Abstract: Dielectric waveguide comprising a circular input/output electrode on its bottom surface and surrounded by an exposed dielectric portion thereof around which a conductor film is disposed. A short stub crosses through the exposed dielectric portion to couple the electrode and film together. The printed circuit board has a front surface formed with a generally-circular island-shaped electrode surrounded by a front surface-side ground pattern in a spaced-apart relation thereto, and a back surface formed with a strip line surrounded by a back surface-side ground pattern in spaced-apart relation thereto. An approximate center of the island-shaped electrode and one end of the strip line are coupled together, and the front surface-side ground pattern and the back surface-side pattern are coupled together. The input/output electrode of the dielectric waveguide and the island-shaped electrode of the printed circuit board are coupled together.

Abstract: Dielectric waveguide comprising a circular input/output electrode on its bottom surface and surrounded by an exposed dielectric portion thereof around which a conductor film is disposed. A short stub crosses through the exposed dielectric portion to couple the electrode and film together. The printed circuit board has a front surface formed with a generally-circular island-shaped electrode surrounded by a front surface-side ground pattern in a spaced-apart relation thereto, and a back surface formed with a strip line surrounded by a back surface-side ground pattern in spaced-apart relation thereto. An approximate center of the island-shaped electrode and one end of the strip line are coupled together, and the front surface-side ground pattern and the back surface-side pattern are coupled together. The input/output electrode of the dielectric waveguide and the island-shaped electrode of the printed circuit board are coupled together.

Abstract: A mask for exposure, which is used in a multi-column electron beam exposure apparatus having multiple column cells, includes a stencil pattern group constituted by multiple stencil patterns for each of the multiple column cells. The stencil pattern groups are arranged at intervals corresponding to arrangement intervals of the multiple column cells, and all of the stencil pattern groups are formed on a single mask substrate. The stencil pattern groups include: a first stencil pattern group formed within a deflectable range of an electron beam of each of the multiple column cells; and a second stencil pattern group having two or more of the first stencil patterns.

Abstract: A ball screw device 10 capable of increasing a load capacity by increasing the size of ball diameter and the number of threads by preventing the cutout of a nut from being interfered with a thread groove adjacent to the cutout even in the thread groove of a small lead screw and a multiple thread screw, wherein a circulating block 18 forming, in association with the cutout 17, a ball 15 circulation passage 21 for communicating an area between both thread grooves 11 and 13 with a ball return passage 16 is fitted to the cutout 17 formed at the end of the nut 14 so that the large number of balls 15 can be endlessly circulated between both thread grooves 11 and 13, ball circulation passage 21, and ball return passage 16.

Abstract: A multi-column electron beam lithography apparatus includes multiple columns, each including a mask having several aperture patterns; a selective deflector to deflect an electron beam to select an aperture pattern; a bending back deflector to bend the beam passed through the pattern back to the column optical axis; and an electron beam trajectory adjustment unit to adjust deflection efficiencies of the deflectors without the mask installed to allow the beam deflected toward any positions in a deflection region to be bent back and applied to the same position on a sample, and to adjust the deflection efficiency of the selective deflector with the mask installed to allow the beam to be deflected toward any pattern of the mask, while maintaining a relationship between the deflection efficiencies.

Abstract: A mask for exposure, which is used in a multi-column electron beam exposure apparatus having multiple column cells, includes a stencil pattern group constituted by multiple stencil patterns for each of the multiple column cells. The stencil pattern groups are arranged at intervals corresponding to arrangement intervals of the multiple column cells, and all of the stencil pattern groups are formed on a single mask substrate. The stencil pattern groups include: a first stencil pattern group formed within a deflectable range of an electron beam of each of the multiple column cells; and a second stencil pattern group having two or more of the first stencil patterns.

Abstract: A ball screw device has a screw shaft which has a shaft rolling groove in a spiral shape formed on an outer surface of the screw shaft, a nut which has a nut rolling groove formed on an inner surface of the nut and opposed to the shaft rolling groove, wherein the screw shaft is to be screwed in the nut so that the shaft rolling groove and the nut rolling groove are faced through a plurality of rolling balls, and a lubrication ring which is made of a lubricant-including material, comes in slide contact with the screw shaft, and is arranged in an end portion of the nut, wherein a non-contact portion, which does not come in slide contact with the screw shaft, is formed on the slide contact surface of the lubrication ring.

Abstract: A ball screw device 10 capable of increasing a load capacity by increasing the size of ball diameter and the number of threads by preventing the cutout of a nut from being interfered with a thread groove adjacent to the cutout even in the thread groove of a small lead screw and a multiple thread screw, wherein a circulating block 18 forming, in association with the cutout 17, a ball 15 circulation passage 21 for communicating an area between both thread grooves 11 and 13 with a ball return passage 16 is fitted to the cutout 17 formed at the end of the nut 14 so that the large number of balls 15 can be endlessly circulated between both thread grooves 11 and 13, ball circulation passage 21, and ball return passage 16.

Abstract: A ball screw device 1 has a screw shaft assembly 15, a nut 7 having an inner diameter smaller than the outer diameter of the screw shaft assembly 15 and formed in a tubular shape, and balls 9 rolling on helical raceway grooves 3, 8 formed in the outer peripheral surface of the screw shaft assembly 15 and the inner peripheral surface of the nut 7. The screw shaft assembly 15 has a first screw shaft 16, a second screw shaft 17 having a shaft raceway groove 3 with the lead same as the lead of a shaft raceway groove 3 formed in the first screw shaft 16, and a screw-in spacer 11 having the inner peripheral surface fitted on shaft sections 18, 19 each formed on one end of each of the first and the second screw shafts 16, 17.

Abstract: A rolling screw device capable of suppressing the rather early occurrence of damage such as cracking on the tongue of an end deflector, wherein the tip part (20a) of the tongue (20) hit by a ball (13) as a rolling element is chamfered in arc shape to increase the contact area of the tip part (20a) of the tongue (20) with the ball (13).

Abstract: A ball screw has a screw shaft including a screw groove formed in an outer peripheral surface thereof; a nut including a screw groove formed in an inner peripheral surface thereof and screwed together with the screw shaft through a large number of balls rollably disposed in a spiral-shaped ball rolling passage formed by the two screw grooves; and, two seals respectively disposed on the two end portions of the nut for sealing the opening of a clearance between the screw shaft and the nut, wherein two annular grooves are respectively formed in the inner peripheral surfaces of the two end portions of the nut, each of the seals is formed in a substantially annular-ring shape having an outside diameter larger than the inside diameter of the nut and the seals are mounted into the nut by fitting the outer edge portions of the seals into the annular grooves.

Abstract: In a production method for producing a compound semiconductor single crystal by LEC method using a crystal growth apparatus with a double crucible structure, it was made to grow up a crystal by covering the second crucible with a plate-like member having a pass-through slot for being capable of introducing a crystal pulling-up shaft having a seed crystal holding part at a tip into the second crucible and creating a state where an atmosphere within the second crucible scarcely changes (a semi-sealed structure).

Abstract: A ball screw device has a screw shaft which has a shaft rolling groove in a spiral shape formed on an outer surface of the screw shaft, a nut which has a nut rolling groove formed on an inner surface of the nut and opposed to the shaft rolling groove, wherein the screw shaft is to be screwed in the nut so that the shaft rolling groove and the nut rolling groove are faced through a plurality of rolling balls, and a lubrication ring which is made of a lubricant-including material, comes in slide contact with the screw shaft, and is arranged in an end portion of the nut, wherein a non-contact portion, which does not come in slide contact with the screw shaft, is formed on the slide contact surface of the lubrication ring.

Abstract: A ball screw apparatus, has a screw shaft including a screw groove; a nut fitted with the screw shaft, the nut including a screw groove and a ball return passage; a circulation piece including a ball circulation passage; and, a large number of balls, wherein, in the inner peripheral surface of the nut, a concave-shaped snap ring groove extending along the peripheral direction of the nut is formed, in the face of the circulation piece that faces the inside diameter side of the nut, a concave-shaped snap ring groove is formed so as to connect to the snap ring groove of the nut, and an outside diameter portion of a snap ring is fitted into the two snap ring grooves to thereby fix the circulation piece to the nut.

Abstract: A ball screw apparatus has a screw shaft having an outer peripheral surface on which a shaft track groove is formed, a nut moving along with the screw shaft and having front and back end portions and an inner peripheral surface on which a nut track groove is formed and a contact-type seal member provided on each of the front and back end portions of the nut, a groove sliding contact portion is provided on the seal member sliding contacting with the shaft track groove. A first sealing lip is formed on a first outer peripheral of the groove sliding contact portion so as to sliding contact with a first inner surface of the shaft track groove which is defined between a groove bottom center thereof and an edge thereof which is located on a front-side of the moving direction of the nut.

Abstract: An electron beam exposure apparatus, which exposes patterns on a wafer by an electron beam, includes an electron beam producing unit which produces the electron beam and an electron beam shaping member having a plurality of openings which shape the electron beam. The 1st ratio, which is a ratio between opening width of the 1st opening among the plurality of the openings in the 1st direction, which is substantially perpendicular to irradiation direction of the electron beam, and pattern width of the pattern, which should be exposed on the wafer by the electron beam shaped by the 1st opening, in the direction corresponding to the 1st direction, and the 2nd ratio, which is a ratio between opening width of the 2nd opening among the plurality of the openings, in the 1st direction, and pattern width of the pattern, which should be exposed on the wafer by the electron beam shaped by the 2nd opening, in the direction corresponding to the 1st direction, are different.

Abstract: An electron beam exposure apparatus for exposing a pattern accurately even if the current of the electron beam is high. The electron beam exposure apparatus 100 includes a mask 30 with a first and second block patterns for shaping the electron beam. Magnification of the first block pattern to a first exposure pattern which is to be exposed by the electron beam having a first current shaped by the first block pattern is different with magnification of the second block pattern to a second exposure pattern which is to be exposed by the electron beam having a second current shaped by the second block pattern.

Abstract: In a production method for producing a compound semiconductor single crystal by LEC method using a crystal growth apparatus with a double crucible structure, it was made to grow up a crystal by covering the second crucible with a plate-like member having a pass-through slot for being capable of introducing a crystal pulling-up shaft having a seed crystal holding part at a tip into the second crucible and creating a state where an atmosphere within the second crucible scarcely changes (a semi-sealed structure).

Abstract: One end of a cylinder disposed on the outer periphery of a ball screw shaft is fixed to the end face of a ball nut, while the other end of the cylinder is closed by an end plate to thereby form a lubricant filling space between the end plate and the leading end face of the ball screw shaft. And, the lubricant is supplied into the lubricant filling space from a grease nipple mounted on the cylinder.

Abstract: A ball screw has a screw shaft including a screw groove formed in an outer peripheral surface thereof; a nut including a screw groove formed in an inner peripheral surface thereof and screwed together with the screw shaft through a large number of balls rollably disposed in a spiral-shaped ball rolling passage formed by the two screw grooves; and, two seals respectively disposed on the two end portions of the nut for sealing the opening of a clearance between the screw shaft and the nut, wherein two annular grooves are respectively formed in the inner peripheral surfaces of the two end portions of the nut, each of the seals is formed in a substantially annular-ring shape having an outside diameter larger than the inside diameter of the nut and the seals are mounted into the nut by fitting the outer edge portions of the seals into the annular grooves.