Patents by Inventor Takashige Suematsu

Takashige Suematsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus, substrate processing method and recording medium
    Patent number: 11257701
    Abstract: A substrate processing apparatus includes a transfer device configured to transfer at least one substrate as a processing target; a transfer controller configured to control the transfer device to perform a normal transfer of transferring the substrate and a high-accuracy transfer of transferring the substrate with higher positioning accuracy as compared to the normal transfer; a warm-up controller configured to control the transfer device to perform a warm-up operation, which is different from the normal transfer and the high-accuracy transfer, when necessary; and a necessity determination unit configured to make a determination that the warm-up operation is required as a beginning of the high-accuracy transfer is approaching when a duration of a stop state of the transfer device exceeds a preset reference time.
    Type: Grant
    Filed: October 4, 2019
    Date of Patent: February 22, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Hidekazu Kiyama, Takehiro Kadokura, Kazutoshi Ishimaru, Takashige Suematsu
  • SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM
    Publication number: 20200111693
    Abstract: A substrate processing apparatus includes a transfer device configured to transfer at least one substrate as a processing target; a transfer controller configured to control the transfer device to perform a normal transfer of transferring the substrate and a high-accuracy transfer of transferring the substrate with higher positioning accuracy as compared to the normal transfer; a warm-up controller configured to control the transfer device to perform a warm-up operation, which is different from the normal transfer and the high-accuracy transfer, when necessary; and a necessity determination unit configured to make a determination that the warm-up operation is required as a beginning of the high-accuracy transfer is approaching when a duration of a stop state of the transfer device exceeds a preset reference time.
    Type: Application
    Filed: October 4, 2019
    Publication date: April 9, 2020
    Inventors: Hidekazu Kiyama, Takehiro Kadokura, Kazutoshi Ishimaru, Takashige Suematsu