing a bad influence on the remaining normal discharge elements. When an anomaly occurs in one of or a plurality of discharge elements during the operation of generating ozone, the anomaly is detected by an anomaly detection means. In response to the detection of the anomaly, first output control means reduces the output of an AC power supply circuit to a sufficiently low level so that after the discharge element having the anomaly is isolated from the circuit the operation of generating ozone can be continued with the remaining normal discharge elements without interruption and without causing the normal discharge elements to encounter an overload current thus preventing them from being broken one after another.

Abstract: An ozonizer in which a pair of plate-like electrode plates are arranged opposite to each other so as to form a discharge space therebetween, and ceramic dielectric layers are arranged on the surface on the side of the discharge space of said electrode plates, wherein a plate-like anode 4 is arranged between the dielectrics 31 and 32, extreme ends 41 and 42 having sharp extreme ends of a number of protrusions are formed on both surfaces of the anode 4, the anode 4 is arranged between the dielectrics 41 and 42 in a state where the extreme ends 41 and 42 are in contact with the surfaces of the dielectrics 31 and 32 on both sides, the anode 4 is formed with a number of through-holes extending through both surfaces, and the anode being formed of expanded metal.

Abstract: An ozone production apparatus for increasing ozone generation efficiency by improving ceramic plate cooling efficiency. An ozonizer of this invention has a steel plate shaped body for use as a discharge electrode through which gas is permeable from one surface to another. This discharge electrode is faced on both sides by two ceramic plates, with a material gas flow inlet provided on one side and an ozone flow outlet on the other side. The ozonizer unit is provided with an insulated waterproof cable for applying a high voltage to the discharge electrode. This ozonizer unit is submerged inside a cooling water tank, and a high voltage, high frequency power supply unit is connected between the discharge electrode and the cooling water, with the cooling water tank as the grounded side. In this manner, since the ozonizer unit is submerged inside the cooling water tank, the cooling efficiency is improved and the ozone generation increased.

Abstract: A cyclone separator with an influent guide blade at the inlet thereof, the guide blade being so shaped and positioned so as to suppress the pressure loss of the cyclone while at the same time improving its separation efficiency. The influent guide blade has a width of 0.1 to 0.5 in dimensional ratio to the radius of the straight cylindrical portion of the cyclone and is located at a position lower than the ceiling wall surface of an inlet duct by a distance of 0.05 to 0.5 in dimensional ratio to the height of the inlet duct.