Abstract: A method for manufacturing a semiconductor device in which probes and the layout of the electrode pads of a test element group (TEG) are associated is provided. As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Thus, it is necessary to associate the probes and the layout of the electrode pad. According to the method, a layout of a TEG electrode pad corresponding to a plurality of probes arranged in a fan shape or probes manufactured by Micro Electro Mechanical Systems (MEMS) technology is provided.

Abstract: A moving object imaging device is provided in which an optical axis of a camera is changed by a plurality of movable mirrors having different sizes, and which not only improves image quality but also maintains tracking performance.

Abstract: Provided is a moving object imaging apparatus including: an imager that captures an image of a moving object; a first housing that has the imager fixed therein; a first reflecting mirror and a second reflecting mirror that are disposed on an optical axis of the imager; a second housing that houses the first reflecting mirror and the second reflecting mirror; a first deflector that is provided in the second housing and deflects the optical axis of the imager by rotating the first reflecting mirror; and a first rotator that rotates the second housing around the optical axis of the imager with respect to the first housing. A rotation axis of the first deflector and a rotation axis of the first rotator are parallel to each other.

Abstract: Provided is a moving object imaging system including: an imager that captures an image of a moving object and outputs captured image data; a deflector that changes a deflection angle of an optical axis of the imager by rotating a reflecting mirror; a housing that supports the deflector; a posture change detector that detects change in posture of the housing; and a control unit that controls a deflection angle of the deflector in accordance with a detection result of the posture change detector.