Abstract: Provided a vibration measurement device for a rotary tool held by a tool holder that is coupled with a spindle and axially rotates in cooperation with the spindle. The vibration measurement device includes: a pair of acceleration sensors attached to a horizontal plane with respect to a rotary axis of a rotary tool in a manner symmetric to the rotary axis; an amplifier circuit that matches impedance of acceleration information from the acceleration sensors and amplifies voltage; a low-pass filter that removes predetermined high frequencies from an output signal of the amplifier circuit; and a subtraction circuit and an addition circuit that output a parallel vibration signal in an XY direction and a vibration signal in a rotational direction, respectively, from the output signal of the low pass filter.

Abstract: A routing design method applied to an integrated circuit such as an LSI includes the steps of (1) placing a cell serving as a source of signals (source cell) and cells serving as destinations of the signals (destination cells), (2) providing a minimum number of relay spots required on paths between the source cell and the destination cells, (3) providing wires on the paths, (4) extracting parasitic components (wire capacitances and wire resistances) of the wires, and (5) determining delay adjusting elements (cells) to be inserted in the relay spots in accordance with the extracted parasitic components, so that each delay adjusting element has a minimum size. The delay adjusting elements thus determined are inserted in the relay spots.