Abstract: An etching method includes a step of selectively forming deposit on a top surface of a mask disposed on a film of a substrate, a step of etching the film after the step of forming the deposit, a step of forming a layer of chemical species included in plasma of a processing gas, on the substrate, and a step of supplying ions from plasma of an inert gas to the substrate so that the chemical species react with the film.

Abstract: A plasma processing method includes: (a) providing a substrate having an etching target film with a recess formed therein, on a substrate support; (b) forming a protective film on a side wall of the recess; (c) after (b), generating plasma from a processing gas to etch a bottom of the recess; and (d) performing a sequence including (b) and (c) one or more times. The step (c) includes a first stage of etching the bottom of the recess while suppressing a formation of a shoulder portion caused when reaction by-products produced by the etching adhere to the side wall, and a second stage of further etching the bottom of the recess in a state where a temperature of the substrate support is controlled to ?40° C. or lower, after the first stage.

Abstract: An etching method includes a step of selectively forming deposit on a top surface of a mask disposed on a film of a substrate, a step of etching the film after the step of forming the deposit, a step of forming a layer of chemical species included in plasma of a processing gas, on the substrate, and a step of supplying ions from plasma of an inert gas to the substrate so that the chemical species react with the film.

Abstract: An etching method includes a step of selectively forming deposit on a top surface of a mask disposed on a film of a substrate, a step of etching the film after the step of forming the deposit, a step of forming a layer of chemical species included in plasma of a processing gas, on the substrate, and a step of supplying ions from plasma of an inert gas to the substrate so that the chemical species react with the film.

Abstract: A measuring apparatus includes a determining unit configured to determine propagation paths through which acoustic waves propagate. The acoustic waves are transmitted from one or more transmitters, pass through a predetermined region and are received by one or more receivers. The measuring apparatus includes a controlling unit configured to control the transmitters such that acoustic waves are transmitted and propagate through the propagation paths determined by the determining unit. The measuring apparatus includes an identifying unit configured to identify each of propagation times required for each of the acoustic waves transmitted in response to the control by the controlling unit to propagate each of the propagation paths. The measuring apparatus includes a measuring unit configured to measure an air characteristic of the predetermined region based on the propagation times identified by the identifying unit and length of the propagation paths.

Abstract: An ultrasonic therapy apparatus includes a plurality of ultrasonic transducers, a processor that identifies a position of an affected part and determines a focal point of ultrasonic waves radiated by the plurality of ultrasonic transducers based on the determined position of the affected part, and a drive circuit that generates a drive signal for driving the plurality of ultrasonic transducers at individual timings so that the ultrasonic waves are focused at the determined focal point.

Abstract: An etching method includes a step of selectively forming deposit on a top surface of a mask disposed on a film of a substrate, a step of etching the film after the step of forming the deposit, a step of forming a layer of chemical species included in plasma of a processing gas, on the substrate, and a step of supplying ions from plasma of an inert gas to the substrate so that the chemical species react with the film.

Abstract: The present invention reduces noise generated by a phase change in an ultrasonic wave focusing apparatus that changes an ultrasonic wave focal point within a space by changing the phase of vibration of a plurality of ultrasonic transducers. When inputted position coordinates within a three-dimensional space are changed, the ultrasonic wave focusing apparatus calculates a target time lag Tnew that allows ultrasonic waves outputted from the ultrasonic transducers to form a focal point at the changed position coordinates X1, Y1, Z1. The ultrasonic wave focusing apparatus then examines the ultrasonic transducers to locate a particular ultrasonic transducer that outputs an ultrasonic wave whose time lag Ttmp differs from the target time lag Tnew, and changes the phase of the outputted ultrasonic wave to a target phase in multiple steps (steps 140 and 150).

Abstract: A novel system and method based on three-dimensional acoustic-manipulation technology is disclosed. By changing the distribution of an acoustic-potential field generated by ultrasonic phased arrays, objects can be levitated and animated. Various distributions of acoustic-potential fields can be generated in accordance with the present invention, including acoustic-potential fields having arbitrary shapes, including any three-dimensional shapes. One or more ultrasonic phased arrays surrounding a workspace can be used to generate standing waves of various shapes to provide the acoustic-potential fields. Objects can be suspended at the nodes of the acoustic-potential field so that the ultrasound distribution (i.e., the desired arbitrary shape) is visualized. The system and method can be used to realize floating screen or mid-air raster graphics, mid-air vector graphics, and interaction with levitated objects. The system and method can also be used in other applications, including cleaning applications.

Abstract: A plasma generator including: a femtosecond light source that generates a laser pulse beam; a processor that computes a computer generated hologram; a spatial light modulator that modifies the laser pulse beam in accordance with the computer generated hologram; a three dimensional scanner optically coupled to the spatial light modulator to direct the modified laser pulse beam to one or more focal points in air; and a lens that focuses the modified laser pulse beam. The modified laser pulse beam induces a light emission effect at a one or more focal points that can be visible, audible, and palpable.

Abstract: A novel system and method based on three-dimensional acoustic-manipulation technology is disclosed. By changing the distribution of an acoustic-potential field generated by ultrasonic phased arrays, objects can be levitated and animated. Various distributions of acoustic-potential fields can be generated in accordance with the present invention, including acoustic-potential fields having arbitrary shapes, including any three-dimensional shapes. One or more ultrasonic phased arrays surrounding a workspace can be used to generate standing waves of various shapes to provide the acoustic-potential fields. Objects can be suspended at the nodes of the acoustic-potential field so that the ultrasound distribution (i.e., the desired arbitrary shape) is visualized. The system and method can be used to realize floating screen or mid-air raster graphics, mid-air vector graphics, and interaction with levitated objects. The system and method can also be used in other applications, including cleaning applications.

Abstract: An oil separator includes a plurality of separation discs rotatable together with a spindle and layered in an axis direction of the spindle, a nozzle that protrudes from a lower circumferential face of the spindle and configured to rotate the spindle by injection of an oil, a lower case has a gas inflow part into which blow-by gas flows, an oil discharge part into which an oil after separation is discharged, an upper case that sections together with the lower case a housing chamber in which spindle, separation discs and nozzle are housed, and a sectioning member that sections the housing chamber into a primary separation chamber, configured to primarily separate the oil mist, and a secondary separation chamber that secondarily separates the oil mist included in the gas after primary separation, and forms between the nozzle and the separation discs a communication opening that guides the gas being treated.

Abstract: A novel system and method for spatial sound generation is disclosed. A system and method for generating bodiless mid-air speakers includes the steps of: generating a modulated signal by modulating an ultrasonic carrier signal with an audio signal, determining a phase delay value for each ultrasonic transducer of an array of ultrasonic transducers with respect to one or more focal points, and driving each such ultrasonic transducer with the modulated signal in accordance with the phase delay value determined for each ultrasonic transducer to generate audible sound at the one or more focal points.

Abstract: A novel system and method for spatial sound generation is disclosed. A system and method for generating bodiless mid-air speakers includes the steps of: generating a modulated signal by modulating an ultrasonic carrier signal with an audio signal, determining a phase delay value for each ultrasonic transducer of an array of ultrasonic transducers with respect to one or more focal points, and driving each such ultrasonic transducer with the modulated signal in accordance with the phase delay value determined for each ultrasonic transducer to generate audible sound at the one or more focal points.

Abstract: A plasma generator including: a femtosecond light source that generates a laser pulse beam; a processor that computes a computer generated hologram; a spatial light modulator that modifies the laser pulse beam in accordance with the computer generated hologram; a three dimensional scanner optically coupled to the spatial light modulator to direct the modified laser pulse beam to one or more focal points in air; and a lens that focuses the modified laser pulse beam. The modified laser pulse beam induces a light emission effect at a one or more focal points that can be visible, audible, and palpable.

Abstract: A novel system and method for spatial sound generation is disclosed. A system and method for generating bodiless mid-air speakers includes the steps of: generating a modulated signal by modulating an ultrasonic carrier signal with an audio signal, determining a phase delay value for each ultrasonic transducer of an array of ultrasonic transducers with respect to one or more focal points, and driving each such ultrasonic transducer with the modulated signal in accordance with the phase delay value determined for each ultrasonic transducer to generate audible sound at the one or more focal points.

Abstract: The present invention reduces noise generated by a phase change in an ultrasonic wave focusing apparatus that changes an ultrasonic wave focal point within a space by changing the phase of vibration of a plurality of ultrasonic transducers. When inputted position coordinates within a three-dimensional space are changed, the ultrasonic wave focusing apparatus calculates a target time lag Tnew that allows ultrasonic waves outputted from the ultrasonic transducers to form a focal point at the changed position coordinates X1, Y1, Z1. The ultrasonic wave focusing apparatus then examines the ultrasonic transducers to locate a particular ultrasonic transducer that outputs an ultrasonic wave whose time lag Ttmp differs from the target time lag Tnew, and changes the phase of the outputted ultrasonic wave to a target phase in multiple steps (steps 140 and 150).

Abstract: A novel system and method based on three-dimensional acoustic-manipulation technology is disclosed. By changing the distribution of an acoustic-potential field generated by ultrasonic phased arrays, objects can be levitated and animated. Various distributions of acoustic-potential fields can be generated in accordance with the present invention, including acoustic-potential fields having arbitrary shapes, including any three-dimensional shapes. One or more ultrasonic phased arrays surrounding a workspace can be used to generate standing waves of various shapes to provide the acoustic-potential fields. Objects can be suspended at the nodes of the acoustic-potential field so that the ultrasound distribution (i.e., the desired arbitrary shape) is visualized. The system and method can be used to realize floating screen or mid-air raster graphics, mid-air vector graphics, and interaction with levitated objects. The system and method can also be used in other applications, including cleaning applications.

Abstract: An oil separator includes a plurality of separation discs rotatable together with a spindle and layered in an axis direction of the spindle, a nozzle that protrudes from a lower circumferential face of the spindle and configured to rotate the spindle by injection of an oil, a lower case has a gas inflow part into which blow-by gas flows, an oil discharge part into which an oil after separation is discharged, an upper case that sections together with the lower case a housing chamber in which spindle, separation discs and nozzle are housed, and a sectioning member that sections the housing chamber into a primary separation chamber, configured to primarily separate the oil mist, and a secondary separation chamber that secondarily separates the oil mist included in the gas after primary separation, and forms between the nozzle and the separation discs a communication opening that guides the gas being treated.

Abstract: The purpose of the present invention is to provide a dye-sensitized solar cell which has excellent photoelectric conversion efficiency and excellent durability. Disclosed is a dye-sensitized solar cell which comprises: a first conductive supporting body which has a semiconductor-containing layer that is sensitized by a dye; a second conductive supporting body which has a counter electrode and is disposed at a position where the semiconductor-containing layer and the counter electrode face each other at a predetermined distance; a charge transfer layer which is sandwiched between the first and second conductive supporting bodies; and a sealing agent which is provided in the peripheral portions of the first and second conductive supporting bodies for the purpose of sealing the charge transfer layer.