Abstract: An inspection apparatus and an inspection method capable of reducing the effect of noises are provided. An inspection apparatus according to the present invention includes a work table 26 on which an inspection panel 12 is placed, a probe unit 31 including a probe 38 that comes into contact with an electrode 12a of the inspection panel 12 placed on the work table 26, and a stage 11 that moves the work table 26 in order to bring the probe 38 into contact with the electrode 12a of the inspection panel 12 placed on the work table 26, in which the stage 11 is connected to the ground and supports the work table 26 through a resistive element.

Abstract: An inspection apparatus capable of reducing the effect of noises is provided. An inspection apparatus according to the present invention includes a work table 26 on which an object, a fixed body 28 disposed above the work table 26, a probe assembly that holds a probe stylus 38a, a support base member 40 supported on the fixed body 28, a suspension mechanism 46 that supports the probe assembly 38 above the work table 26, and a signal circuit substrate 54 including therein an IC chip 54a that generates an inspection signal supplied to the probe stylus 38a, the signal circuit substrate 54 being supported by the suspension mechanism 46 below the suspension mechanism 46, in which the probe assembly 38 and the support base member 40 are electrically isolated from each other.

Abstract: An inspection apparatus and an inspection method capable of reducing the effect of noises are provided. An inspection apparatus according to the present invention includes a work table 26 on which an inspection panel 12 is placed, a probe unit 31 including a probe 38 that comes into contact with an electrode 12a of the inspection panel 12 placed on the work table 26, and a stage 11 that moves the work table 26 in order to bring the probe 38 into contact with the electrode 12a of the inspection panel 12 placed on the work table 26, in which the stage 11 is connected to the ground and supports the work table 26 through a resistive element.

Abstract: An inspection apparatus capable of reducing the effect of noises is provided. An inspection apparatus according to the present invention includes a work table 26 on which an object, a fixed body 28 disposed above the work table 26, a probe assembly that holds a probe stylus 38a, a support base member 40 supported on the fixed body 28, a suspension mechanism 46 that supports the probe assembly 38 above the work table 26, and a signal circuit substrate 54 including therein an IC chip 54a that generates an inspection signal supplied to the probe stylus 38a, the signal circuit substrate 54 being supported by the suspension mechanism 46 below the suspension mechanism 46, in which the probe assembly 38 and the support base member 40 are electrically isolated from each other.