Patents by Inventor Takaya TAMARU

Takaya TAMARU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220367691
    Abstract: According to one embodiment, a method of manufacturing a semiconductor device, includes forming a first insulating layer, an oxide semiconductor layer, a second insulating layer, a buffer layer and a metal layer sequentially on a base, forming a patterned resist on the metal layer, etching the buffer layer and the metal layer using the resist as a mask to expose an upper surface of the second insulating layer, reducing a volume of the resist to expose an upper surface along a side surface of the metal layer, etching the metal layer using the resist as a mask, to form a gate electrode and to expose an upper surface of the buffer layer, and carrying out ion implantation on the oxide semiconductor layer using the gate electrode as a mask.
    Type: Application
    Filed: April 26, 2022
    Publication date: November 17, 2022
    Applicant: Japan Display Inc.
    Inventors: Hajime WATAKABE, Masashi TSUBUKU, Kentaro MIURA, Akihiro HANADA, Takaya TAMARU
  • Publication number: 20220231149
    Abstract: According to one embodiment, a method of manufacturing a semiconductor device comprises forming an oxide semiconductor layer, forming a gate insulating layer in contact with the oxide semiconductor layer and covering the oxide semiconductor layer, and forming a gate electrode on the gate insulating layer so as to overlap the oxide semiconductor layer, and injecting boron through the gate electrode and the gate insulating layer after forming the gate electrode, wherein a boron concentration included in a region of the gate insulating layer overlapping the gate electrode is in a range of 1E+16 [atoms/cm3] or more.
    Type: Application
    Filed: January 14, 2022
    Publication date: July 21, 2022
    Applicant: Japan Display Inc.
    Inventors: Akihiro HANADA, Kentaro MIURA, Hajime WATAKABE, Masashi TSUBUKU, Toshinari SASAKI, Takaya TAMARU, Takeshi SAKAI