Patents by Inventor Takashi Yokawa

Takashi Yokawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200216961
    Abstract: A processing container including a plasma generation space in which a processing gas is plasma-excited and a substrate processing space communicating with the plasma generation space; a plasma generator including a coil arranged to surround the plasma generation space and provided to be wound around an outer periphery of the processing container, and a high-frequency power source that supplies high-frequency power to the coil; a gas supply section that supplies the processing gas to the plasma generation space; a temperature sensor provided outside the processing container and configured to detect a temperature of the processing container; and a controller configured to perform control to cause the temperature of the processing container detected by the temperature sensor to fall within a range of a target temperature defined by a preset upper limit value and a preset lower limit value, prior to execution of a process recipe for processing a substrate.
    Type: Application
    Filed: March 19, 2020
    Publication date: July 9, 2020
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Makoto NOMURA, Yasuhiro MIZUGUCHI, Kazuhito SAITO, Takashi YOKAWA, Makoto SHIRAKAWA, Masako SUEYOSHI
  • Publication number: 20170011974
    Abstract: A substrate processing apparatus includes a substrate heating part, a power supply part and a control device. The control device measures a temperature of the substrate while controlling the substrate heating part such that the temperature of the substrate reaches a first control temperature higher than the target temperature using power supplied by the power supply part. The device measures the temperature of the substrate for a second control temperature lower than the target temperature, and selects the power ratio value providing the best temperature uniformity in the plane of the substrate and a temperature average value for the selected power ratio value from a result of the measurement. The device calculates a control temperature and the power ratio value for the target temperature based on the selected temperature average value and the power ratio value for each of the first and second control temperature.
    Type: Application
    Filed: September 23, 2016
    Publication date: January 12, 2017
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Takashi YOKAWA, Yasuhiro MIZUGUCHI, Makoto NOMURA, Kazuhito SAITO
  • Patent number: 7344704
    Abstract: The invention relates to the use of perfluoroalkyl-containing metal complexes that have a critical micelle formation concentration <10?3 mol/l, a hydrodynamic micelle diameter (2 Rh)>1 nm and a proton relaxivity in plasma (R1)>10 l/mmol·s as contrast media in MR imaging for visualization of intravascular thrombi.
    Type: Grant
    Filed: July 10, 2003
    Date of Patent: March 18, 2008
    Assignee: Schering AG
    Inventors: Bernd Misselwitz, Johannes Platzek, Yoko Kawata, Hanns-Joachim Weinmann, Takashi Yokawa, Ulrich Niedballa
  • Publication number: 20040131546
    Abstract: The invention relates to the use of perfluoroalkyl-containing metal complexes that have a critical micelle formation concentration <10−3 mol/l, a hydrodynamic micelle diameter (2 Rh)>1 nm and a proton relaxivity in plasma (R)>10 l/mmol s as contrast media in MR imaging for visualization of intravascular thrombi.
    Type: Application
    Filed: July 10, 2003
    Publication date: July 8, 2004
    Applicant: Schering AG
    Inventors: Bernd Misselwitz, Johannes Platzek, Yoko Kawata, Hanns-Joachim Weinmann, Takashi Yokawa, Ulrich Niedballa
  • Patent number: 5833610
    Abstract: A method of magnetic resonance imaging of cerebral blood flow uses a pulse sequence of a rapid gradient-echo method, wherein the pulse is an RF pulse having a slice gradient, a read gradient and a phase-encode gradient. The RF pulse is provided with a flip angle of between 45 and 60 degrees, and an additional gradient is added to each of the slice gradient, read gradient and phase-encode gradient, thereby diffusing and refusing proton spin in the cerebral blood flow. Very slight changes in the blood flow in the brain can be imaged and diabetes can be diagnosed by detecting the increase in the blood flow in a specific brain region after systemic administration of insulin.
    Type: Grant
    Filed: August 14, 1996
    Date of Patent: November 10, 1998
    Assignee: Research Development Corporation of Japan
    Inventors: Takashi Yokawa, Kunio Torii