Abstract: A substrate processing apparatus includes a chamber having a plasma processing space, a sidewall of the chamber having an opening for transferring a substrate into the plasma processing space; and a shutter disposed at an inner side than the sidewall and configured to open or close the opening, the shutter having a flow path for a temperature-controlled fluid.

Abstract: A hybrid electric vehicle comprising: an engine; a filter for collecting particulate matter from the engine; a motor provided on a power transmission path between the engine and the drive wheels; a torque converter having a lock-up clutch provided on the power transmission path between the motor and the drive wheels; and a control device, wherein the control device includes: a first determination unit that determines whether there is a request for regeneration control of the filter by a fuel cut in the engine; a second determination unit that determines whether the lock-up clutch cannot be engaged; and a regeneration control unit that, when an affirmative determination is made in the first determination unit and a negative determination is made in the second determination unit, executes auxiliary regeneration control that assists the rotation of the engine by the motor while releasing the lock-up clutch and executing the fuel cut.

Abstract: A controller uses detection information of a contact sensor or time-series data of a detection value related to a drive motor included in a rotation mechanism and/or a feed mechanism to acquire a coordinate value when a cutting tool comes into contact with a to-be-cut object or a component. The controller determines a relative positional relationship between the cutting tool and a rotation center of the to-be-cut object based on coordinate values when the cutting tool comes into contact with the to-be-cut object subjected to turning work or a reference surface whose relative positional relationship with the rotation center of the to-be-cut object is known at least at two positions different from a rotation angle position of the cutting tool during the turning work.

Abstract: A spindle motor rotates a spindle to which a cutting tool is attached. A feed mechanism moves the cutting tool relative to a thin workpiece. A machining apparatus repeatedly performs a first process of causing the feed mechanism to feed the cutting tool relative to the thin workpiece in a height direction of a rising wall to perform a plunge process on the thin workpiece, and a second process of causing the feed mechanism to feed the cutting tool relative to the thin workpiece in a width direction or the height direction of the rising wall to perform a finishing process on the thin workpiece.

Abstract: A low toughness workpiece cutting apparatus, a low toughness workpiece manufacturing method and a low toughness workpiece manufacturing program for predicting an occurrence of defect and/or non-occurrence of defect before a cutting process of low toughness material. A defect prediction device is provided with a storage device, a processor and an interface. The storage device stores tool data that represent physical characteristics and a shape of a tool, cutting data that represent a group of parameters of a cutting process to be performed to a workpiece by use of the tool and material data that represent physical characteristics and a shape of the workpiece. The processor performs an analysis of deformation of the workpiece due to a cutting force and an analysis of fracture due to the deformation, and performs a prediction of an occurrence of defect and/or a non-occurrence of defect of the workpiece due to the cutting process.

Abstract: A control device acquires first detection values related to control of a motor at a plurality of positions on a first path by moving an object or a tool along the first path with the object and the tool prevented from coming into contact with each other, acquires second detection values related to the control of the motor at a plurality of positions on a second path substantially parallel to the first path by moving the object or the tool along the second path to bring the object and the tool into contact with each other, derives a difference value between the first detection value and the second detection value acquired at each of corresponding positions on the first path and the second path, and detects contact between the tool and the object based on changes in the difference values derived for the plurality of positions.

Abstract: A cutting apparatus includes a cutting tool having a cutting edge, an excitation part structured to apply excitation to the cutting tool, and a drive part structured to apply a voltage to the excitation part to reciprocate the cutting edge of the cutting tool. The excitation part suppresses residual oscillations by applying excitation that contains an excitation force of components of frequencies higher than a resonance frequency and has an excitation force of the resonance frequency suppressed. The excitation part applies a first excitation, and applies a second excitation after an elapse of a time 0.5 times as long as a resonance period from timing at which the first excitation is applied to suppress residual resonance oscillations.

Abstract: Provided is a cutting method of cutting, with a diamond cutting tool, a metal material having at least a solid solution layer on a surface, the solid solution layer containing nitrogen atoms as interstitial solid solution atoms. In this method, cutting is performed in a region where a nitrogen concentration is equal to or greater than a predetermined concentration, and cutting is not performed in a region where the nitrogen concentration is less than the predetermined concentration.

Abstract: A rotation mechanism rotates a spindle to which a cutting tool or a workpiece is attached. A rotation controller controls the rotation of the spindle by the rotation mechanism. A feed mechanism moves the cutting tool relative to the workpiece. The rotation controller alternately exercises acceleration control under which the rotation of the spindle is accelerated to make a speed fluctuation ratio between the current cutting speed and a cutting speed one rotation before at the same rotation position equal to or greater than the first value that is greater than 1 and deceleration control under which the rotation of the spindle is decelerated to make the speed fluctuation ratio equal to or less than the second value that is less than 1.

Abstract: A drill bit includes a cutting edge formed at a distal end of a drill bit body, a chip ejection flute having a rake face on a side adjacent to the distal end of the drill bit body, the chip ejection flute extending from the rake face toward a proximal end of the drill bit body, and a chip guide part provided, on the rake face, extending along an extending direction of the chip ejection flute. The chip guide part has at least one guide groove extending along the extending direction of the chip ejection flute from a ridge portion where the cutting edge is provided or from near the ridge portion.

Abstract: A rotation controller controls a rotation mechanism for rotation of a spindle. A movement controller causes, while the spindle is rotating, a feed mechanism to bring a cutting tool into contact with a workpiece to cause the cutting tool to cut the workpiece. The rotation controller controls a spindle rotation speed so as to accelerate or decelerate the rotation of the spindle, and the movement controller brings the cutting tool into contact with the workpiece after the rotation controller starts the rotation of the spindle, and separates the cutting tool from the workpiece while the spindle rotation speed is put under the acceleration control or deceleration control exercised by the rotation controller.

Abstract: A controller uses detection information of a contact sensor or time-series data of a detection value related to a drive motor included in a rotation mechanism and/or a feed mechanism to acquire a coordinate value when a cutting tool comes into contact with a to-be-cut object or a component. The controller determines a relative positional relationship between the cutting tool and a rotation center of the to-be-cut object based on coordinate values when the cutting tool comes into contact with the to-be-cut object subjected to turning work or a reference surface whose relative positional relationship with the rotation center of the to-be-cut object is known at least at two positions different from a rotation angle position of the cutting tool during the turning work.

Abstract: A movement controller controls a feed mechanism to move a vibration device relative to a workpiece. A vibration controller controls vibration of piezoelectric elements of the vibration device. The vibration controller acquires a status value indicating a vibration control status and detects contact between a cutting tool and the workpiece or the like based on a change in the status value. The vibration controller acquires at least one among energy consumption required for the vibration and a resonance frequency as the status value. The vibration controller determines a relative positional relationship between the cutting tool and a rotation center of the workpiece based on coordinate values of at least two contact positions.

Abstract: An end mill machining apparatus, a CAM apparatus, an NC program, and a machining method which suppress regenerative self-excited vibration and mode-coupling self-excited vibration. An end mill machining apparatus includes an end mill, and a control section for controlling the end mill. The ratio of the protrusion length of the end mill to the diameter of the end mill falls within a range of 5 to 50. The end mill is a variable pitch, uniform helix type or a variable helix type. The control section controls the end mill such that the contact angle between the end mill and a workpiece M1 during machining becomes equal to or smaller than a critical contact angle ?lim.

Abstract: An end mill machining apparatus, a CAM apparatus, an NC program, and a machining method which suppress regenerative self-excited vibration and mode-coupling self-excited vibration. An end mill machining apparatus includes an end mill, and a control section for controlling the end mill. The ratio of the protrusion length of the end mill to the diameter of the end mill falls within a range of 5 to 50. The end mill is a variable pitch, uniform helix type or a variable helix type. The control section controls the end mill such that the contact angle between the end mill and a workpiece M1 during machining becomes equal to or smaller than a critical contact angle ?lim.