Patents by Inventor Takenori Asahi

Takenori Asahi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device and manufacturing process thereof
    Patent number: 6246105
    Abstract: A semiconductor device having an insulation protection film with increased reliability and improved device characteristics, and a manufacturing method thereof which improves the planarization and reduces the interlayer capacitance of the device. The semiconductor device has a semiconductor substrate including a MOS device, a plurality of wiring regions formed on the semiconductor substrate, and a protective insulation film formed on the top layer of the wiring regions. The protective insulation film includes a first silicon oxide film, a second silicon oxide film formed on the first silicon oxide film, and a silicon nitride film composing the top layer.
    Type: Grant
    Filed: October 30, 1998
    Date of Patent: June 12, 2001
    Assignee: Seiko Epson Corporation
    Inventors: Yukio Morozumi, Takenori Asahi