Patents by Inventor Takehiro Ogata

Takehiro Ogata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing semiconductor device and semiconductor manufacturing apparatus
    Patent number: 9514952
    Abstract: A method of manufacturing a semiconductor device includes processing a plurality of substrates each provided with an etch target by using a chemical liquid, the chemical liquid used repeatedly and being mixed with water for adjustment of an etch rate.
    Type: Grant
    Filed: April 6, 2015
    Date of Patent: December 6, 2016
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hiroyasu Iimori, Takehiro Ogata, Tomohiko Sugita
  • METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
    Publication number: 20160071738
    Abstract: A method of manufacturing a semiconductor device includes processing a plurality of substrates each provided with an etch target by using a chemical liquid, the chemical liquid used repeatedly and being mixed with water for adjustment of an etch rate.
    Type: Application
    Filed: April 6, 2015
    Publication date: March 10, 2016
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hiroyasu Iimori, Takehiro Ogata, Tomohiko Sugita