Abstract: A fluorine rubber composition contains a component A that is a base rubber containing a hydrogen-containing fluorine rubber as a main component, a component B that is a compound having a perfluoropolyether skeleton, and a component C that is a powdery filler having a bulk density of 0.4 g/cm3 or less. A part or whole of the component B contains an alkenyl group in a molecule. (pC/dC)/(pB/dB)?4 is satisfied wherein dB is a density of the component B, pB is a content of the component B relative to 100 parts by mass of the component A, dC is the bulk density of the component C, and pC is a content of the component C relative to 100 parts by mass of the component A.

Abstract: To achieve properties such as a desirable compression fracture property, desirable compression set, and the like in the elastomer composition and the seal material using same. The elastomer composition of the present disclosure therefore includes an elastomer, phenol resin in powder form, and silica in powder form. The seal material of the present disclosure is obtained by crosslinking and molding the elastomer composition of the present disclosure. The seal material may be used in a semiconductor manufacturing device.

Abstract: A seal material for a semiconductor manufacturing device is made of a rubber composition containing fluororubber and phenol resin powder. The content of the phenol resin powder is 1 part by mass or more and 50 parts by mass or less with respect to 100 parts by mass of the fluororubber. The average particle size of the phenol resin powder is 1 ?m or more and 20 ?m or less.

Abstract: A wafer-retaining elastic film of a CMP device includes: a film body comprised of an elastic material; and a coating layer formed so as to cover the surface on the wafer retaining side of the film body. The coating layer contains a polymeric binder and nonmetallic particles dispersed in the polymeric binder.

Abstract: A silicone rubber molded body (10) has an article contact surface (11). The article contact surface (11) has a coefficient of rolling resistance lowered by a fluorination treatment on the article contact surface (11).

Abstract: An uncrosslinked rubber composition contains: a hydrogen-containing fluororubber; a thermal crosslinking agent that crosslinks the hydrogen-containing fluororubber when heated to a predetermined temperature; and a hydrogen site protective agent that bonds to carbon radicals resulting from breakage of carbon-hydrogen bonds of the hydrogen-containing fluororubber which occurs under irradiation.

Abstract: An air motor, a rotary atomizing head provided on a front side of the air motor to be rotatable by the air motor, external electrode units provided in a periphery of the rotary atomizing head, and a high-voltage applying unit that applies a high voltage to the external electrode units to indirectly charge paint particles atomized from the rotary atomizing head with the high voltage. A film cover is provided to be formed with a resin material in a film shape for covering an outer peripheral side of the air motor. The film cover includes a cylindrical rear cover that covers the rear side from the external electrode units and a cylindrical front cover that is mounted to the front side of the rear cover to cover the front side from the external electrode units.

Abstract: An air motor, a rotary atomizing head provided on a front side of the air motor to be rotatable by the air motor, external electrode units provided in a periphery of the rotary atomizing head, and a high-voltage applying unit that applies a high voltage to the external electrode units to indirectly charge paint particles atomized from the rotary atomizing head with the high voltage. A film cover is provided to be formed with a resin material in a film shape for covering an outer peripheral side of the air motor. The film cover includes a cylindrical rear cover that covers the rear side from the external electrode units and a cylindrical front cover that is mounted to the front side of the rear cover to cover the front side from the external electrode units.

Abstract: A tank base (12) is formed of a mount block (13) and a feed tube (16), and a first paint passage (17) is provided internally through the feed tube (16). A baggy tank (19) is composed of a support member (20) and a bag member (21) having opposite ends thereof securely fixed to the support member (20) to define a paint chamber (22) therein. A second paint passage (23) is provided in a fore end portion (20A) of the support member (20). A tank accommodating case (25) is provided to accommodate the bag member (21). The baggy tank (19) is set in position within the tank accommodating case (25) with opposite ends of the support member (20) gripped between the mount block (13) of the tank base (12) and the tank accommodating case (25), bringing the paint chamber (22) into communication with the first paint passage (17) through the second paint passage (23).

Abstract: A tank base (12) is formed of a mount block (13) and a feed tube (16), and a first paint passage (17) is provided internally through the feed tube (16). A baggy tank (19) is composed of a support member (20) and a bag member (21) having opposite ends thereof securely fixed to the support member (20) to define a paint chamber (22) therein. A second paint passage (23) is provided in a fore end portion (20A) of the support member (20). A tank accommodating case (25) is provided to accommodate the bag member (21). The baggy tank (19) is set in position within the tank accommodating case (25) with opposite ends of the support member (20) gripped between the mount block (13) of the tank base (12) and the tank accommodating case (25), bringing the paint chamber (22) into communication with the first paint passage (17) through the second paint passage (23).