Abstract: An electromagnetic lens for charged particle beam exhibits positive spherical aberration. A complicated combination of electromagnetic lenses had been necessary for correcting this spherical aberration. One of a circular aperture or a ring-shaped aperture is provided on an incident plate arranged on an incident side of charged particle beam, another of the circular aperture or the ring-shaped aperture is provided on a plate arranged on an emission side thereof, and a voltage is applied between the incident plate and the emission plate. By so doing, an electric field generated in the ring-shaped aperture emanates, which resolves the positive spherical aberration. The spherical aberration can be corrected by an extremely simple and easily implemented structure.

Abstract: An electromagnetic lens for charged particle beam exhibits positive spherical aberration. A complicated combination of electromagnetic lenses had been necessary for correcting this spherical aberration. One of a circular aperture or a ring-shaped aperture is provided on an incident plate arranged on an incident side of charged particle beam, another of the circular aperture or the ring-shaped aperture is provided on a plate arranged on an emission side thereof, and a voltage is applied between the incident plate and the emission plate. By so doing, an electric field generated in the ring-shaped aperture emanates, which resolves the positive spherical aberration. The spherical aberration can be corrected by an extremely simple and easily implemented structure.

Abstract: An electron beam is emitted from an electron beam source, and deflected at different directions with a deflection plate to form a first electron beam E1 and a second electron beam E2. The first electron beam E1 is incident onto a given portion of a sample at an angle of ?1, and the second electron beam E2 is incident onto the same portion of the sample at an angle of ?2. A first image and a second image of the portion of the sample by the first electron beam E1 and the second electron beam E2 are combined at a three-dimensional displaying device to display the portion of the sample three-dimensionally.

Abstract: An electron beam is emitted from an electron beam source, and deflected at different directions with a deflection plate to form a first electron beam E1 and a second electron beam E2. The first electron beam E1 is incident onto a given portion of a sample at an angle of &thgr;1, and the second electron beam E2 is incident onto the same portion of the sample at an angle of &thgr;2. A first image and a second image of the portion of the sample by the first electron beam E1 and the second electron beam E2 are combined at a three-dimensional displaying device to display the portion of the sample three-dimensionally.