Patents by Inventor Takehiro Zushi

Takehiro Zushi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180135196
    Abstract: When copper is filled in a fine groove or hole (hereinafter sometimes referred to as a “trench”) of a base to be plated, which has formed therein the trench, by copper electroplating, the occurrence of voids and the deposition of copper on a region other than the trench have heretofore been problems. To solve the problems, the present invention provides an additive for a copper electroplating bath, consisting of at least one polymer compound selected from polymer compounds each represented by the following general formula (1) or the following general formula (2), each of the polymer compounds having a weight-average molecular weight of from 20,000 to 10,000,000. (In the formulae, X represents at least one unit selected from units represented by specific structures, and a ratio of a to b, i.e. “a:b” falls within the range of from 10:90 to 99:1.
    Type: Application
    Filed: December 21, 2017
    Publication date: May 17, 2018
    Applicant: ADEKA CORPORATION
    Inventors: Takuya TAKAHASHI, Takahiro YOSHII, Tomoko HATSUKADE, Takehiro ZUSHI
  • Publication number: 20160053394
    Abstract: The present invention relates to an additive for a copper electroplating bath, including at least one polymer compound selected from polymer compounds each represented by the following general formula (1) or the following general formula (2), each of the polymer compounds having a weight-average molecular weight of from 20,000 to 10,000,000; a copper electroplating bath including the additive; and a copper electroplating method using the copper electroplating bath. (In the formulae, X represents at least one unit selected from units represented by specific structures, and a ratio of a to b, i.e. “a:b” falls within the range of from 10:90 to 99:1.
    Type: Application
    Filed: March 19, 2014
    Publication date: February 25, 2016
    Applicant: ADEKA CORPORATION
    Inventors: Takuya TAKAHASHI, Takahiro YOSHII, Tomoko HATSUKADE, Takehiro ZUSHI
  • Patent number: 8795505
    Abstract: A copper electroplating method including dipping a substrate in a copper electroplating solution, the substrate including a seed layer; and forming a copper electroplating layer on the seed layer, wherein the copper electroplating solution includes water, a copper supply source, an electrolytic material, and a first additive, the first additive includes a compound represented by Formula 1, below:
    Type: Grant
    Filed: November 7, 2011
    Date of Patent: August 5, 2014
    Assignees: Samsung Electronics Co., Ltd., Adeka Corporation
    Inventors: Myung-Beom Park, Jung-Sik Choi, Ki-Hyeon Kim, Yuji Morishima, Shin-ichi Tanaka, Takashi Yamada, Takehiro Zushi
  • Patent number: 8318958
    Abstract: Disclosed is a method for epoxidizing olefins, which enables an epoxy compound containing no halogen atom with high yield. Specifically disclosed is an oxidizing agent composition for epoxidation of olefins, which is characterized by containing peroxide which exhibits basicity when dissolved in water and an acid anhydride.
    Type: Grant
    Filed: September 26, 2008
    Date of Patent: November 27, 2012
    Assignee: Adeka Corporation
    Inventors: Takaaki Kikuchi, Takehiro Zushi, Hirohisa Nitoh
  • Publication number: 20120211369
    Abstract: A copper electroplating method including dipping a substrate in a copper electroplating solution, the substrate including a seed layer; and forming a copper electroplating layer on the seed layer, wherein the copper electroplating solution includes water, a copper supply source, an electrolytic material, and a first additive, the first additive includes a compound represented by Formula 1, below:
    Type: Application
    Filed: November 7, 2011
    Publication date: August 23, 2012
    Inventors: Myung-Beom Park, Jung-Sik Choi, Ki-Hyeon Kim, Yuji Morishima, Shin-ichi Tanaka, Takashi Yamada, Takehiro Zushi
  • Publication number: 20100228040
    Abstract: Disclosed is a method for epoxidizing olefins, which enables an epoxy compound containing no halogen atom with high yield. Specifically disclosed is an oxidizing agent composition for epoxidation of olefins, which is characterized by containing peroxide which exhibits basicity when dissolved in water and an acid anhydride.
    Type: Application
    Filed: September 26, 2008
    Publication date: September 9, 2010
    Inventors: Takaaki Kikuchi, Takehiro Zushi, Hirohisa Nitoh
  • Publication number: 20070185000
    Abstract: Provided is a cleanser for organic-inorganic composite fouling. This cleanser is composed of an aqueous solution of hydrogen peroxide, acetic acid, peracetic acid, a nonionic surfactant, and a cationic and/or amphoteric surfactant, has disinfectant activities and, especially when biofilms have occurred as organic fouling, can effectively remove by itself composite fouling of the biofilms and inorganic fouling such as calcium carbonate and calcium phosphate.
    Type: Application
    Filed: June 6, 2005
    Publication date: August 9, 2007
    Applicant: ADEKA CORPORATION
    Inventors: Takehiro Zushi, Tadahiro Hukai, Hiromasa Kawamata