Abstract: A high-frequency heating apparatus according to an embodiment of the present disclosure includes a heating chamber, an electrode, a high-frequency power supply, at least one matching element, and a controller. The heating chamber accommodates a heating target. The high-frequency power supply applies a high-frequency voltage to the electrode. The impedance matcher includes at least one matching element having a matching constant that is variable. The controller stops the high-frequency power supply to complete heating based on a temporal change of the matching constant of the at least one matching element. In this embodiment, a heating target can be heated efficiently.

Abstract: A substrate processing apparatus configured to process a combined substrate in which a first substrate having thereon a device layer and a second substrate are bonded to each other includes a holder configured to hold a rear surface of the second substrate; a processing unit configured to process the first substrate held by the holder; a first processing liquid supply configured to etch a front surface of the first substrate by supplying a first processing liquid to the front surface of the first substrate opposite to a surface thereof where the device layer is provided; and a second processing liquid supply configured to remove a metal contaminant on the rear surface of the second substrate by supplying a second processing liquid to the rear surface of the second substrate.

Abstract: A microwave treatment device comprises a heating chamber for accommodating a heating target, a microwave generator, a feeder, a detector, and a controller. The microwave generator generates a microwave having a frequency in a specified frequency band. The feeder radiates the microwave inside the heating chamber. The detector detects a reflected microwave power reflected from the heating chamber. The controller causes the microwave generator to execute a frequency sweeping in the specified frequency band. The controller also controls the microwave generator according to a temporal change in a frequency characteristic of the reflected microwave power. The temporal change in the frequency characteristic of the reflected microwave power is based on the frequency of the microwave, a level of the reflected microwave power, and a time passed from a start of heating. In this aspect, it is possible to accurately recognizes the progress of cooking while heating the object.

Abstract: A high-frequency heating apparatus according to the present disclosure includes a first electrode (11), a second electrode (12), a high-frequency power supply (30), a position adjuster (20), a detector (50), and a controller (60). The second electrode (12) is disposed facing the first electrode. The high-frequency power supply (30) supplies a high-frequency power to the first electrode. The position adjuster (20) adjusts a distance between the first electrode (11) and the second electrode (12). The detector (50) detects a reflected power from the first electrode (11) toward the high-frequency power supply (30). The controller (60) controls the position adjuster (20) based on the reflected power. In this embodiment, a heating target can be heated efficiently.

Abstract: A high frequency heating apparatus of the present disclosure includes a first electrode (11), a second electrode (12), a high frequency power supply, a position adjuster (20), and a controller. The second electrode (12) is disposed facing the first electrode (11). The high frequency power supply supplies high frequency power to the first electrode (11) or the second electrode (12). The position adjuster (20) adjusts the position of the first electrode (11). The controller controls the position adjuster (20). The position adjuster (20) includes a weight (21), one or more connecting lines (22), one or more pulleys (23), and one or more drive units (24). The one or more connecting lines (22) connect the weight (21) and the first electrode (11). The one or more pulleys (23) support the one or more connecting lines (22). The one or more drive units (24) are attached to the one or more pulleys (23) and drive the one or more pulleys (23). In this embodiment, a heating target can be heated efficiently.

Abstract: A microwave heating device includes the following components: a heating chamber for accommodating a heating target object, a microwave generator that generates a microwave, and a coaxial connector. The coaxial connector includes a center conductor, an insulator, and an external conductor. The center conductor is connected to the output terminal of the microwave generator. The coaxial connector includes an air gap between the center conductor and the insulator. This aspect can reduce the occurrence of cracking of the soldered joint between the microwave generator and the coaxial connector.

Abstract: A substrate processing method according to an embodiment of the present disclosure includes a step of holding a substrate by a substrate holding unit (31) which is rotatable, a step of arranging a top plate portion (41) above the substrate, a step of supplying a processing liquid to the substrate, and a step of supplying a rinsing liquid (Lr) between the substrate and the top plate portion (41) to wash the substrate and the top plate portion (41) with the rinsing liquid (Lr).

Abstract: A substrate processing system configured to process a substrate includes a first modifying apparatus configured to form, in a combined substrate in which a front surface of a first substrate and a front surface of a second substrate are bonded to each other, an internal modification layer elongated within the first substrate in a plane direction from a center of the first substrate toward at least an edge portion of the first substrate as a removing target; a second modifying apparatus configured to form, within the first substrate, an edge modification layer elongated in a thickness direction of the first substrate along a boundary between the edge portion and a central portion of the first substrate; and a separating apparatus configured to separate a portion of the first substrate at a rear surface side, starting from the internal modification layer.

Abstract: An RF energy radiation device includes a cavity in which a heating target object is to be placed, an RF signal generation unit, an RF amplifier, a radiation element, a temperature sensor, and a controller. The RF signal generation unit oscillates an RF signal. The RF amplifier amplifies the RF signal and provides RF energy. The radiation element radiates the RF energy into the cavity. The temperature sensor is disposed in the vicinity of the RF amplifier. The controller controls the RF amplifier so that the RF amplifier adjusts the RF energy output in accordance with the temperature detected by the temperature sensor and a plurality of threshold levels. This aspect can improve the reliability of the device.

Abstract: A high-frequency heating apparatus includes: a heating chamber for accommodating a load; a microwave source; at least one radiator; a temperature detector; and a controller. The microwave source generates a microwave and adjusts the frequency and output of the microwave. The at least one radiator radiates a microwave into the heating chamber. The temperature detector detects the temperature in the heating chamber. The controller causes the microwave source to adjust the output of the microwave based on the temperature profile that defines the temperature change in the load, and the temperature in the heating chamber. According to this aspect, food can be heated in accordance with the temperature profile appropriate for the cooking recipe, thereby ensuring the quality of cooked food.

Abstract: A high frequency heating apparatus (1A) includes the following components: a first electrode (11) that is flat; a plurality of flat second electrodes (12) that are flat; a high-frequency power supply (20); a matching unit (30); a controller (40); and an electric field regulator (50). The second electrodes (12) are placed opposite to the first electrode (11). The high-frequency power supply (20) applies a high-frequency voltage to the first electrode (11). The matching unit (30) is placed between the first electrode (11) and the high-frequency power supply (20), and is impedance-matched with the high-frequency power supply (20). The controller (40) controls the high-frequency power supply (20). The electric field regulator (50) individually adjusts the electric field strengths in a plurality of regions located between first electrode (11) and the second electrodes (12). This aspect can reduce uneven heating.

Abstract: Provided is a variable displacement pump which sucks and discharges a working fluid by moving a piston with a stroke in response to an inclination angle of a swash plate, the variable displacement pump including: a control piston which includes a columnar piston portion pressing the swash plate and adjusts the inclination angle of the swash plate between a maximal inclination angle in which a discharge capacity of the working fluid becomes maximal and a minimal inclination angle in which the discharge capacity of the working fluid becomes minimal; a piston accommodation portion which is formed in the housing and accommodates the piston portion; and a pressed portion which is disposed between the swash plate and the piston portion and is pressed toward the swash plate by the piston portion, in which when the inclination angle of the swash plate is an intermediate inclination angle in which the discharge capacity of the working fluid becomes an intermediate amount between the maximal amount and the minimal amou

Abstract: The present invention provides a process for producing a polymer film at high productivity: during a process for drying gripped portions of both edges of a gel film, a first heat treatment is performed by blowing hot air in the film width direction and a second heat treatment is performed by blowing hot air at gripped portions of both edges of the gel film in a direction parallel to the film running direction.

Abstract: A hydraulic drive device for an industrial vehicle includes a variable displacement pump, a displacement control valve, a power steering cylinder, a power steering valve, a loading cylinder, a loading valve, a hydraulic oil passage, and a pilot line. The displacement control valve controls the variable displacement pump to increase displacement of the variable displacement pump when differential pressure between discharge pressure of hydraulic oil discharged from the variable displacement pump and pilot pressure generated in the pilot line is smaller than a predetermined set pressure. A spool of the loading valve is provided with a groove portion that forms a communication passage that makes communication between the hydraulic oil passage and the pilot line at a neutral position of the loading valve when the power steering valve is located in a neutral position.

Abstract: A variable displacement swash plate type piston pump includes first and second housing members fastened to each other by fastening members, a rotary shaft, a swash plate. A section of the inner circumferential surface of the first housing member has a recess. A bulging portion is arranged in a section of the outer circumferential wall of the first housing member. A section of the outer circumferential wall of the second housing member has a closing portion that closes the opening of the recess. The fastening members include first and second fastening members arranged at positions that are on the opposite sides of the recess, inside the width of the swash plate in a direction along the inclination axis of the swash plate, and closer to the rotary shaft than the distal ends of the bulging portion and the closing portion in the bulging direction.

Abstract: Provided is a variable displacement pump which includes a cylinder block including a plurality of cylinder bores formed in a rotation shaft in a circumferential direction and rotating together with the rotation shaft, a piston provided inside each of the plurality of cylinder bores to be slidable, and a swash plate supported to be tiltable with respect to the rotation shaft while a distal end portion of the piston is slidable thereon and which sucks and discharges a working fluid by moving the piston in a reciprocating manner with a stroke in accordance with an inclination angle of the swash plate, the variable displacement pump including: a control piston which includes a piston portion pressing the swash plate and controls the inclination angle of the swash plate; a piston accommodation portion which is formed in the housing and accommodates the piston portion; and a hollow cylindrical guide portion which is disposed between the piston accommodation portion and the piston portion and includes an inner perip

Abstract: A hydraulic control device of a forklift truck includes a first hydraulic cylinder, a first instructing member, a second hydraulic cylinder, a second instructing member, a hydraulic pump, an electric motor, a first oil passage, a lowering control valve, a second oil passage that is branched from the first oil passage at a junction, a flow control valve, a first pilot passage through which pressure in the first oil passage at a position between the first hydraulic cylinder and the lowering control valve is applied to a first accommodating chamber of the flow control valve as the pressure upstream of the lowering control valve, and a second pilot passage through which pressure in the first oil passage at a position between the lowering control valve and the hydraulic pump is applied to a second accommodating chamber of the flow control valve as the pressure downstream of the lowering control valve.

Abstract: A hydraulic pump having a rotary shaft rotatably supported with respect to a casing, the hydraulic pump including: a bearing part provided to one end side and the other end side of the rotary shaft; and a first annular member provided around the rotary shaft on at least one side of the one end side and the other end side of the rotary shaft. The bearing part on the one side has a support part which rotatably supports the rotary shaft, and a preload applying member which applies a preload in the axial direction to the support part. The first annular member is interposed between the bearing part of the one side and a receiving part of the rotary shaft in the axial direction, and an inner diameter of the first annular member is larger than a diameter of the rotary shaft.

Abstract: A variable displacement swash plate type piston pump includes first and second housing members fastened to each other by fastening members, a rotary shaft, a swash plate. A section of the inner circumferential surface of the first housing member has a recess. A bulging portion is arranged in a section of the outer circumferential wall of the first housing member. A section of the outer circumferential wall of the second housing member has a closing portion that closes the opening of the recess. The fastening members include first and second fastening members arranged at positions that are on the opposite sides of the recess, inside the width of the swash plate in a direction along the inclination axis of the swash plate, and closer to the rotary shaft than the distal ends of the bulging portion and the closing portion in the bulging direction.

Abstract: In a hydraulic driving device for a cargo handling vehicle, a power running torque limit value setting unit sets a power running torque limit value to a minimum rotation speed set in advance, in a case where a determination unit determines that operations of second hydraulic cylinders including a lowering operation of a first operating portion are simultaneously performed, a rotation speed command value setting unit sets a rotation speed command value to a maximum value from between a lowering required rotation speed based on an operation amount of the first operating portion and a second hydraulic cylinder required rotation speed based on operation amounts of the second operating portions, and the power running torque limit value setting unit sets the power running torque limit value to the second hydraulic cylinder required rotation speed based on the operation amounts of the second operating portions, and a control unit controls an electric motor to rotate at a rotation speed based on the rotation speed co