Abstract: An examination device for a substance of biological origin includes: a base; a placing area for placing the substance of biological origin, the placing area being on a first surface of the base; a first monitor electrode; and a second monitor electrode, wherein a shortest distance from a center of the placing area to the first monitor electrode and a shortest distance from the center of the placing area to the second monitor electrode are different.

Abstract: A biochip including a plate-like diaphragm part provided with a through-hole, a wall part provided at an outer periphery of the diaphragm part, and a reinforcing part formed in a portion other than the through-hole in the diaphragm part.

Abstract: A filter device of the present disclosure includes at least a sheet-shaped fiber structure having a plurality of fibers made of amorphous silicon dioxide, wherein the plurality of fibers are tangled and thus connected together to form voids in the sheet-shaped fiber structure. A filter device of the present disclosure corresponds to an analysis device including: a substrate; a flow path formed on the substrate; and a sheet-shaped fiber structure provided on the inner wall of the flow path, wherein the sheet-shaped fiber structure includes a plurality of fibers made of amorphous silicon dioxide, and the plurality of fibers are tangled and thus connected together to form voids in the sheet-shaped fiber structure.

Abstract: A cellular electrophysiology sensor is adapted to measure an electrical change of a test cell. A chip for the sensor includes a diaphragm, and a thermally-oxidized film mainly containing silicon dioxide on the diaphragm. The diaphragm includes a silicon layer and a silicon dioxide layer on an upper surface of the silicon layer. A through-hole passing through the silicon layer and the silicon dioxide layer is formed. The through-hole has an opening which opens at the silicon dioxide layer and is adapted to capture the test cell. The thermally-oxidized film is provided on an inner wall surface of the through-hole, and unified with the silicon dioxide layer at the opening of the through-hole. This cellular electrophysiology sensor chip can stably capture the test cell and provides a gigaseal stably even if test cells have different properties.

Abstract: An examination device for a substance of biological origin includes: a base; a placing area for placing the substance of biological origin, the placing area being on a first surface of the base; a first monitor electrode; and a second monitor electrode, wherein a shortest distance from a center of the placing area to the first monitor electrode and a shortest distance from the center of the placing area to the second monitor electrode are different.

Abstract: A filter device is configured to filter a sample containing a liquid component and plural solid components mixed with the liquid component. The filter device includes a filter part, and a capturing-retaining mechanism. The filter part is configured to capture the solid components and to allow the liquid component to pass through the filter part. The capturing-retaining mechanism is configured to prevent the captured solid components from being removed from the filter part when the sample passes through the filter part. The filter device has high filter performance.

Abstract: A biochip including a plate-like diaphragm part provided with a through-hole, a wall part provided at an outer periphery of the diaphragm part, and a reinforcing part formed in a portion other than the through-hole in the diaphragm part.

Abstract: A filter device of the present disclosure includes a first port from which a solution containing a substance is to be input, and a first flow passage communicating with the first port. A filter portion made of a plurality of fibrous substances including inorganic oxide is formed in at least one part in the first flow passage. The plurality of fibrous substances has one peak in the diameter distribution.

Abstract: A flow channel structure includes a substrate having a flow channel formed therein, and plural fibrous bristles extending from the inner wall of the flow channel. The flow channel is configured to allow a solution to flow through the flow channel. The inner wall of the flow channel is made of silicon. The flow channel is configured to allow a solution to flow through the flow channel. This flow channel structure can homogenize the solution inside the flow channel.

Abstract: A filter device of the present disclosure includes at least a sheet-shaped fiber structure having a plurality of fibers made of amorphous silicon dioxide, wherein the plurality of fibers are tangled and thus connected together to form voids in the sheet-shaped fiber structure. A filter device of the present disclosure corresponds to an analysis device including: a substrate; a flow path formed on the substrate; and a sheet-shaped fiber structure provided on the inner wall of the flow path, wherein the sheet-shaped fiber structure includes a plurality of fibers made of amorphous silicon dioxide, and the plurality of fibers are tangled and thus connected together to form voids in the sheet-shaped fiber structure.

Abstract: A sensor chip is a sensor device for measuring a property of a substance by adsorbing the substance on a surface of the sensor chip. The sensor chip includes a diaphragm having a first surface, a second surface, and at least one through hole penetrating from the first surface to the second surface. At least a part of the first surface, the second surface, and an inner wall surface of the through hole is covered with a noncrystalline solid layer including SiOX as a main component, in which substance X is an element having higher electronegativity than that of silicon.

Abstract: A surface plasmon resonance sensor includes a substrate, a dielectric film having a nonlinear optical effect on a first surface of the substrate, and a probe fixed to the dielectric film. A plasmon resonance is produced by resonating a surface plasmon generated on the first surface of the substrate with an evanescent wave generated on a second surface of the substrate by incident light radiated to the second surface. The plasmon resonance is detected by measuring a change of a component of light reflected on the second surface of the substrate. The component of the reflected light is caused by the nonlinear optical effect. This surface plasmon resonance sensor has a high measuring sensitivity.

Abstract: A sensor chip is a sensor device for measuring a property of a substance by adsorbing the substance on a surface of the sensor chip. The sensor chip includes a diaphragm having a first surface, a second surface, and at least one through hole penetrating from the first surface to the second surface. At least a part of the first surface, the second surface, and an inner wall surface of the through hole is covered with a noncrystalline solid layer including SiOX as a main component, in which substance X is an element having higher electronegativity than that of silicon.

Abstract: A filter device of the present disclosure includes a first port from which a solution containing a substance is to be input, and a first flow passage communicating with the first port. A filter portion made of a plurality of fibrous substances including inorganic oxide is formed in at least one part in the first flow passage. The plurality of fibrous substances has one peak in the diameter distribution.

Abstract: A silicon structure has a substrate, a first layer formed on a surface of the substrate, and a fibrous film formed on a surface of the first layer. The first layer and the fibrous film are silicon compounds made of the same elements, and the first layer and the fibrous film are directly bonded together.

Abstract: A sensor device includes a substrate and a sensor chip held on the substrate. The substrate includes a flow channel. The sensor chip includes a plate. The plate includes a first surface and a second surface opposite to the first surface. A plurality of through holes each penetrates through the first surface and the second surface. A direction of a line segment connecting centers of any two adjacent through holes among the plurality of through holes is neither parallel nor perpendicular to the center line of the flow channel.

Abstract: A flow path device includes a substrate having a trench and columns extending from a bottom of the trench. The trench is configured to have a fluid flowing therein. Each of columns has a side surface having grooves formed therein. The grooves have an annular shape or an arcuate shape. This flow path device reduces damage to the columns, and has a high reliability.

Abstract: A surface plasmon resonance sensor includes a substrate, a dielectric film having a nonlinear optical effect on a first surface of the substrate, and a probe fixed to the dielectric film. A plasmon resonance is produced by resonating a surface plasmon generated on the first surface of the substrate with an evanescent wave generated on a second surface of the substrate by incident light radiated to the second surface. The plasmon resonance is detected by measuring a change of a component of light reflected on the second surface of the substrate. The component of the reflected light is caused by the nonlinear optical effect. This surface plasmon resonance sensor has a high measuring sensitivity.

Abstract: A flow channel structure includes a substrate having a flow channel formed therein, and plural fibrous bristles extending from the inner wall of the flow channel. The flow channel is configured to allow a solution to flow through the flow channel. The inner wall of the flow channel is made of silicon. The flow channel is configured to allow a solution to flow through the flow channel. This flow channel structure can homogenize the solution inside the flow channel.

Abstract: A cellular electrophysiology sensor is adapted to measure an electrical change of a test cell. A chip for the sensor includes a diaphragm, and a thermally-oxidized film mainly containing silicon dioxide on the diaphragm. The diaphragm includes a silicon layer and a silicon dioxide layer on an upper surface of the silicon layer. A through-hole passing through the silicon layer and the silicon dioxide layer is formed. The through-hole has an opening which opens at the silicon dioxide layer and is adapted to capture the test cell. The thermally-oxidized film is provided on an inner wall surface of the through-hole, and unified with the silicon dioxide layer at the opening of the through-hole.