Abstract: A gas filling apparatus having a filling nozzle with high operability. A gas filling apparatus 1, comprising; a filling mechanism for transporting a gas from a gas supply source via a gas transporting pipe while measuring flow rate of the gas; a filling hose 3 connected to the gas transporting pipe, the filling hose having a filling nozzle 4 at an end; a nozzle hook 5 on which the filling nozzle is hung; and a guide mechanism 7 for guiding the filling nozzle from the nozzle hook to a predetermined position when the filling nozzle is detached from the nozzle hook. The guide mechanism can guide the filling nozzle to a filling port of a fuel tank mounted on a vehicle, which allows the filling nozzle to move to the filling port of the fuel tank with ease even though the filling nozzle is heavy or a high pressure gas such as hydrogen gas is handled. The nozzle hook can include an injection port 5d for injecting a dry gas to the filling nozzle hung on the nozzle hook.

Abstract: A gas filling apparatus having a filling nozzle with high operability. A gas filling apparatus 1, comprising; a filling mechanism for transporting a gas from a gas supply source via a gas transporting pipe while measuring flow rate of the gas; a filling hose 3 connected to the gas transporting pipe, the filling hose having a filling nozzle 4 at an end; a nozzle hook 5 on which the filling nozzle is hung; and a guide mechanism 7 for guiding the filling nozzle from the nozzle hook to a predetermined position when the filling nozzle is detached from the nozzle hook. The guide mechanism can guide the filling nozzle to a filling port of a fuel tank mounted on a vehicle, which allows the filling nozzle to move to the filling port of the fuel tank with ease even though the filling nozzle is heavy or a high pressure gas such as hydrogen gas is handled. The nozzle hook can include an injection port 5d for injecting a dry gas to the filling nozzle hung on the nozzle hook.

Abstract: The polishing head comprises: a head main body part; a carrier being connected to the head main body part; a pressure chamber; a fluid supplying section; a linear motion guide having an outer cylindrical body and a spline shaft, which is provided in the outer cylindrical body and capable of moving in an axial direction thereof, and which is prohibited to rotate with respect to the outer cylindrical body so as to transmit a rotational force to the spline shaft through the outer cylindrical body; and a rotation transmitting plate being provided between a lower end of the spline shaft and an upper face of the carrier, the rotation transmitting plate being capable of tiltably supporting the carrier and transmitting a rotational force of the spline shaft to the carrier.

Abstract: The work processing apparatus of the present invention comprises: a processing section for processing or treating a work; and a liquid chemical supplying section for supplying a liquid chemical to the processing section. The liquid chemical supplying section includes: a plurality of liquid chemical bags for storing the liquid chemical; a bag holding part in which the liquid chemical bags are attached and held; and a liquid feeding part, to which the liquid chemical bags are detachably connected, for feeding the liquid chemical from the liquid chemical bags to the processing section. Each of the liquid chemical bags is produced by overlapping flexible resin sheets with each other and welding their edge parts to form into a bag. Each of the liquid chemical bags has a port part communicating with an outside. A joint with a valve is attached to each of the port parts.

Abstract: To provide a filling apparatus capable of eliminating a disadvantage caused by a cable connecting a photodetector to a receiver. A filling apparatus 100 according to the present invention includes a radio transmission section 10 with a function of transmitting vehicle information via radio transmission on a filling nozzle 50. In the filling apparatus 100, it is preferable that the radio transmission section 10 is detachably attached to the end portion 50A of the filling nozzle 50.

Abstract: To provide a filling apparatus capable of eliminating a disadvantage caused by a cable connecting a photodetector to a receiver. A filling apparatus 100 according to the present invention includes a radio transmission section 10 with a function of transmitting vehicle information via radio transmission on a filling nozzle 50. In the filling apparatus 100, it is preferable that the radio transmission section 10 is detachably attached to the end portion 50A of the filling nozzle 50.

Abstract: To provide a gas filling apparatus with high handleability and safety. A gas filling apparatus including: a filling mechanism for carrying a gas through gas carrying pipes while measuring flow rate of the gas from a gas supply source (accumulator); a filling hose connected to the gas carrying pipe and having a filling nozzle at an end of the filling hose; and an attachment sensor (nozzle attachment detecting portion) for outputting a detection signal after detecting that the filling nozzle is attached to a filling port of an in-vehicle tank, wherein filling gas to the in-vehicle tank by the filling mechanism becomes possible after the detection signal is inputted to the filling mechanism from the attachment sensor.

Abstract: The polishing head comprises: a head main body part; a carrier being connected to the head main body part; a pressure chamber; a fluid supplying section; a linear motion guide having an outer cylindrical body and a spline shaft, which is provided in the outer cylindrical body and capable of moving in an axial direction thereof, and which is prohibited to rotate with respect to the outer cylindrical body so as to transmit a rotational force to the spline shaft through the outer cylindrical body; and a rotation transmitting plate being provided between a lower end of the spline shaft and an upper face of the carrier, the rotation transmitting plate being capable of tiltably supporting the carrier and transmitting a rotational force of the spline shaft to the carrier.

Abstract: The work processing apparatus of the present invention comprises: a processing section for processing or treating a work; and a liquid chemical supplying section for supplying a liquid chemical to the processing section. The liquid chemical supplying section includes: a plurality of liquid chemical bags for storing the liquid chemical; a bag holding part in which the liquid chemical bags are attached and held; and a liquid feeding part, to which the liquid chemical bags are detachably connected, for feeding the liquid chemical from the liquid chemical bags to the processing section. Each of the liquid chemical bags is produced by overlapping flexible resin sheets with each other and welding their edge parts to form into a bag. Each of the liquid chemical bags has a port part communicating with an outside. A joint with a valve is attached to each of the port parts.

Abstract: To provide a gas filling apparatus with high handleability and safety. A gas filling apparatus including: a filling mechanism for carrying a gas through gas carrying pipes while measuring flow rate of the gas from a gas supply source (accumulator); a filling hose connected to the gas carrying pipe and having a filling nozzle at an end of the filling hose; and an attachment sensor (nozzle attachment detecting portion) for outputting a detection signal after detecting that the filling nozzle is attached to a filling port of an in-vehicle tank, wherein filling gas to the in-vehicle tank by the filling mechanism becomes possible after the detection signal is inputted to the filling mechanism from the attachment sensor.

Abstract: The wafer polishing apparatus comprises a polishing plate, a polishing head capable of holding a wafer, and a slurry supplying section. The polishing plate includes: a plurality of concentric polishing zones, each of which has a prescribed width for polishing the wafer and on each of which a polishing cloth is adhered; and a groove for discharging slurry being formed between the polishing zones. A head cleaning section, which cleans the polishing head, or a wafer cleaning section, which cleans the polished wafer, is provided to a center part of the polishing plate and located on the inner side of the innermost polishing zone.

Abstract: The wafer polishing apparatus comprises a polishing plate, a polishing head capable of holding a wafer, and a slurry supplying section. The polishing plate includes: a plurality of concentric polishing zones, each of which has a prescribed width for polishing the wafer and on each of which a polishing cloth is adhered; and a groove for discharging slurry being formed between the polishing zones. A head cleaning section, which cleans the polishing head, or a wafer cleaning section, which cleans the polished wafer, is provided to a center part of the polishing plate and located on the inner side of the innermost polishing zone.