Abstract: A semiconductor pressure sensor includes a cavity disposed in one silicon substrate of a SOI substrate having two silicon substrates bonded to each other with an oxide film therebetween and a diaphragm formed from the other silicon substrate and the oxide film, wherein the oxide film, bordering the cavity, of the diaphragm includes an arc-shaped section at the boundary portion to the one silicon substrate defining the inner wall side surface of the cavity, the arc-shaped section having the same width as the width of the cavity at a desired section in the one silicon substrate and reducing the width of the cavity from the boundary portion toward the diaphragm center.

Abstract: An MEMS sensor package includes an MEMS sensor and a driving IC that controls driving of the MEMS sensor, which are fixed onto the same mounting surface made of a given package material, wherein an MEMS sensor mounting area and a driving IC mounting area are set on the mounting surface, a die attach metalized layer is formed on a package material of the driving IC mounting area, the driving IC is mounted on the die attach metalized layer, and the MEMS sensor is mounted on a package material of the MEMS sensor mounting area.

Abstract: A semiconductor pressure sensor includes a cavity disposed in one silicon substrate of a SOI substrate having two silicon substrates bonded to each other with an oxide film therebetween and a diaphragm formed from the other silicon substrate and the oxide film, wherein the oxide film, bordering the cavity, of the diaphragm includes an arc-shaped section at the boundary portion to the one silicon substrate defining the inner wall side surface of the cavity, the arc-shaped section having the same diameter as the diameter of the cavity in the one silicon substrate and reducing the cavity diameter from the boundary portion toward the diaphragm center.

Abstract: The invention provides an electromagnetic reciprocal drive mechanism having a movable part that is simple to manufacture, dimensionally stable and inexpensive. The device has; a permanent magnet cluster 3, and a spider 4 and retainer 5 that concentrically support the permanent magnet cluster 3, an outer laminated core 6 provided adjacent to the permanent magnet cluster 3, and an electromagnetic coil 8 wound around the outer laminated core 6. An adhesive paper sheet 13 having an adhesive layer 11 on an inner surface and which can be impregnated with an adhesive 12 is wrapped around an outer periphery of the permanent magnet cluster 3, the spider 4 and the retainer 5. The adhesive 12 is then impregnated into the adhesive paper sheet 13 and solidified. In the adhesive paper sheet 13 and the adhesive layer 11 is formed of a plurality of small holes.

Abstract: A fluid bearing mechanism using a one-way valve with such a simple structure that high processing accuracy is not required. A one-way valve 6 includes a valve base 7; an abutting portion 11 protruding inwardly, formed with a small communication hole 12 in a center thereof; a moveable element 8 which is moveable inside the valve base 7 in an axial direction; and a retaining body 9 for retaining the moveable element 8 between the abutting portion 11 and itself inside the valve base 7. The retaining body 9 includes ventilation grooves 8b, 9c for communicating an inside with an outside of the valve base 7. When the piston 2 is moved toward the compressing direction, the moveable element 8 is shifted toward the inside of the piston 2 due to the inner pressure of the cylinder 1 and its inertial force, thus opening the small communication hole 12.

Abstract: A fluid bearing mechanism using a one-way valve with such a simple structure that high processing accuracy is not required. A one-way valve 6 includes a valve base 7; an abutting portion 11 protruding inwardly, formed with a small communication hole 12 in a center thereof; a moveable element 8 which is moveable inside the valve base 7 in an axial direction; and a retaining body 9 for retaining the moveable element 8 between the abutting portion 11 and itself inside the valve base 7. The retaining body 9 includes ventilation grooves 8b, 9c for communicating an inside with an outside of the valve base 7. When the piston 2 is moved toward the compressing direction, the moveable element 8 is shifted toward the inside of the piston 2 due to the inner pressure of the cylinder 1 and its inertial force, thus opening the small communication hole 12.

Abstract: The invention provides an electromagnetic reciprocal drive mechanism having a movable part that is simple to manufacture, dimensionally stable and inexpensive. The device has; a permanent magnet cluster 3, and a spider 4 and retainer 5 that concentrically support the permanent magnet cluster 3, an outer laminated core 6 provided adjacent to the permanent magnet cluster 3, and an electromagnetic coil 8 wound around the outer laminated core 6. An adhesive paper sheet 13 having an adhesive layer 11 on an inner surface and which can be impregnated with an adhesive 12 is wrapped around an outer periphery of the permanent magnet cluster 3, the spider 4 and the retainer 5. The adhesive 12 is then impregnated into the adhesive paper sheet 13 and solidified. In the adhesive paper sheet 13 and the adhesive layer 11 is formed of a plurality of small holes.