Patents by Inventor Takashi Tsuchimoto

Takashi Tsuchimoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processor
    Patent number: 4123316
    Abstract: A plasma processor comprising a plasma generating chamber which has a plasma outflow port, an evacuated plasma processing chamber which receives therein a member to be processed, such as a semiconductor substrate, and coaxial magnet means to form coaxial magnetic fields for transporting plasma from the plasma outflow port of the plasma generating chamber to the member to be processed, the distance between the plasma outflow port and the member to be processed being made shorter than the mean free path of gas remaining in the plasma processing chamber.
    Type: Grant
    Filed: October 6, 1976
    Date of Patent: October 31, 1978
    Assignee: Hitachi, Ltd.
    Inventor: Takashi Tsuchimoto