Abstract: A load part has a nozzle unit having outlets for generating outflow and/or inflow of gas used for replacing the atmosphere of a wafer storage container, in a direction approximately parallel to spaces between adjacent wafers being stored, are a driving unit for extending the nozzle unit to a door opening portion.

Abstract: A load part has a nozzle unit having outlets for generating outflow and/or inflow of gas used for replacing the atmosphere of a wafer storage container, in a direction approximately parallel to spaces between adjacent wafers being stored, are a driving unit for extending the nozzle unit to a door opening portion.

Abstract: A load port, which can selectively place wafer carriers differing in size on a table and can map wafers differing in size stored in the wafer carriers, and an adaptor, which can indirectly attach a wafer carrier on the table, are provided. A load port (100) includes a movable table (110) movably provided on the table (101), a module (161) for determining a carrier, and a module (162) for mapping a wafer. A wafer carrier (200) storing wafers (200A) is indirectly seated on the movable table via an adaptor (10), or a wafer carrier (300) storing wafers (300A) is directly seated on the movable table. The module (161) detects which of the wafer carriers is seated on the movable table and outputs a detection signal in response to the wafer carriers. The module (162) conducts mapping for the wafers, receiving the detection signal sent from the module (161).

Abstract: A load port (100) comprises: a mounting base (101) for mounting a wafer carrier (10); a nozzle unit (110) having nozzle outlets (111) for generating an outflow/inflow of a purge gas in a direction approximately parallel to spaces (A) between wafers (1) stored within the wafer carrier (10) so as to replace the atmosphere of the wafer carrier (10); a driving unit including a nozzle driving motor (166) etc.

Abstract: A connecting device is provided to a wafer carrier for storing a wafer and connected to a purge port having a gas inlet into which a gas for purging an atmosphere in the wafer carrier flows. The connecting device includes, a base; a communication port formed in the base; and a close-contact mechanism that includes, a sealing ring, a groove, and a pressure-reducing passage that communicates with the groove. The pressure in a space defined by the groove and a peripheral edge of the gas inlet is reduced at a position where the base makes contact with the purge port, bringing the gas inlet into close contact with the communication port.