Abstract: The oscillation element according to the present invention includes a torsion bar mounted on a base, and an oscillating member having a light reflection surface for reflecting light from a light source, which is fixed on the torsion bar protruding from the base. The oscillating member oscillates about a longitudinal axis of the torsion bar with an elastic deformation of the torsion bar, thereby deflecting the light that reflects at the light reflection surface in a direction intersecting the longitudinal axis. The oscillating member has two plates that are joined together so as to sandwich the torsion bar. On joining surfaces of the plates are provided with grooves for receiving the torsion bar, respectively. The plates have a symmetrical shape that the longitudinal axis serves as the axis of symmetry.

Abstract: A work hardening treatment which decreases the Young's modulus, and an age hardening treatment which recovers or increases the Young's modulus decreased by the work hardening treatment are performed to form a vibrating portion, thereby attaining a vibrating element (30) advantageous in downsizing while ensuring desired fatigue characteristics and vibration characteristics. This downsizes, for example, an actuator device (1), an optical scanning device, a video projection apparatus, and an image forming apparatus.

Abstract: The inner cylindrical body is mounted on the top surface of the rudder-stock; the outer cylindrical body is put on the inner cylindrical body exteriorly; the gudgeon pin provided on the top reverse surface of the outer cylindrical body is inserted into the gudgeon provided on the top surface of the inner cylindrical body; the pin protruded on the top surface of the outer cylindrical body is inserted into the chest fixated to the supports; the rotational movement checking device, that obstructs the pin to rotate, and at the same time, permits it to be displaced in the radial direction, is provided inside the chest; the scale is provided on the outer circumferential surface of the inner cylindrical body; and, the rudder angle detecting optical sensors facing the scale are mounted on the inner circumferential surface of the outer cylindrical body.

Abstract: This invention decreases a spectral reflectance in the entire visible wavelength range, to decrease inconveniences in an image such as flare or ghost. A non-reflective periodic layer including a large number of fine uneven periodic structure bodies is formed on a substrate, and an ND film is formed on the other surface of the substrate by vacuum deposition, to improve an anti-reflection function. Regarding a beam entering the ND filter, the MgF2 film of the formed ND film suppresses the spectral reflectance at the boundary of the atmosphere and the ND film and at the boundary of the ND film and the substrate. The non-reflective periodic layer decreases the reflectance at the boundary of the substrate and the atmosphere.

Abstract: The inner cylindrical body is mounted on the top surface of the rudder-stock; the outer cylindrical body is put on the inner cylindrical body exteriorly; the gudgeon pin provided on the top reverse surface of the outer cylindrical body is inserted into the gudgeon provided on the top surface of the inner cylindrical body; the pin protruded on the top surface of the outer cylindrical body is inserted into the chest fixated to the supports; the rotational movement checking device, that obstructs the pin to rotate, and at the same time, permits it to be displaced in the radial direction, is provided inside the chest; the scale is provided on the outer circumferential surface of the inner cylindrical body; and, the rudder angle detecting optical sensors facing the scale are mounted on the inner circumferential surface of the outer cylindrical body.

Abstract: This invention decreases deformation of a plastic substrate caused by thermal expansion and contraction in an evaporation process of forming a multi-layered film of an ND filter, thus helping prevent wrinkles. The plastic substrate serving as the base of the ND filter is made of a polyimide-based plastic material having a glass transition temperature of 200° C. or more, has a total transmittance of light of 90% or more, and has a haze factor of 0.5% or less. As the multi-layered film, Al2O3 films for reduction of the reflectance and TiOx films for reduction of the transmittance are alternately formed on the substrate.

Abstract: This invention decreases deformation of a plastic substrate caused by thermal expansion and contraction in an evaporation process of forming a multi-layered film of an ND filter, thus arising of wrinkles is prevented. The plastic substrate serving as the base of the ND filter is made of a polyimide-based plastic material having a glass transition temperature of 200° C. or more, and has a total transmittance of light of 90% or more and has a haze factor, which represents the haze of 0.5% or less. As the multi-layered film, Al2O3 films for reduction of the reflectance and TiOx films for reduction of the transmittance are alternately formed on the substrate. An MgF2 film made of a low-refraction material is formed as the uppermost layer to further reduce the reflection. In the evaporation process, even when the temperature of the plastic substrate reaches almost 200° C.

Abstract: What is disclosed is an ND filter that enables relatively easy control of light quantity when used in an iris device and realizes excellent optical performance. The ND filter has a first region having an ND film with a uniform density, a second region having an ND film with a uniform density different from the density of the first region, and a density transition region provided between the first region and the second region. The density transition region has an ND film whose density changes continuously from the density of the first region to the density of the second region.

Abstract: The present invention provides a transfer technique that can improve the transfer ability when reinforcing and expanding the transfer system, with effectively using the existing system. The transfer system includes tracks that link a plurality of manufacturing equipments, a plurality of carriers having different performances that run on the tracks to transfer objects between the manufacturing equipments and the like in a factory space having a plurality of manufacturing equipments, and the plurality of carriers having different performances are simultaneously provided and run on the same tracks. The plurality of carriers are composed of old carriers and new carriers that provided together and run depending on their own performances (running performance such as running speed, acceleration/deceleration, and the like and transfer performance such as transfer speed and the like).

Abstract: The conveyance of wafers in bays (equipment groups) of a clean room is performed by RGVs (Rail Guided Vehicles) that linearly travel at high speed on conveying rails laid on the floor of the clean room. A structure is adopted wherein a conveying area, over which the RGV travels, is separated from a human working area by a compartment (partition), and a human is not allowed to enter the conveying area upon operation of a line.

Abstract: The present invention provides a method of manufacturing an ND filter having a gradation density distribution, the ND filter, and an aperture device and a camera having the ND filter. A structure thereof is as follows. The method of manufacturing an ND filter having at least two kinds of films on a substrate includes the steps of: forming a film of at least one layer other than an outermost layer having a gradation density distribution while rotating a slit mask integrally with the substrate; and forming a film of the outermost layer without using the slit mask.

Abstract: A semiconductor manufacturing system in a clean room is composed of a combination of a flow shop section and a job shop section. The flow shop section is composed of a quasi flow shop section and a quasi job shop section. In the quasi flow shop section, manufacturing apparatuses are arranged respectively so that a difference between processing ability of the manufacturing apparatuses is taken into consideration and a balance in productivity is achieved. In the quasi job shop section, manufacturing apparatuses are arranged respectively so that the balance in productivity is not achieved due to low or high processing ability of the manufacturing apparatuses, and are provided so as to be shared by the quasi flow shop section. Accordingly, a difference between the processing ability of the manufacturing apparatuses can be reduced and the cycle time can be significantly reduced.

Abstract: The present invention provides a transfer technique that can improve the transfer ability when reinforcing and expanding the transfer system, with effectively using the existing system. The transfer system includes tracks that link a plurality of manufacturing equipments, a plurality of carriers having different performances that run on the tracks to transfer objects between the manufacturing equipments and the like in a factory space having a plurality of manufacturing equipments, and the plurality of carriers having different performances are simultaneously provided and run on the same tracks. The plurality of carriers are composed of old carriers and new carriers that provided together and run depending on their own performances (running performance such as running speed, acceleration/deceleration, and the like and transfer performance such as transfer speed and the like).

Abstract: The conveyance of wafers in bays (equipment groups) of a clean room is performed by RGVs (Rail Guided Vehicles) that linearly travel on conveying rails (3) laid on the floor of the clean room at high speed. A structure is adopted wherein a conveying area over which the RGV travels, is separated from a human working area by a compartment (partition) (4), and a human does not enter the conveying area upon operation of a line.

Abstract: A rail-guided transfer system, capable of preventing the reduction of the operation rate of manufacturing equipments on a manufacturing line such as a semiconductor manufacturing line etc., is provided. Two RGVs 11A and 11B are arranged in advance on one transfer rail 3 laid between two stockers BS1 and BS2. For example, when maintenance of the manufacturing equipment EQ8 provided between the stockers BS1 and BS2 is done, a transfer region MA1 of the RGV 11A is set from the stocker BS1 to the manufacturing equipment EQ7 and a transfer region MA2 of the RGV 11B is set from the stocker BS2 to the manufacturing equipment EQ9.

Abstract: The present invention provides a method of manufacturing an ND filter having a gradation density distribution, the ND filter, and an aperture device and a camera having the ND filter. A structure thereof is as follows. The method of manufacturing an ND filter having at least two kinds of films on a substrate includes the steps of: forming a film of at least one layer other than an outermost layer having a gradation density distribution while rotating a slit mask integrally with the substrate; and forming a film of the outermost layer without using the slit mask.

Abstract: An apparatus for feeding waste tire chips (12) to an incinerator (11) having a feed chute (13) comprises a container (17) provided with a screw feeder (22, 23) at its bottom, upper and lower two vibrating feeders (24A), (24B), and a transfer conveyor (36) extending between the lower vibrating feeder (24B) and the feed chute (13). The screw feeder (22, 23) is controlled by a first controller (34) in response to an output signal from a first photoswitch (33) which is mounted on the upper vibrating feeder (24A) for detecting the quantity of chips delivered from the container (17). The transfer conveyor (36) and the lower vibrating feeder (24B) are controlled by a second controller (42) in accordance with an output signal from a second photoswitch (41) which is mounted on the feed chute (13) for detecting the quantity of chips to be fed to the incinerator (11) at a time. The upper vibrating feeder (24 A) is intermittently operated by a third controller (43).

Abstract: A system for recovering as power the pressure and sensible heat of the gas discharged from the top of a blast furnace by guiding the gas to a dry-type dust collector for the removal of dust while maintaining the gas at the furnace top pressure and introducing the gas into a turbine for expansion. To protect the dry-type dust collector when the gas is run off from the furnace at an abnormally high temperature, a gas channel extending from the furnace to the dust collector is provided with at least one injector, which injects a cooling fluid into the gas in response to a signal from a temperature detecting sensor disposed close to the gas outlet of the dust collector. The sensor which is positioned near the dust collector outlet detects the temperature without the time delay attributable to the deposition of dust. With use of the dry-type dust collector, the gas can be fed to the turbine almost without cooling for the recovery of an increased amount of power.

Abstract: A marine Diesel engine consists of parallel left and right engines mounted on a common bed plate having integral independent columns on which the cylinders of the engine are supported, the bed plate and columns forming the crank chambers of the engines. The exhaust and scavenging pipes for the engines are constructed as common parts, the scavenging pipe being mounted between the engines and being flexibly connected to at least one of them so as to permit relative movement between the engine upper portions. A single propeller shaft is driven at a desired low r.p.m. from the crank shafts of the engines through a gearing device consisting simply of a gear on the propeller shaft meshing with a pair of pinions each connected to one of the engine crank shafts by an elastic coupling.