Patents by Inventor Takayuki Nakatani

Takayuki Nakatani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240136200
    Abstract: There is provide a technique that includes: etching a base on a surface of a substrate by performing a cycle, the cycle including: (a) forming a layer on a surface of the base by exposing the base to a modifying agent; and (b) causing a reaction between a halogen-containing radical and the base by exposing the layer to a halogen-containing gas such that the layer reacts with the halogen-containing gas to generate the halogen-containing radical.
    Type: Application
    Filed: December 29, 2023
    Publication date: April 25, 2024
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Motomu Degai, Kimihiko Nakatani, Takashi Nakagawa, Takayuki Waseda, Yoshitomo Hashimoto
  • Publication number: 20240112907
    Abstract: There is provided a technique that includes: (a) forming an oxide layer containing a predetermined element on a first film formed on a substrate by supplying a precursor gas containing the predetermined element to the substrate such that hydroxyl group terminations are formed on a surface of the oxide layer and a density of the hydroxyl group terminations on the oxide layer is higher than a density of hydroxyl group terminations on a surface of the first film before (a); and (b) hydrophobizing the surface of the oxide layer by supplying a modifying gas containing a hydrocarbon group to the substrate.
    Type: Application
    Filed: September 15, 2023
    Publication date: April 4, 2024
    Applicant: Kokusai Electric Corporation
    Inventors: Shoma MIYATA, Kimihiko NAKATANI, Takayuki WASEDA, Yoshitomo HASHIMOTO, Yoshiro HIROSE
  • Publication number: 20240096617
    Abstract: There is provided a technique, which includes: (a) supplying a modifying agent to a substrate including a first surface and a second surface to form an inhibitor layer on the first surface and at least a portion of the second surface; and (b) forming a film on the second surface by performing a cycle a predetermined number of times, the cycle including (b1) supplying a precursor to the substrate and (b2) supplying a reactant to the substrate, wherein in (b), a process condition per cycle up to an n-th cycle is set to be different from a process condition per cycle on and after an (n+1)-th cycle, wherein n is an integer of 1 or 2 or more.
    Type: Application
    Filed: July 24, 2023
    Publication date: March 21, 2024
    Applicant: Kokusai Electric Corporation
    Inventors: Kimihiko Nakatani, Takayuki Waseda, Shoma Miyata
  • Patent number: 11935742
    Abstract: There is provided a technique that includes: (a) forming a film formation suppression layer on a surface of a first material of a concave portion of the substrate, by supplying a precursor to the substrate provided with the concave portion on a surface of the substrate to adsorb at least a portion of a molecular structure of molecules constituting the precursor on the surface of the first material of the concave portion, the concave portion having a top surface and a side surface composed of the first material containing a first element and a bottom surface composed of a second material containing a second element; and (b) growing a film on a surface of the second material of the concave portion by supplying a film-forming material to the substrate having the film formation suppression layer formed on the surface of the first material.
    Type: Grant
    Filed: December 14, 2022
    Date of Patent: March 19, 2024
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Yoshitomo Hashimoto, Kimihiko Nakatani, Takayuki Waseda
  • Patent number: 11923191
    Abstract: A substrate processing technique including: (a) modifying a first base surface of a substrate by supplying a first modifier and a second modifier to the substrate having a surface on which the first base and a second base are exposed, wherein the first modifier contains one or more atoms to which at least one first functional group and at least one second functional group are directly bonded, wherein the second modifier contains an atom to which at least one first functional group and at least one second functional group are directly bonded, and wherein the number of the at least one first functional group contained in one molecule of the second modifier is smaller than the number of the at least one first functional group contained in one molecule of the first modifier; and (b) forming a film on a second base surface by supplying film-forming gas to the substrate.
    Type: Grant
    Filed: September 16, 2021
    Date of Patent: March 5, 2024
    Assignee: Kokusai Electric Corporation
    Inventors: Shoma Miyata, Kimihiko Nakatani, Takayuki Waseda, Takashi Nakagawa, Motomu Degai
  • Publication number: 20240071752
    Abstract: There is provided a technique that includes: (a) modifying a surface of a first base exposed on a surface of a substrate to be terminated with a hydrocarbon group by supplying a hydrocarbon group-containing gas to the substrate having the first base and a second base exposed on the surface of the substrate; and (b) selectively forming a film on a surface of the second base by supplying an oxygen- and hydrogen-containing gas to the substrate after modifying the surface of the first base.
    Type: Application
    Filed: November 6, 2023
    Publication date: February 29, 2024
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Takayuki WASEDA, Takashi NAKAGAWA, Kimihiko NAKATANI, Motomu DEGAI, Takao IZAKI, Yoshitomo HASHIMOTO
  • Publication number: 20230358771
    Abstract: Identification information for identifying each analysis appliance and consumable information representing a usage state of a consumable included in each analysis appliance are acquired by an information acquirer from a control device. The identification information and the consumable information acquired by the information acquirer are held by an information holder. A display controller causes a display device to display a list screen of identification information held by the information holder. Further, the display controller causes a usage state of a consumable for each analysis appliance to be displayed on the list screen based on consumable information held by the information holder.
    Type: Application
    Filed: January 18, 2021
    Publication date: November 9, 2023
    Inventors: Tomohiro KAWASE, Yugo HASE, Takayuki NAKATANI
  • Patent number: 11755561
    Abstract: A case data set storage unit includes a plurality of case data sets including difference data representing, a variation from measurement data taken at an initial state to measurement data taken at a plurality of points of time for the same sample under the same measurement condition. An aging degradation estimation unit uses these case data sets to output difference data representing an estimate value of a variation from the measurement data taken at the initial state to measurement data taken, by a measurement device, at or after a first elapsed time, based on difference data representing a variation from the measurement data taken at the initial state to measurement data taken at a plurality of points of time that precede the first elapsed time. An aging degradation correction unit corrects the measurement data taken at or after the first elapsed time, based on the output difference data.
    Type: Grant
    Filed: October 9, 2019
    Date of Patent: September 12, 2023
    Assignee: SHIMADZU CORPORATION
    Inventor: Takayuki Nakatani
  • Patent number: 11449463
    Abstract: A save folder to be used in order for an analysis data acquisition device to save an analysis data file in a storage is created by a creator. When a file determiner determines that the analysis data file is saved in the created save folder, the analysis data file saved in the save folder is registered by a registrator in an analysis database of a database storage device. When an end determiner determines that an instruction for ending registration of the analysis data file in the analysis database has been given, a region processor makes the save folder unavailable for the registration of the analysis data file in the analysis database.
    Type: Grant
    Filed: October 5, 2018
    Date of Patent: September 20, 2022
    Assignee: SHIMADZU CORPORATION
    Inventors: Kazuhito Wakabayashi, Takayuki Nakatani
  • Publication number: 20220260600
    Abstract: An analysis device management system manages one or a plurality of analysis devices and includes a first generator that one-to-one corresponds to each analysis device and manages state information of a corresponding analysis device, a storage that stores the module, a receiver that receives an analysis execution request for using the one or plurality of analysis devices, and a state manager that updates the state information of one or a plurality of modules corresponding to the one or plurality of analysis devices designated by the received analysis execution request.
    Type: Application
    Filed: February 7, 2022
    Publication date: August 18, 2022
    Inventor: Takayuki NAKATANI
  • Publication number: 20210373039
    Abstract: Device information representing a configuration of each analysis device is acquired by a device information acquirer. Schedule information representing a use schedule of each analysis device is acquired by a schedule information acquirer. A sample analysis method is acquired by an analysis method acquirer. An analysis device that is fitted to the analysis method acquired by the analysis method acquirer and is usable is selected by a device selector from among a plurality of analysis devices based on the device information acquired by the device information acquirer and the schedule information acquired by the schedule information acquirer. Identification information for identifying the analysis device selected by the device selector is presented by a presenter.
    Type: Application
    Filed: May 12, 2021
    Publication date: December 2, 2021
    Inventors: Takayuki NAKATANI, Yugo HASE, Tomohiro KAWASE
  • Publication number: 20200117652
    Abstract: A case data set storage unit includes a plurality of case data sets including difference data representing, a variation from measurement data taken at an initial state to measurement data taken at a plurality of points of time for the same sample under the same measurement condition. An aging degradation estimation unit uses these case data sets to output difference data representing an estimate value of a variation from the measurement data taken at the initial state to measurement data taken, by a measurement device, at or after a first elapsed time, based on difference data representing a variation from the measurement data taken at the initial state to measurement data taken at a plurality of points of time that precede the first elapsed time. An aging degradation correction unit corrects the measurement data taken at or after the first elapsed time, based on the output difference data.
    Type: Application
    Filed: October 9, 2019
    Publication date: April 16, 2020
    Applicant: SHIMADZU CORPORATION
    Inventor: Takayuki NAKATANI
  • Publication number: 20190108233
    Abstract: A save folder to be used in order for an analysis data acquisition device to save an analysis data file in a storage is created by a creator. When a file determiner determines that the analysis data file is saved in the created save folder, the analysis data file saved in the save folder is registered by a registrator in an analysis database of a database storage device. When an end determiner determines that an instruction for ending registration of the analysis data file in the analysis database has been given, a region processor makes the save folder unavailable for the registration of the analysis data file in the analysis database.
    Type: Application
    Filed: October 5, 2018
    Publication date: April 11, 2019
    Applicant: SHIMADZU CORPORATION
    Inventors: Kazuhito WAKABAYASHI, Takayuki NAKATANI
  • Patent number: 7416616
    Abstract: Non-heat treated steel for soft-nitriding to form parts having high fatigue strength and excellent bend leveling property even in a case of applying soft-nitriding without thermal refining, comprising, by mass %, C: 0.30 to 0.45%, Si: 0.1 to 0.5%, Mn: 0.6 to 1.0%, Ti: 0.005-0.1% and N: 0.015 to 0.030%, and the balance Fe and impurities, having a mixed microstructure of bainite and ferrite whose bainite fraction is 5 to 90% or having a mixed microstructure of bainite, ferrite and pearlite whose bainite fraction is 5 to 90%, the steel could contain one or more of elements of Nb: 0.003 to 0.1% Mo: 0.01 to 1.0%, Cu: 0.01-1.0%, Ni: 0.01 to 1.0%, B: 0.001 to 0.005%, S: 0.01 to 0.1%, and Ca: 0.0001 to 0.005.
    Type: Grant
    Filed: December 21, 2005
    Date of Patent: August 26, 2008
    Assignee: Sumitomo Metal Industries, Ltd.
    Inventors: Naoyuki Sano, Takayuki Nakatani, Yoshihiko Kamada
  • Publication number: 20080000553
    Abstract: Soft-nitrided parts wherein a ferrite grain in the diffusion layer does not have a ?? nitride of more than 20 ?m in the longitudinal axis, which is made of a non-heat treated steel that has a chemical composition of, by mass %, C: 0.30 to 0.45%, Si: 0.1 to 0.5%, Mn: 0.6 to 1.0%, Ti: 0.005 to 0.1%, N: 0.010 to 0.030%, and the balance Fe and impurities, and that has a mixed microstructure of bainite and ferrite whose bainite fraction is 5 to 90% or a mixed microstructure of bainite, ferrite and pearlite whose bainite fraction is 5 to 90%. The non-heat treated steel may contain one or more elements of 0.001 to 0.1% of Nb, 0.01 to 1.0% of Mo:, 0.01 to 1.0% of Cu, 0.01 to 1.0% of Ni and 0.001 to 0.005% of B, 0.01 to 0.1% of S and 0.0001 to 0.005% of Ca. This invention provides machinery parts, based on this non-heat treated steel for soft-nitriding, which has further improved high fatigue strength and excellent bending straightening property after soft-nitrided even omitting thermal refining.
    Type: Application
    Filed: August 24, 2007
    Publication date: January 3, 2008
    Inventors: Naoyuki Sano, Hitoshi Matsumoto, Takayuki Nakatani, Yoshihiko Kamada, Masaki Amano, Tetsuya Asai
  • Publication number: 20060096671
    Abstract: Non-heat treated steel for soft-nitriding to form parts having high fatigue strength and excellent bend leveling property even in a case of applying soft-nitriding without thermal refining, comprising, by mass %, C: 0.30 to 0.45%, Si: 0.1 to 0.5%, Mn: 0.6 to 1.0%, Ti: 0.005-0.1% and N: 0.015 to 0.030%, and the balance Fe and impurities, having a mixed microstructure of bainite and ferrite whose bainite fraction is 5 to 90% or having a mixed microstructure of bainite, ferrite and pearlite whose bainite fraction is 5 to 90%, the steel could contain one or more of elements of Nb: 0.003 to 0.1% Mo: 0.01 to 1.0%, Cu: 0.01-1.0%, Ni: 0.01 to 1.0%, B: 0.001 to 0.005%, S: 0.01 to 0.1%, and Ca: 0.0001 to 0.005.
    Type: Application
    Filed: December 21, 2005
    Publication date: May 11, 2006
    Inventors: Naoyuki Sano, Takayuki Nakatani, Yoshihiko Kamada
  • Patent number: 5910658
    Abstract: Adjusting variable delay circuit 311, receiving signal S1, is connected to the input of drive circuit 312. A time point t1, when the output potential of drive circuit 312 traverses reference potential VA between the potential Va of traveling wave V1F of the output potential and 0 V, is detected by comparator 52 for detecting the front edge of V1F, detecting variable delay circuit 50 for delaying signal S1 and D flip-flop 51 for holding the output of comparator 52 at the timing of front edge of the signal outputted from delay circuit 50. A time point t2, when the output potential of drive circuit 312 traverses reference potential VB between the superimposed potential of traveling wave V1F and reflected wave V1B and VA, is detected by comparator 62 for detecting the front edge of V1B, detecting variable delay circuit 60 for delaying signal S1 and D flip-flop 61 for holding the output of comparator 62 at the timing of front edge of the signal outputted from delay circuit 60.
    Type: Grant
    Filed: February 20, 1998
    Date of Patent: June 8, 1999
    Assignees: Fujitsu Limited, Advantest Corporation
    Inventors: Soichiro Arai, Kenichi Miyazawa, Hidefumi Yabara, Hiroshi Yasuda, Takayuki Nakatani