Patents by Inventor Takatoshi Nakatani

Takatoshi Nakatani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11994482
    Abstract: The driving device includes a piezoelectric element, a power supply unit, a first resistor, a second resistor, a measuring unit and a control unit, wherein resistance values of the first resistor and the second resistor are smaller than an insulating resistance value of the piezoelectric element, the measuring unit measures, a voltage across the first resistor (voltage between a first terminal and a second terminal), in a state of supplying a predetermined voltage from the power supply unit, and the control unit calculates a resistance value of the piezoelectric element from a voltage value obtained by the measurement of the measuring unit, and determines, whether or not degradation has occurred in the piezoelectric element based on the calculated resistance value.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: May 28, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Katsuyuki Sugita, Takatoshi Nakatani, Kouji Nishino, Nobukazu Ikeda
  • Publication number: 20240167577
    Abstract: A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.
    Type: Application
    Filed: March 8, 2022
    Publication date: May 23, 2024
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Kazuteru TANAKA, Takatoshi NAKATANI, Kazuyuki MORISAKI, Masafumi KITANO, Kaoru HIRATA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11976356
    Abstract: A vaporization supply apparatus 1 includes a preheating section 2 for preheating a liquid raw material L, a vaporization section 3 provided on top of the preheating section 2 for heating and vaporizing the preheated liquid raw material L sent from the preheating section 2, a flow rate control device 4 provided on top of the vaporization section 3 for controlling the flow rate of a gas G sent from the vaporization section 3, and heaters 5 for heating the preheating section 2, the vaporization section 3 and the flow rate control device 4.
    Type: Grant
    Filed: September 3, 2020
    Date of Patent: May 7, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takatoshi Nakatani, Atsushi Hidaka, Ichiro Tokuda, Keisuke Nakatsuji
  • Publication number: 20240094078
    Abstract: The pressure sensor 10 comprises: a bottomed cylindrical sensor module 11 having inside a pressure receiving chamber C1 communicating with a flow path and including a diaphragm 11a in contact with the pressure receiving chamber; a pressure detecting element 12 for outputting a strain of the diaphragm 11a as a pressure; a base ring 14 fixed at an outer edge of an open-side end part 11c of the sensor module and disposed on an outer peripheral side of the sensor module 11; a hermetic member 13 fixed to the base ring 14 for forming a sealed vacuum chamber C2 opposite to the pressure receiving chamber C1 across the diaphragm 11a; a gasket 18 sandwiched between the base ring 14 and a body 5; and a pressing flange 19 for pressing the base ring 14 to the body 5 through the gasket 18.
    Type: Application
    Filed: November 2, 2021
    Publication date: March 21, 2024
    Applicants: FUJIKIN INCORPORATED, NIDEC COPAL ELECTRONICS CORPORATION
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Kaoru HIRATA, Kouji NISHINO, Nobukazu IKEDA, Masaki FUKASAWA
  • Publication number: 20230400114
    Abstract: [Problem] The main purpose of the present invention is to provide a casing for a fluid controller capable of enabling maintenance inside the casing even in a state where the lower part of the casing is fixed to a main body of a fluid controller, and improving maintainability. [Solution] A casing 1 for covering devices 104,106,108 on a main body 101 of a fluid controller 100, the casing 1 is configured so as to be dividable into a plurality of parts, and the plurality of parts comprising a first part 2 provided with a fixing portion 2i for fixing to the main body 101, a second part 4 attached to the first part 2, and a third part 5 attachably and detachably provided at an upper partition higher than a predetermined height position of the casing 1.
    Type: Application
    Filed: October 18, 2021
    Publication date: December 14, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Kazuyuki MORISAKI, Tomokazu HIROTA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20230324008
    Abstract: A gas supply system 100 comprises: a first vaporization supply device 10A including a first vaporization section 12A having a heater, a first valve 14A, and a first supply pressure sensor 16A for measuring a gas pressure between the first vaporization section and the first valve; a second vaporization supply device 10B including a second vaporization section 12B having a heater, a second valve 14B, and a second supply pressure sensor 16B for measuring a gas pressure between the second vaporization section and the second valve; and a control circuit 20. The system is configured to flow a gas from the first vaporization section 10A and a gas from the second vaporization section 10B sequentially into a common flow path, by shifting timings of an opening period of the first valve 14A and an opening period of the second valve 14B.
    Type: Application
    Filed: October 5, 2021
    Publication date: October 12, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Takatoshi NAKATANI, Atsushi HIDAKA, Kazuyuki MORISAKI, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11768123
    Abstract: A pressure sensor includes a cylindrical member configured to be attached to a body having a fluid passage, and a pressure sensor unit connected to the cylindrical member for detecting a pressure of a fluid flowing through the fluid passage, wherein the cylindrical member is made of a nickel-molybdenum-chromium alloy material or a stainless steel material, wherein the pressure sensor unit includes a sensor body closed at one end with a diaphragm and a pressure detecting element for outputting displacement of the diaphragm as pressure, and wherein the sensor body is made of a cobalt-nickel alloy material, and is connected at an opening side end portion to one end portion of the cylindrical member.
    Type: Grant
    Filed: October 2, 2019
    Date of Patent: September 26, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Takatoshi Nakatani, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi
  • Publication number: 20230296464
    Abstract: A cover component 3 is used for a pressure sensor 1 that is fixed to a mounting surface 5S of a body 5 with a flow path F1 formed therein, and that has protrudes protruding from the mounting surface 5S, the cover component comprising a hollow member 3a having an inner peripheral surface facing a side surface of the protruding portion of the pressure sensor 1, and a cover member 3b fixed to the hollow member 3a and covering the protruding portion of the pressure sensor 1.
    Type: Application
    Filed: September 14, 2021
    Publication date: September 21, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Tomokazu HIROTA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20230152263
    Abstract: To provide a driving device including a piezoelectric element deterioration detection circuit and a deterioration detection method that enable detection of deterioration of the piezoelectric element used in the driving device, without stopping a normal operation of the driving device.
    Type: Application
    Filed: April 20, 2020
    Publication date: May 18, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Katsuyuki SUGITA, Takatoshi NAKATANI, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20230121563
    Abstract: A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.
    Type: Application
    Filed: March 18, 2021
    Publication date: April 20, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Takatoshi NAKATANI, Atsushi HIDAKA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20220403508
    Abstract: A vaporization supply apparatus 1 includes a preheating section 2 for preheating a liquid raw material L, a vaporization section 3 provided on top of the preheating section 2 for heating and vaporizing the preheated liquid raw material L sent from the preheating section 2, a flow rate control device 4 provided on top of the vaporization section 3 for controlling the flow rate of a gas G sent from the vaporization section 3, and heaters 5 for heating the preheating section 2, the vaporization section 3 and the flow rate control device 4.
    Type: Application
    Filed: September 3, 2020
    Publication date: December 22, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Takatoshi NAKATANI, Atsushi HIDAKA, Ichiro TOKUDA, Keisuke NAKATSUJI
  • Patent number: 11402250
    Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: August 2, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Takatoshi Nakatani, Satoru Yamashita, Katsuyuki Sugita, Kaoru Hirata, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11390951
    Abstract: In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device (100) comprises a plurality of fluid heating sections (1) connected to each other and each having a flow path or a fluid accommodating portion inside, heaters (10) configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (13, 13?) disposed between adjacent fluid heating sections.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: July 19, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Takatoshi Nakatani, Keisuke Nakatsuji, Keiji Hirao, Yukio Minami, Nobukazu Ikeda
  • Publication number: 20210356346
    Abstract: A pressure sensor includes a cylindrical member configured to be attached to a body having a fluid passage, and a pressure sensor unit connected to the cylindrical member for detecting a pressure of a fluid flowing through the fluid passage, wherein the cylindrical member is made of a nickel-molybdenum-chromium alloy material or a stainless steel material, wherein the pressure sensor unit includes a sensor body closed at one end with a diaphragm and a pressure detecting element for outputting displacement of the diaphragm as pressure, and wherein the sensor body is made of a cobalt-nickel alloy material, and is connected at an opening side end portion to one end portion of the cylindrical member.
    Type: Application
    Filed: October 2, 2019
    Publication date: November 18, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Nobukazu IKEDA, Kouji NISHINO, Ryousuke DOHI
  • Publication number: 20200199753
    Abstract: In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device (100) comprises a plurality of fluid heating sections (1) connected to each other and each having a flow path or a fluid accommodating portion inside, heaters (10) configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (13, 13?) disposed between adjacent fluid heating sections.
    Type: Application
    Filed: July 20, 2018
    Publication date: June 25, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Keisuke NAKATSUJI, Keiji HIRAO, Yukio MINAMI, Nobukazu IKEDA
  • Publication number: 20200149162
    Abstract: In order to optimally supply a raw material by using a heater, the fluid control device (100) includes a fluid heating section (1) provided with a flow path or a fluid accommodation portion inside, and a heater (10) for heating the fluid heating section, the heater having a heating element (10a) and a metallic heat transfer member (10b) thermally connected to the heating element and arranged so as to surround the fluid heating section, and the surface of the heat transfer member facing the fluid heating section includes a surface (S1) subjected to surface treatment for improving heat dissipation.
    Type: Application
    Filed: July 20, 2018
    Publication date: May 14, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Keisuke NAKATSUJI, Keiji HIRAO, Yukio MINAMI, Nobukazu IKEDA
  • Patent number: 10646844
    Abstract: A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: May 12, 2020
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Takatoshi Nakatani, Satoru Yamashita, Kouji Nishino, Nobukazu Ikeda, Keiji Hirao
  • Publication number: 20200088561
    Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level.
    Type: Application
    Filed: December 22, 2017
    Publication date: March 19, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Satoru YAMASHITA, Katsuyuki SUGITA, Kaoru HIRATA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20180071702
    Abstract: A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.
    Type: Application
    Filed: April 11, 2016
    Publication date: March 15, 2018
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Masaaki NAGASE, Kaoru HIRATA, Katsuyuki SUGITA, Takatoshi NAKATANI, Satoru YAMASHITA, Kouji NISHINO, Nobukazu IKEDA, Keiji HIRAO
  • Patent number: 8587180
    Abstract: A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.
    Type: Grant
    Filed: February 18, 2009
    Date of Patent: November 19, 2013
    Assignee: Fujikin Incorporated
    Inventors: Katsuyuki Sugita, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Kaoru Hirata, Takatoshi Nakatani