Abstract: A chemical mechanical polishing method includes bringing a body to be polished into contact with a polishing pad mounted on a rotating polishing table while feeding a polishing slurry to the polishing pad. The polishing pad is formed of a laminate comprising a first pad layer in contact with the body, and a second pad layer positioned on a side of the polishing table with a water-proof film being interposed therebetween wherein the first pad layer is provided with a pad-cooling hole reaching the second pad layer and the second pad layer is provided with a cooling trench radially disposed to interconnect with the pad-cooling hole. The polishing slurry is fed to a surface of the first pad layer to polish the body, while permitting part of the polishing slurry to pass through the pad-cooling hole to the cooling trench.

Abstract: A slurry for touch-up CMP is provided, which includes water, colloidal silica having an average primary particle diameter of 5 to 60 nm, unsintered cerium oxide having an average primary particle diameter of 5 to 60 nm, a multivalent organic acid containing no nitrogen atoms, and a nitrogen-containing heterocyclic compound. The slurry has a pH of 8 to 12.

Abstract: The present invention provides a trackball and an in-vehicle device controller using the trackball. The trackball provides a stable operational feel and is easy to operate even in an environment in a vehicle where vibration and movement are present. The trackball includes a ball made of a non-magnetic material and having embedded therein bar members made of a magnetic material and arranged on three axes orthogonal to one another, a case enclosing the ball such that at least an upper portion of the ball is exposed, magnetic members fixed to the case on two axes penetrating through the center of the ball and orthogonal to each other so as to allow magnetic coupling to ends of the bar members, and another magnetic member fixed to the case on an axis penetrating through the center of the ball and orthogonal to the two axes so as to allow magnetic coupling to an end of one of the bar members.

Abstract: In an exponentiation device, a relatively large table is generated outside of a coprocessor so as to enable high-speed exponentiation to be performed using the small window method. The selection of data from the table and transfer of data to the coprocessor are conducted in parallel with a multiple-length arithmetic operation performed in the coprocessor. So as to avoid bottlenecks occurring in the data transfer between a CPU and the coprocessor, two data banks are provided in the coprocessor for storing the data to be used in the arithmetic operation. By providing two banks in the coprocessor, it is possible to use one for transferring data while data stored in the other is being used in the arithmetic operation. When the operation using the stored data has been completed, the banks are switched, and the arithmetic operation is then repeated using the newly transferred data while at the same time conducting data transfer in readiness for the following operation.

Abstract: A method of manufacturing a semiconductor device includes forming a trench for isolation on a surface of a substrate including a semiconductor substrate, filling the trench with a solution containing a perhydrosilazane polymer by applying the solution on the substrate, converting the solution into a film containing the perhydrosilazane polymer by heating the solution, and converting the film into a silicon dioxide film including heating the film at a first temperature in an atmosphere containing vapor, and heating the film heated at the first temperature at a second temperature lower than the first temperature in an atmosphere containing vapor or in pure water.

Abstract: An information security device receives an input of prime q, and generates prime N that is larger than prime q. In the information security device, a partial information setting unit generates number u such that 2×u×q+1?0 mod Li (i=1, 2, . . . , n). A random number generating unit generates random number R?. A judgement target generating unit generates R=u+L1×L2× . . . ×Ln×R? and N=2×R×q+1, using number u and random number R?. A primality judging unit judges the primality of number N, using numbers N and R generated by the judgement target generating unit.

Abstract: A method for manufacturing a semiconductor device, which includes performing a first chemical mechanical polishing of a surface of an object having an uneven surface by making use of a first polishing liquid containing abrasive particles and a surfactant, and performing a second chemical mechanical polishing of the surface of the object that has been polished by the first chemical mechanical polishing by making use of a second polishing liquid containing abrasive particles and having a concentration of a surfactant lower than that of the first polishing liquid, wherein the first chemical mechanical polishing is switched to the second chemical mechanical polishing when the uneven surface of object is flattened.

Abstract: An optical trackball device of the present invention includes a ball as an operating member, using a material that partially transmits light, and this ball is rotatably supported by a support member. Light emitted from a light emitter disposed beneath the ball is reflected on this ball. A detector detects the reflected light to identify rotation of the ball. Since the light from the light emitter is partially transmitted through the ball, the ball can be illuminated without providing an additional component. Accordingly, a location of the ball is easily recognizable even in a dark place.

Abstract: A data usage controlling apparatus that reads a type 1 key from a storage unit and (a) main data, (b) a type 2 key that has been encrypted using the type 1 key, and (c) condition information that has been encrypted using the type 2 key from a recording medium, decrypts the condition information using the type 2 key, and controls usage of the read main data in accordance with the decrypted condition information. In accordance with usage of the main data, the decrypted condition information is updated, a new type 2 key is generated, and the stored type 1 key is updated. The updated condition information is encrypted using the new type 2 key and used to replace the encrypted condition information on the recording medium. The new type 2 key is encrypted using the updated type 1 key and used to replace the encrypted type 2 key on the recording medium.

Abstract: A multi-word arithmetic device, capable of executing a variety of types of multi-word arithmetic required for elliptic curve cryptology, includes the following. A memory 40, formed from two dual-port memories 41 and 42, temporarily stores n-word integers on which calculation is performed, and a calculation result. An arithmetic unit 20 executes two or more types of calculation, including addition and multiplication, on each word, and outputs a one-word result. A memory input/output unit 30 supplies a maximum of three pieces of one-word data from the memory 40 to the arithmetic unit 20, while simultaneously storing a one-word calculation result from the arithmetic unit 20 in the memory 40. A control unit 10 controls the arithmetic unit 20 and the memory input/output unit 30 so as to have the arithmetic unit execute one of modular addition and Montgomery reduction on n words.

Abstract: The operating force and position of a front side switch and back side press button switches are determined according to the properties of the force and length of the thumb and the other fingers of a driver. The front side switch is disposed on the front side of the spoke of a steering wheel. The back side press button switches are disposed on the back side thereof. This structure improves operability of the front side switch and back side press button switches mounted on the steering wheel.

Abstract: An RSA decryption apparatus that is used in an IC card or the like counters a differential fault attack. The RSA decryption apparatus computes at high speed a public key used in data verification, without having to obtain the public key from an external source. The RSA decryption apparatus includes a remainder computation unit 412 that calculates dp=d mod (p?1), and an inverse computation unit 414 that finds an inverse of dp over a residue field with p?1 as a modulus. The RSA decryption apparatus verifies a decipher text with use of the inverse of dp as the public key. The reduced bit count in inverse computation compared to if the inverse of d is found as the public key increases computing speed.

Abstract: In each digital content utilize session, a memory card generates conversion key information for specifying a data conversion, while a player generates inverse conversion key information for specifying an inverse data conversion. The memory card then performs the data conversion specified by the conversion key information on management information stored therein, and sends the converted management information and digital content stored therein to the player. The player performs the inverse data conversion specified by the inverse conversion key information on the converted management information to restore the management information, and utilizes the digital content in accordance with restrictions set in the restored management information to limit the use of the digital content.

Abstract: The present invention provides a technique which makes it possible to eliminate unauthorized playback of contents where unauthorized apparatuses are used and enable only authorized playback apparatuses to play back contents properly. The playback apparatus of the present invention obtains encrypted key information that has been encrypted by a first secret-key encrypting method, and decrypt the encrypted key information into key information using a secret key stored in a storing unit. When the key information is key-updating information, the playback apparatus updates the secret key according to the key-updating information.

Abstract: Provided is an elliptic curve exponentiation apparatus that can counter the DFA when an elliptic curve exponentiation technique is used. A computation result verification unit 127 receives, as a computation result, an exponentiation-result-point (X, Y) from an elliptic curve computation unit 124. The computation result verification unit 127 computes X3+a×X+b, and computes Y2, and outputs the received exponentiation-result-point when judging that Y2=X3+a×X+b, and does not output the received exponentiation-result-point when not judging that Y2=X3+a×X+b.

Abstract: A trackball device including (i) a sphere, (ii) a support for rotatably supporting the sphere, (iii) a rotation detector for detecting rotation of the sphere, and (iv) a controller. The controller generates a specific output signal responsive to a signal from the rotation detector. The trackball device further includes an informer for generating auxiliary information that gives feedback of the situation to an operator according to how the sphere rotates. This structure can provide a trackball device having excellent user-friendliness. Because this trackball device gives feedback of the position of a pointer on a display to the operator, the operator doesn't have to look at the display. Thus, this trackball device is especially preferable to be incorporated into a vehicle.

Abstract: A method for manufacturing a semiconductor device, which includes performing a first chemical mechanical polishing of a surface of an object having an uneven surface by making use of a first polishing liquid containing abrasive particles and a surfactant, and performing a second chemical mechanical polishing of the surface of the object that has been polished by the first chemical mechanical polishing by making use of a second polishing liquid containing abrasive particles and having a concentration of a surfactant lower than that of the first polishing liquid, wherein the first chemical mechanical polishing is switched to the second chemical mechanical polishing when the uneven surface of object is flattened.

Abstract: A multi-precision exponentiation method and apparatus for use in an encryption/decryption system is disclosed. The encryption/decryption operation uses a computer architecture that includes a central processing unit and a co-processor. The exponent may be represented by a binary data string. The method includes generating an initial look-up table that is indexed by a set of predetermined values. Each predetermined value represents the base raised to a respectively different exponential power. The co-processor calculates the base value raised to the exponent according to a predetermined exponential algorithm. The calculation includes retrieving a sequence of the predetermined values from the look-up table, each of the predetermined values corresponding to one of a plurality of sub-strings of the exponent data string.

Abstract: The present invention provides a trackball and an in-vehicle device controller using the trackball. The trackball provides a stable operational feel and are easy to operate even in an environment in a vehicle where vibration and movement are present. A trackball 2 includes a ball 21 made of a non-magnetic material and having embedded therein bar members 26 to 28 made of a magnetic material and arranged on three axes orthogonal to one another, a case 22 enclosing the ball 21 such that at least an upper portion of the ball 21 is exposed, magnetic members 31 to 34 fixed to the case 22 on two axes penetrating through the center of the ball 21 and orthogonal to each other so as to allow magnetic coupling to ends of the bar members, and a magnetic member 35 fixed to the case 22 on an axis penetrating through the center of the ball 21 and orthogonal to the two axes so as to allow magnetic coupling to an end 28B of the bar member 28.

Abstract: An optical trackball device of the present invention configures a ball, an operating member, using a material that partially transmits light, and this ball is rotatably supported by a support member. Light emitted from a light emitter disposed beneath the ball is reflected on this ball. A detector detects the reflected light to identify rotation of the ball. Since the light from the light emitter is partially transmitted through the ball, the ball can be illuminated without providing an additional component. Accordingly, a location of the ball is easily recognizable even in a dark place.